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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7402820 |
Ion beam contamination determination |
Jul. 22, 2008 |
| 7402816 |
Electron injection in ion implanter magnets |
Jul. 22, 2008 |
| 7402821 |
Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage |
Jul. 22, 2008 |
| 7399980 |
Systems and methods for beam angle adjustment in ion implanters |
Jul. 15, 2008 |
| 7397048 |
Technique for boron implantation |
Jul. 8, 2008 |
| 7397047 |
Technique for tuning an ion implanter system |
Jul. 8, 2008 |
| 7397046 |
Method for implanter angle verification and calibration |
Jul. 8, 2008 |
| 7397050 |
Method and apparatus for specimen fabrication |
Jul. 8, 2008 |
| 7397051 |
Method and apparatus for specimen fabrication |
Jul. 8, 2008 |
| 7397052 |
Method and apparatus for specimen fabrication |
Jul. 8, 2008 |
| 7397054 |
Particle beam therapy system and control system for particle beam therapy |
Jul. 8, 2008 |
| 7397049 |
Determining ion beam parallelism using refraction method |
Jul. 8, 2008 |
| 7394079 |
Architecture for ribbon ion beam ion implanter system |
Jul. 1, 2008 |
| 7394078 |
Technique for ion beam angle spread control for advanced applications |
Jul. 1, 2008 |
| 7394073 |
Methods and apparatus for ion beam angle measurement in two dimensions |
Jul. 1, 2008 |
| 7391038 |
Technique for isocentric ion beam scanning |
Jun. 24, 2008 |
| 7391039 |
Semiconductor processing method and system |
Jun. 24, 2008 |
| 7388218 |
Subsurface imaging using an electron beam |
Jun. 17, 2008 |
| 7385209 |
Micromachining process, system and product |
Jun. 10, 2008 |
| 7385208 |
Systems and methods for implant dosage control |
Jun. 10, 2008 |
| 7385207 |
Movable inclination-angle measuring apparatus for ion beam, and method of use |
Jun. 10, 2008 |
| 7385183 |
Substrate processing apparatus using neutralized beam and method thereof |
Jun. 10, 2008 |
| 7385206 |
Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method |
Jun. 10, 2008 |
| 7381977 |
Ion beam profiler |
Jun. 3, 2008 |
| 7378670 |
Shielding assembly for a semiconductor manufacturing apparatus and method of using the same |
May. 27, 2008 |
| 7377228 |
System for and method of gas cluster ion beam processing |
May. 27, 2008 |
| 7375354 |
Ion implanting method and apparatus |
May. 20, 2008 |
| 7375355 |
Ribbon beam ion implanter cluster tool |
May. 20, 2008 |
| 7372053 |
Rotating gantry of particle beam therapy system |
May. 13, 2008 |
| 7372050 |
Method of preventing charging, and apparatus for charged particle beam using the same |
May. 13, 2008 |
| 7368729 |
Method, apparatus and system for specimen fabrication by using an ion beam |
May. 6, 2008 |
| 7368734 |
Ion beam measuring method and ion implanting apparatus |
May. 6, 2008 |
| 7365341 |
Gas cluster ion beam emitting apparatus and method for ionization of gas cluster |
Apr. 29, 2008 |
| 7365346 |
Ion-implanting apparatus, ion-implanting method, and device manufactured thereby |
Apr. 29, 2008 |
| 7365347 |
Ion implantation apparatus for use in manufacturing of semiconductor device |
Apr. 29, 2008 |
| 7365348 |
Adjusting device of an apparatus for generating a beam of charged particles |
Apr. 29, 2008 |
| 7361915 |
Beam current stabilization utilizing gas feed control loop |
Apr. 22, 2008 |
| 7361914 |
Means to establish orientation of ion beam to wafer and correct angle errors |
Apr. 22, 2008 |
| 7361913 |
Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control |
Apr. 22, 2008 |
| 7361912 |
Doping method, doping apparatus, and control system for doping apparatus |
Apr. 22, 2008 |
| 7358491 |
Method and apparatus for the depth-resolved characterization of a layer of a carrier |
Apr. 15, 2008 |
| 7358508 |
Ion implanter with contaminant collecting surface |
Apr. 15, 2008 |
| 7358509 |
Ion implanter, and angle measurement apparatus and beam divergence measurement apparatus for ion implanter |
Apr. 15, 2008 |
| 7358510 |
Ion implanter with variable scan frequency |
Apr. 15, 2008 |
| 7358511 |
Plasma doping method and plasma doping apparatus |
Apr. 15, 2008 |
| 7355192 |
Adjustable suspension assembly for a collimating lattice |
Apr. 8, 2008 |
| 7355188 |
Technique for uniformity tuning in an ion implanter system |
Apr. 8, 2008 |
| 7355176 |
Method of forming TEM specimen and related protection layer |
Apr. 8, 2008 |
| 7354500 |
Mask and apparatus using it to prepare sample by ion milling |
Apr. 8, 2008 |
| 7351983 |
Focused ion beam system |
Apr. 1, 2008 |
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