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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6332962 |
Thin-film magnetic recording head manufacture using selective imaging |
Dec. 25, 2001 |
| 6331713 |
Movable ion source assembly |
Dec. 18, 2001 |
| 6331712 |
Section formation observing method |
Dec. 18, 2001 |
| 6329650 |
Space charge neutralization of an ion beam |
Dec. 11, 2001 |
| 6329664 |
Ion implantation apparatus for wafers |
Dec. 11, 2001 |
| 6326631 |
Ion implantation device arranged to select neutral ions from the ion beam |
Dec. 4, 2001 |
| 6326630 |
Ion implanter |
Dec. 4, 2001 |
| 6326632 |
Particle-optical imaging system for lithography purposes |
Dec. 4, 2001 |
| 6323496 |
Apparatus for reducing distortion in fluid bearing surfaces |
Nov. 27, 2001 |
| 6323497 |
Method and apparatus for controlling ion implantation during vacuum fluctuation |
Nov. 27, 2001 |
| 6322670 |
Flexible high performance microbolometer detector material fabricated via controlled ion beam sputter deposition process |
Nov. 27, 2001 |
| 6320334 |
Controller for a linear accelerator |
Nov. 20, 2001 |
| 6319734 |
Method for establishing differential injection conditions in mosfet source/drain regions based on determining the permitted amount of energy contamination with respect to desired junction dept |
Nov. 20, 2001 |
| 6313474 |
Method for measuring distribution of beams of charged particles and methods relating thereto |
Nov. 6, 2001 |
| 6313475 |
Acceleration and analysis architecture for ion implanter |
Nov. 6, 2001 |
| 6303932 |
Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam |
Oct. 16, 2001 |
| 6300643 |
Dose monitor for plasma doping system |
Oct. 9, 2001 |
| 6300642 |
Method for monitoring Faraday cup operation in an ion implantation apparatus |
Oct. 9, 2001 |
| 6300628 |
Focused ion beam machining method and device thereof |
Oct. 9, 2001 |
| 6300641 |
Process for modifying surfaces of materials, and materials having surfaces modified thereby |
Oct. 9, 2001 |
| 6297510 |
Ion implant dose control |
Oct. 2, 2001 |
| 6297503 |
Method of detecting semiconductor defects |
Oct. 2, 2001 |
| 6295123 |
Multiple photon absorption for high resolution lithography |
Sep. 25, 2001 |
| 6291827 |
Insulating apparatus for a conductive line |
Sep. 18, 2001 |
| 6291828 |
Glass-like insulator for electrically isolating electrodes from ion implanter housing |
Sep. 18, 2001 |
| 6288405 |
Method for determining ultra shallow junction dosimetry |
Sep. 11, 2001 |
| 6288394 |
Highly charged ion based time of flight emission microscope |
Sep. 11, 2001 |
| 6288357 |
Ion milling planarization of semiconductor workpieces |
Sep. 11, 2001 |
| 6288402 |
High sensitivity charge amplifier for ion beam uniformity monitor |
Sep. 11, 2001 |
| 6288403 |
Decaborane ionizer |
Sep. 11, 2001 |
| 6281512 |
Ion implantation system having direct and alternating current sources |
Aug. 28, 2001 |
| 6281510 |
Sample transferring method and sample transfer supporting apparatus |
Aug. 28, 2001 |
| 6278124 |
Electron beam blanking method and system for electron beam lithographic processing |
Aug. 21, 2001 |
| 6274875 |
Fluid bearing vacuum seal assembly |
Aug. 14, 2001 |
| 6271530 |
Apparatus for reducing distortion in fluid bearing surfaces |
Aug. 7, 2001 |
| 6271529 |
Ion implantation with charge neutralization |
Aug. 7, 2001 |
| 6268609 |
Apparatus and method for reducing heating of a workpiece in ion implantation |
Jul. 31, 2001 |
| 6262638 |
Tunable and matchable resonator coil assembly for ion implanter linear accelerator |
Jul. 17, 2001 |
| 6262420 |
Detection of alpha radiation in a beta radiation field |
Jul. 17, 2001 |
| 6259210 |
Power control apparatus for an ION source having an indirectly heated cathode |
Jul. 10, 2001 |
| 6259105 |
System and method for cleaning silicon-coated surfaces in an ion implanter |
Jul. 10, 2001 |
| 6255662 |
Rutherford backscattering detection for use in Ion implantation |
Jul. 3, 2001 |
| 6242750 |
Ion implantation device |
Jun. 5, 2001 |
| 6239440 |
Arc chamber for an ion implantation system |
May. 29, 2001 |
| 6239441 |
Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device |
May. 29, 2001 |
| 6236054 |
Ion source for generating ions of a gas or vapor |
May. 22, 2001 |
| 6236163 |
Multiple-beam ion-beam assembly |
May. 22, 2001 |
| 6229148 |
Ion implantation with programmable energy, angle, and beam current |
May. 8, 2001 |
| 6222196 |
Rotatable workpiece support including cyclindrical workpiece support surfaces for an ion beam implanter |
Apr. 24, 2001 |
| 6215125 |
Method to operate GEF4 gas in hot cathode discharge ion sources |
Apr. 10, 2001 |
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