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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5834787 |
Device for measuring flux and accumulated dose for an ion beam containing a radioactive element |
Nov. 10, 1998 |
| 5834786 |
High current ribbon beam ion implanter |
Nov. 10, 1998 |
| 5827786 |
Charged particle deposition of electrically insulating films |
Oct. 27, 1998 |
| 5825038 |
Large area uniform ion beam formation |
Oct. 20, 1998 |
| 5825035 |
Processing method and apparatus using focused ion beam generating means |
Oct. 20, 1998 |
| 5821549 |
Through-the-substrate investigation of flip-chip IC's |
Oct. 13, 1998 |
| 5821548 |
Beam source for production of radicals and metastables |
Oct. 13, 1998 |
| 5814819 |
System and method for neutralizing an ion beam using water vapor |
Sep. 29, 1998 |
| 5814822 |
Ion implanter and ion implanting method using the same |
Sep. 29, 1998 |
| 5814823 |
System and method for setecing neutral particles in an ion bean |
Sep. 29, 1998 |
| 5811820 |
Parallel ion optics and apparatus for high current low energy ion beams |
Sep. 22, 1998 |
| 5811823 |
Control mechanisms for dosimetry control in ion implantation systems |
Sep. 22, 1998 |
| 5801388 |
Particle beam, in particular ionic optic imaging system |
Sep. 1, 1998 |
| 5801386 |
Apparatus for measuring plasma characteristics within a semiconductor wafer processing system and a method of fabricating and using same |
Sep. 1, 1998 |
| 5801488 |
Variable energy radio-frequency type charged particle accelerator |
Sep. 1, 1998 |
| 5798529 |
Focused ion beam metrology |
Aug. 25, 1998 |
| 5793050 |
Ion implantation system for implanting workpieces |
Aug. 11, 1998 |
| 5783830 |
Sample evaluation/process observation system and method |
Jul. 21, 1998 |
| 5780863 |
Accelerator-decelerator electrostatic lens for variably focusing and mass resolving an ion beam in an ion implanter |
Jul. 14, 1998 |
| 5770861 |
Apparatus for working a specimen |
Jun. 23, 1998 |
| 5767522 |
Ion-implantation system using split ion beams |
Jun. 16, 1998 |
| 5763895 |
Source inner shield for eaton NV-10 high current implanter |
Jun. 9, 1998 |
| 5763890 |
Cathode mounting for ion source with indirectly heated cathode |
Jun. 9, 1998 |
| 5760409 |
Dose control for use in an ion implanter |
Jun. 2, 1998 |
| 5757018 |
Zero deflection magnetically-suppressed Faraday for ion implanters |
May. 26, 1998 |
| 5757016 |
Ablative flashlamp imaging |
May. 26, 1998 |
| 5753923 |
Ion injection device and method therefor |
May. 19, 1998 |
| 5754008 |
Device for creating a beam of adjustable-energy ions particularly for sequential vacuum treatment of surfaces with large dimensions |
May. 19, 1998 |
| 5751002 |
Ion implantation apparatus |
May. 12, 1998 |
| 5751003 |
Loadlock assembly for an ion implantation system |
May. 12, 1998 |
| 5748360 |
Decelerating and focusing ion beam device |
May. 5, 1998 |
| 5747818 |
Thermoelectric cooling in gas-assisted FIB system |
May. 5, 1998 |
| 5747936 |
Ion implantation apparatus with improved post mass selection deceleration |
May. 5, 1998 |
| 5744812 |
Faraday cup assembly for a semiconductor ion-implanting apparatus |
Apr. 28, 1998 |
| 5736743 |
Method and apparatus for ion beam formation in an ion implanter |
Apr. 7, 1998 |
| 5731593 |
Ion implantation method and ion implantation system used therefor |
Mar. 24, 1998 |
| 5731592 |
Exhaust system for an ion implanter |
Mar. 24, 1998 |
| 5729027 |
Ion implanter |
Mar. 17, 1998 |
| 5729028 |
Ion accelerator for use in ion implanter |
Mar. 17, 1998 |
| 5719403 |
MeV scanning ions implanter |
Feb. 17, 1998 |
| 5703375 |
Method and apparatus for ion beam neutralization |
Dec. 30, 1997 |
| 5700626 |
Method for forming multi-layer resist pattern |
Dec. 23, 1997 |
| 5696382 |
Ion-implanter having variable ion beam angle control |
Dec. 9, 1997 |
| 5693950 |
Projection system for charged particles |
Dec. 2, 1997 |
| 5693939 |
MeV neutral beam ion implanter |
Dec. 2, 1997 |
| 5691537 |
Method and apparatus for ion beam transport |
Nov. 25, 1997 |
| 5672882 |
Ion implantation device with a closed-loop process chamber pressure control system |
Sep. 30, 1997 |
| 5672879 |
System and method for producing superimposed static and time-varying magnetic fields |
Sep. 30, 1997 |
| 5670785 |
Charge converter provided in an ion implantation apparatus |
Sep. 23, 1997 |
| 5668368 |
Apparatus for suppressing electrification of sample in charged beam irradiation apparatus |
Sep. 16, 1997 |
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