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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6455233 |
Micromachining using high energy light ions |
Sep. 24, 2002 |
| 6455423 |
Direct writing of low carbon conductive material |
Sep. 24, 2002 |
| 6452198 |
Minimized contamination of semiconductor wafers within an implantation system |
Sep. 17, 2002 |
| 6452196 |
Power supply hardening for ion beam systems |
Sep. 17, 2002 |
| 6452197 |
Ion implantation apparatus and method of implanting ions to prevent charge build up on a substrate |
Sep. 17, 2002 |
| 6452195 |
Wafer holding pin |
Sep. 17, 2002 |
| 6448567 |
Method and apparatus for shielding a valve gate and other valve parts |
Sep. 10, 2002 |
| 6441382 |
Deceleration electrode configuration for ultra-low energy ion implanter |
Aug. 27, 2002 |
| 6437351 |
Method and apparatus for controlling a workpiece in a vacuum chamber |
Aug. 20, 2002 |
| 6437350 |
Methods and apparatus for adjusting beam parallelism in ion implanters |
Aug. 20, 2002 |
| 6437342 |
Charge amplifier with bias compensation |
Aug. 20, 2002 |
| 6433342 |
Coated wafer holding pin |
Aug. 13, 2002 |
| 6429595 |
Multi-mode treater with internal air cooling system |
Aug. 6, 2002 |
| 6429442 |
Ion implanter |
Aug. 6, 2002 |
| 6423975 |
Wafer holder for simox processing |
Jul. 23, 2002 |
| 6423976 |
Ion implanter and a method of implanting ions |
Jul. 23, 2002 |
| 6417512 |
Sample distortion removing method in thin piece forming |
Jul. 9, 2002 |
| 6417515 |
In-situ ion implant activation and measurement apparatus |
Jul. 9, 2002 |
| 6414329 |
Method and system for microwave excitation of plasma in an ion beam guide |
Jul. 2, 2002 |
| 6414328 |
Method and apparatus for the conveying and positioning of ion implantation targets |
Jul. 2, 2002 |
| 6414327 |
Method and apparatus for ion beam generation |
Jul. 2, 2002 |
| 6414307 |
Method and apparatus for enhancing yield of secondary ions |
Jul. 2, 2002 |
| 6410912 |
Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation |
Jun. 25, 2002 |
| 6407397 |
Charged particle beam exposure apparatus |
Jun. 18, 2002 |
| 6403969 |
Ion implantation system and ion implantation method |
Jun. 11, 2002 |
| 6403972 |
Methods and apparatus for alignment of ion beam systems using beam current sensors |
Jun. 11, 2002 |
| 6395347 |
Micromachining method for workpiece observation |
May. 28, 2002 |
| 6396215 |
Ion-implantation apparatus and method of ion-implantation by use of this apparatus |
May. 28, 2002 |
| 6392244 |
Ion beam deposition of diamond-like carbon overcoats by hydrocarbon source gas pulsing |
May. 21, 2002 |
| 6392245 |
Scanning wheel for ion implantation process chamber |
May. 21, 2002 |
| 6388263 |
Vacuum system with mist prevention apparatus for manufacturing semiconductor devices and method using the same |
May. 14, 2002 |
| 6376842 |
Optical system for charged-particle-beam microlithography apparatus exhibiting reduced third- and fifth-order aberrations |
Apr. 23, 2002 |
| 6372529 |
Forming elongated probe points useful in testing semiconductor devices |
Apr. 16, 2002 |
| 6373070 |
Method apparatus for a coaxial optical microscope with focused ion beam |
Apr. 16, 2002 |
| 6365905 |
Focused ion beam processing apparatus |
Apr. 2, 2002 |
| 6362490 |
Ion implanter |
Mar. 26, 2002 |
| 6362474 |
Semiconductor sample for transmission electron microscope and method of manufacturing the same |
Mar. 26, 2002 |
| 6362475 |
Scanning electron microscope/energy dispersive spectroscopy sample preparation method and sample produced thereby |
Mar. 26, 2002 |
| 6359286 |
Method and apparatus for neutralizing space charge in an ion beam |
Mar. 19, 2002 |
| 6354438 |
Focused ion beam apparatus for forming thin-film magnetic recording heads |
Mar. 12, 2002 |
| 6355933 |
Ion source and method for using same |
Mar. 12, 2002 |
| 6350991 |
Ion implanter with vacuum piston counterbalance |
Feb. 26, 2002 |
| 6348689 |
Focused ion beam apparatus |
Feb. 19, 2002 |
| 6346352 |
Quartz defect removal utilizing gallium staining and femtosecond ablation |
Feb. 12, 2002 |
| RE37537 |
Method and apparatus for altering material |
Feb. 5, 2002 |
| 6337540 |
High brightness point ion sources using liquid ionic compounds |
Jan. 8, 2002 |
| 6335535 |
Method for implanting negative hydrogen ion and implanting apparatus |
Jan. 1, 2002 |
| 6335129 |
Method for repairing pattern defect, photo mask using the method, and semiconductor device manufacturing method employing the photo mask |
Jan. 1, 2002 |
| 6335534 |
Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes |
Jan. 1, 2002 |
| 6335536 |
Method and apparatus for low voltage plasma doping using dual pulses |
Jan. 1, 2002 |
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