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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5434423 |
System and method for optimizing placement of dopant upon semiconductor surface |
Jul. 18, 1995 |
| 5432352 |
Ion beam scan control |
Jul. 11, 1995 |
| 5422490 |
Focused ion beam implantation apparatus |
Jun. 6, 1995 |
| 5420415 |
Structure for alignment of an ion source aperture with a predetermined ion beam path |
May. 30, 1995 |
| 5420435 |
Ion implantation machine with photonic pressure particle filter |
May. 30, 1995 |
| 5418378 |
Ion implant device with modulated scan output |
May. 23, 1995 |
| 5406072 |
Method for microbeam ion radiation testing of photonic devices |
Apr. 11, 1995 |
| 5406088 |
Scan and tilt apparatus for an ion implanter |
Apr. 11, 1995 |
| 5399871 |
Plasma flood system for the reduction of charging of wafers during ion implantation |
Mar. 21, 1995 |
| 5396076 |
Ion implantation system with protective plates of silicon in mass analyzing region |
Mar. 7, 1995 |
| 5393984 |
Magnetic deflection system for ion beam implanters |
Feb. 28, 1995 |
| 5393985 |
Apparatus for focusing an ion beam |
Feb. 28, 1995 |
| 5393986 |
Ion implantation apparatus |
Feb. 28, 1995 |
| 5389793 |
Apparatus and methods for ion implantation |
Feb. 14, 1995 |
| 5384465 |
Spectrum analyzer in an ion implanter |
Jan. 24, 1995 |
| 5382803 |
Ion injection device |
Jan. 17, 1995 |
| 5378899 |
Ion implantation target charge control system |
Jan. 3, 1995 |
| 5378917 |
Particle-beam imaging system |
Jan. 3, 1995 |
| 5376791 |
Secondary ion mass spectometry system |
Dec. 27, 1994 |
| 5373164 |
Ion beam conical scanning system |
Dec. 13, 1994 |
| 5357116 |
Focused ion beam processing with charge control |
Oct. 18, 1994 |
| 5357115 |
Processing method for wafers |
Oct. 18, 1994 |
| 5354986 |
Ion implantation apparatus |
Oct. 11, 1994 |
| 5352899 |
Method and apparatus for fabricating a device/circuit pattern by a converging atomic beam |
Oct. 4, 1994 |
| 5350920 |
Ion beam analyzing apparatus |
Sep. 27, 1994 |
| 5350926 |
Compact high current broad beam ion implanter |
Sep. 27, 1994 |
| 5349196 |
Ion implanting apparatus |
Sep. 20, 1994 |
| 5343047 |
Ion implantation system |
Aug. 30, 1994 |
| 5338940 |
Apparatus for ion implantation including contactless cooling and beam current measurement means |
Aug. 16, 1994 |
| 5333495 |
Method and apparatus for processing a minute portion of a specimen |
Aug. 2, 1994 |
| 5331172 |
Ionized metal cluster beam systems and methods |
Jul. 19, 1994 |
| 5326980 |
Ion implanter with plural surface potential sensors |
Jul. 5, 1994 |
| 5326981 |
Electron beam excited ion irradiation apparatus |
Jul. 5, 1994 |
| 5319212 |
Method of monitoring ion beam current in ion implantation apparatus for use in manufacturing semiconductors |
Jun. 7, 1994 |
| 5315121 |
Metal ion source and a method of producing metal ions |
May. 24, 1994 |
| 5315118 |
Dual ion injector for tandem accelerators |
May. 24, 1994 |
| 5313067 |
Ion processing apparatus including plasma ion source and mass spectrometer for ion deposition, ion implantation, or isotope separation |
May. 17, 1994 |
| 5311028 |
System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions |
May. 10, 1994 |
| 5308989 |
Fluid flow control method and apparatus for an ion implanter |
May. 3, 1994 |
| 5306921 |
Ion implantation system using optimum magnetic field for concentrating ions |
Apr. 26, 1994 |
| 5306920 |
Ion implanter with beam resolving apparatus and method for implanting ions |
Apr. 26, 1994 |
| 5306922 |
Production of high beam currents at low energies for use in ion implantation systems |
Apr. 26, 1994 |
| 5300891 |
Ion accelerator |
Apr. 5, 1994 |
| 5293508 |
Ion implanter and controlling method therefor |
Mar. 8, 1994 |
| 5289010 |
Ion purification for plasma ion implantation |
Feb. 22, 1994 |
| 5286978 |
Method of removing electric charge accumulated on a semiconductor substrate in ion implantation |
Feb. 15, 1994 |
| 5278420 |
Scanning control system involved in an ion-implantation apparatus |
Jan. 11, 1994 |
| 5270552 |
Method for separating specimen and method for analyzing the specimen separated by the specimen separating method |
Dec. 14, 1993 |
| 5256854 |
Tunable plasma method and apparatus using radio frequency heating and electron beam irradiation |
Oct. 26, 1993 |
| 5248886 |
Processing system |
Sep. 28, 1993 |
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