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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7244952 |
Combinations of deflection chopping systems for minimizing energy spreads |
Jul. 17, 2007 |
| 7241361 |
Magnetically enhanced, inductively coupled plasma source for a focused ion beam system |
Jul. 10, 2007 |
| 7238956 |
Device for controlling an apparatus generating a charged particle beam |
Jul. 3, 2007 |
| 7238597 |
Boron ion delivery system |
Jul. 3, 2007 |
| 7235795 |
Semiconductor device manufacturing apparatus and a method of controlling a semiconductor device manufacturing process |
Jun. 26, 2007 |
| 7235796 |
Method and apparatus for the generation of anionic and neutral particulate beams and a system using same |
Jun. 26, 2007 |
| 7235797 |
Method of implanting a substrate and an ion implanter for performing the method |
Jun. 26, 2007 |
| 7235798 |
Focused ion beam apparatus |
Jun. 26, 2007 |
| 7230256 |
Ion doping system, ion doping method and semiconductor device |
Jun. 12, 2007 |
| 7227160 |
Systems and methods for beam angle adjustment in ion implanters |
Jun. 5, 2007 |
| 7227140 |
Method, system and device for microscopic examination employing fib-prepared sample grasping element |
Jun. 5, 2007 |
| 7227159 |
Ion implantation apparatus and ion implanting method |
Jun. 5, 2007 |
| 7223990 |
Ion beam irradiation device |
May. 29, 2007 |
| 7220976 |
Ion source and ion implanter having the same |
May. 22, 2007 |
| 7217934 |
Wafer scanning device |
May. 15, 2007 |
| 7214951 |
Charged-particle multi-beam exposure apparatus |
May. 8, 2007 |
| 7211811 |
Method for preventing wafer surface from bombardment by micro-dust particles during the ion implantation process |
May. 1, 2007 |
| 7205552 |
Monatomic boron ion source and method |
Apr. 17, 2007 |
| 7205554 |
Method and apparatus for processing a micro sample |
Apr. 17, 2007 |
| 7205556 |
Bellows liner for an ion beam implanter |
Apr. 17, 2007 |
| 7205560 |
Method and apparatus for processing a micro sample |
Apr. 17, 2007 |
| 7202483 |
Methods and apparatus for ion beam angle measurement in two dimensions |
Apr. 10, 2007 |
| 7202487 |
Apparatus for ion implantation |
Apr. 10, 2007 |
| 7199383 |
Method for reducing particles during ion implantation |
Apr. 3, 2007 |
| 7193227 |
Ion beam therapy system and its couch positioning method |
Mar. 20, 2007 |
| 7189982 |
Focused ion beam apparatus and aperture |
Mar. 13, 2007 |
| 7189980 |
Methods and systems for optimizing ion implantation uniformity control |
Mar. 13, 2007 |
| 7186992 |
Method of fabricating a polarizing layer on an interface |
Mar. 6, 2007 |
| 7176458 |
Method and apparatus for specimen fabrication |
Feb. 13, 2007 |
| 7176470 |
Technique for high-efficiency ion implantation |
Feb. 13, 2007 |
| 7173261 |
Image noise removing method in FIB/SEM complex apparatus |
Feb. 6, 2007 |
| 7170070 |
Ion implanters having an arc chamber that affects ion current density |
Jan. 30, 2007 |
| 7170067 |
Ion beam measurement apparatus and method |
Jan. 30, 2007 |
| 7166853 |
Active method and system of establishing electrical contact |
Jan. 23, 2007 |
| 7166854 |
Uniformity control multiple tilt axes, rotating wafer and variable scan velocity |
Jan. 23, 2007 |
| 7161352 |
Beam current measuring device and apparatus using the same |
Jan. 9, 2007 |
| 7161161 |
Uniformity control using multiple fixed wafer orientations and variable scan velocity |
Jan. 9, 2007 |
| 7154105 |
Method of exposing using electron beam |
Dec. 26, 2006 |
| 7154106 |
Composite system of scanning electron microscope and focused ion beam |
Dec. 26, 2006 |
| 7147722 |
Method for in-situ cleaning of carbon contaminated surfaces |
Dec. 12, 2006 |
| 7145157 |
Kinematic ion implanter electrode mounting |
Dec. 5, 2006 |
| 7141809 |
Method for reciprocating a workpiece through an ion beam |
Nov. 28, 2006 |
| 7139009 |
Ion printer |
Nov. 21, 2006 |
| 7138641 |
Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system |
Nov. 21, 2006 |
| 7138628 |
Method and apparatus for specimen fabrication |
Nov. 21, 2006 |
| 7135691 |
Reciprocating drive for scanning a workpiece through an ion beam |
Nov. 14, 2006 |
| 7132673 |
Device and method for milling of material using ions |
Nov. 7, 2006 |
| 7132672 |
Faraday dose and uniformity monitor for plasma based ion implantation |
Nov. 7, 2006 |
| 7126139 |
Device and method of positionally accurate implantation of individual particles in a substrate surface |
Oct. 24, 2006 |
| 7126141 |
Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method |
Oct. 24, 2006 |
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