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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7351984 |
Controlling the characteristics of implanter ion-beams |
Apr. 1, 2008 |
| 7351986 |
Method and apparatus for reducing cross contamination of species during ion implantation |
Apr. 1, 2008 |
| 7351987 |
Irradiation system with ion beam |
Apr. 1, 2008 |
| 7348577 |
Method for controlling a vaporizer of ion implantation equipment during indium implantation process |
Mar. 25, 2008 |
| 7348576 |
Technique for ion beam angle process control |
Mar. 25, 2008 |
| 7345291 |
Device for irradiation therapy with charged particles |
Mar. 18, 2008 |
| 7342238 |
Systems, control subsystems, and methods for projecting an electron beam onto a specimen |
Mar. 11, 2008 |
| 7342239 |
Ion implanation method and device using thereof |
Mar. 11, 2008 |
| 7342240 |
Ion beam current monitoring |
Mar. 11, 2008 |
| 7329882 |
Ion implantation beam angle calibration |
Feb. 12, 2008 |
| 7326937 |
Plasma ion implantation systems and methods using solid source of dopant material |
Feb. 5, 2008 |
| 7326941 |
Apparatus and methods for ion beam implantation using ribbon and spot beams |
Feb. 5, 2008 |
| 7326942 |
Ion beam system and machining method |
Feb. 5, 2008 |
| 7323700 |
Method and system for controlling beam scanning in an ion implantation device |
Jan. 29, 2008 |
| 7323685 |
Ion beam processing method |
Jan. 29, 2008 |
| 7323695 |
Reciprocating drive for scanning a workpiece |
Jan. 29, 2008 |
| RE40009 |
Methods and apparatus for adjusting beam parallelism in ion implanters |
Jan. 22, 2008 |
| RE40008 |
Method and apparatus for controlling ion implantation during vacuum fluctuation |
Jan. 22, 2008 |
| 7317188 |
TEM sample preparation from a circuit layer structure |
Jan. 8, 2008 |
| 7315035 |
Apparatus and method for doping |
Jan. 1, 2008 |
| 7315034 |
Irradiation system with ion beam/charged particle beam |
Jan. 1, 2008 |
| 7312464 |
Ion implantation apparatus |
Dec. 25, 2007 |
| 7304319 |
Wafer charge compensation device and ion implantation system having the same |
Dec. 4, 2007 |
| 7301146 |
Probe driving method, and probe apparatus |
Nov. 27, 2007 |
| 7301156 |
Controlling the characteristics of implanter ion-beams |
Nov. 27, 2007 |
| 7301160 |
Ion sources |
Nov. 27, 2007 |
| 7297947 |
Apparatus and method for evaluating cross section of specimen |
Nov. 20, 2007 |
| 7297965 |
Method and apparatus for sample formation and microanalysis in a vacuum chamber |
Nov. 20, 2007 |
| 7294844 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Nov. 13, 2007 |
| 7282721 |
Method and apparatus for tuning ion implanters |
Oct. 16, 2007 |
| 7282725 |
Method of manufacturing semiconductor device, semiconductor manufacturing apparatus, and stencil mask |
Oct. 16, 2007 |
| 7282702 |
Ion neutralizer |
Oct. 16, 2007 |
| 7279691 |
Ion implantation apparatus and method for implanting ions by using the same |
Oct. 9, 2007 |
| 7279687 |
Technique for implementing a variable aperture lens in an ion implanter |
Oct. 9, 2007 |
| 7276713 |
Method for fabricating a metal-insulator-metal capacitor |
Oct. 2, 2007 |
| 7276712 |
Method and apparatus for scanning a workpiece in a vacuum chamber of an ion beam implanter |
Oct. 2, 2007 |
| 7276711 |
Beam space-charge compensation device and ion implantation system having the same |
Oct. 2, 2007 |
| 7276691 |
Ion beam device and ion beam processing method |
Oct. 2, 2007 |
| 7271399 |
Manipulator assembly in ion implanter |
Sep. 18, 2007 |
| 7271400 |
Methods, apparatus, and systems involving ion beam generation |
Sep. 18, 2007 |
| 7268358 |
Method of modulating laser-accelerated protons for radiation therapy |
Sep. 11, 2007 |
| 7268356 |
Method and apparatus for specimen fabrication |
Sep. 11, 2007 |
| 7267520 |
Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights |
Sep. 11, 2007 |
| 7265366 |
Lithographic apparatus and device manufacturing method |
Sep. 4, 2007 |
| 7259380 |
Scanning mechanism of an ion implanter |
Aug. 21, 2007 |
| 7256848 |
Method and apparatus of alligning liquid crystal |
Aug. 14, 2007 |
| 7253424 |
Method of implanting a substrate and an ion implanter for performing the method |
Aug. 7, 2007 |
| 7253423 |
Technique for uniformity tuning in an ion implanter system |
Aug. 7, 2007 |
| 7250617 |
Ion beam neutral detection |
Jul. 31, 2007 |
| 7247867 |
Ion implanter and method of manufacturing semiconductor device |
Jul. 24, 2007 |
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