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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6213050 |
Enhanced plasma mode and computer system for plasma immersion ion implantation |
Apr. 10, 2001 |
| 6207959 |
Ion implanter |
Mar. 27, 2001 |
| 6207963 |
Ion beam implantation using conical magnetic scanning |
Mar. 27, 2001 |
| 6207964 |
Continuously variable aperture for high-energy ion implanter |
Mar. 27, 2001 |
| 6208095 |
Compact helical resonator coil for ion implanter linear accelerator |
Mar. 27, 2001 |
| 6204510 |
Device and method for ion acceleration |
Mar. 20, 2001 |
| 6204508 |
Toroidal filament for plasma generation |
Mar. 20, 2001 |
| 6194734 |
Method and system for operating a variable aperture in an ion implanter |
Feb. 27, 2001 |
| 6191427 |
Ion implantation system and method suitable for low energy ion beam implantation |
Feb. 20, 2001 |
| 6184625 |
Ion beam processing apparatus for processing work piece with ion beam being neutralized uniformly |
Feb. 6, 2001 |
| 6184536 |
Ion implantation process |
Feb. 6, 2001 |
| 6184532 |
Ion source |
Feb. 6, 2001 |
| 6180954 |
Dual-walled exhaust tubing for vacuum pump |
Jan. 30, 2001 |
| 6177679 |
Ion implanter with impurity interceptor which removes undesired impurities from the ion beam |
Jan. 23, 2001 |
| 6177670 |
Method of observing secondary ion image by focused ion beam |
Jan. 23, 2001 |
| 6172372 |
Scanning system with linear gas bearings and active counter-balance options |
Jan. 9, 2001 |
| 6169015 |
Method and apparatus for controlling the dosage of ions implanted into a semiconductor wafer |
Jan. 2, 2001 |
| 6169288 |
Laser ablation type ion source |
Jan. 2, 2001 |
| 6160262 |
Method and apparatus for deflecting charged particles |
Dec. 12, 2000 |
| 6155436 |
Arc inhibiting wafer holder assembly |
Dec. 5, 2000 |
| 6157199 |
Method of monitoring ion-implantation process using photothermal response from ion-implanted sample, and monitoring apparatus of ion-implantation process |
Dec. 5, 2000 |
| 6140655 |
Method for water vapor enhanced charged-particle-beam machining |
Oct. 31, 2000 |
| 6140656 |
Ion implantation apparatus, ion implantation method and semiconductor device |
Oct. 31, 2000 |
| 6137112 |
Time of flight energy measurement apparatus for an ion beam implanter |
Oct. 24, 2000 |
| 6130507 |
Cold-cathode ion source with propagation of ions in the electron drift plane |
Oct. 10, 2000 |
| 6130436 |
Acceleration and analysis architecture for ion implanter |
Oct. 10, 2000 |
| 6121624 |
Method for controlled implantation of elements into the surface or near surface of a substrate |
Sep. 19, 2000 |
| 6118122 |
Ion beam working apparatus |
Sep. 12, 2000 |
| 6114705 |
System for correcting eccentricity and rotational error of a workpiece |
Sep. 5, 2000 |
| 6111260 |
Method and apparatus for in situ anneal during ion implant |
Aug. 29, 2000 |
| 6107634 |
Decaborane vaporizer |
Aug. 22, 2000 |
| 6106629 |
Impurity doping apparatus |
Aug. 22, 2000 |
| 6104025 |
Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer |
Aug. 15, 2000 |
| 6100536 |
Electron flood apparatus for neutralizing charge build-up on a substrate during ion implantation |
Aug. 8, 2000 |
| 6093625 |
Apparatus for and methods of implanting desired chemical species in semiconductor substrates |
Jul. 25, 2000 |
| 6086726 |
Method of modifying a surface |
Jul. 11, 2000 |
| RE36760 |
Method and apparatus for altering material using ion beams |
Jul. 4, 2000 |
| 6084241 |
Method of manufacturing semiconductor devices and apparatus therefor |
Jul. 4, 2000 |
| 6080991 |
Method for milling a transmission electron microscope test slice |
Jun. 27, 2000 |
| 6075249 |
Methods and apparatus for scanning and focusing an ion beam |
Jun. 13, 2000 |
| 6060715 |
Method and apparatus for ion beam scanning in an ion implanter |
May. 9, 2000 |
| 6043499 |
Charge-up prevention method and ion implanting apparatus |
Mar. 28, 2000 |
| 6040582 |
Ion beam focuser for an ion implanter analyzer |
Mar. 21, 2000 |
| 6037599 |
Ion implantation apparatus and fabrication method for semiconductor device |
Mar. 14, 2000 |
| 6037600 |
Safety gas controlling system |
Mar. 14, 2000 |
| 6031229 |
Automatic sequencing of FIB operations |
Feb. 29, 2000 |
| 6031239 |
Filtered cathodic arc source |
Feb. 29, 2000 |
| 6031240 |
Method and apparatus for ion implantation |
Feb. 29, 2000 |
| 6025602 |
Ion implantation system for implanting workpieces |
Feb. 15, 2000 |
| 6019850 |
Apparatus for making a semiconductor device in a continuous manner |
Feb. 1, 2000 |
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