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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619229 |
Technique for matching performance of ion implantation devices using an in-situ mask |
Nov. 17, 2009 |
| 7619228 |
Technique for improved ion beam transport |
Nov. 17, 2009 |
| 7619224 |
Generation, acceleration, focusing and collection of a high-brightness, space-charge-dominated circular charged-particle beam |
Nov. 17, 2009 |
| 7619223 |
Beam current measuring instrument and beam current measuring method using same |
Nov. 17, 2009 |
| 7615764 |
Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus |
Nov. 10, 2009 |
| 7615763 |
System for magnetic scanning and correction of an ion beam |
Nov. 10, 2009 |
| 7612351 |
Ion implanter with function of compensating wafer cut angle and ion implantation method using the same |
Nov. 3, 2009 |
| 7612337 |
Focused ion beam system and a method of sample preparation and observation |
Nov. 3, 2009 |
| 7611975 |
Method of implanting a substrate and an ion implanter for performing the method |
Nov. 3, 2009 |
| 7608843 |
Method and apparatus for scanning a workpiece through an ion beam |
Oct. 27, 2009 |
| 7605382 |
Ion implanter |
Oct. 20, 2009 |
| 7601976 |
Dual beam system |
Oct. 13, 2009 |
| 7598505 |
Multichannel ion gun |
Oct. 6, 2009 |
| 7598499 |
Charged-particle exposure apparatus |
Oct. 6, 2009 |
| 7598495 |
Methods and systems for trapping ion beam particles and focusing an ion beam |
Oct. 6, 2009 |
| 7592606 |
Manufacturing equipment using ION beam or electron beam |
Sep. 22, 2009 |
| 7592604 |
Charged particle beam apparatus |
Sep. 22, 2009 |
| 7590966 |
Data path for high performance pattern generator |
Sep. 15, 2009 |
| 7589334 |
Ion beam delivery equipment and an ion beam delivery method |
Sep. 15, 2009 |
| 7589333 |
Methods for rapidly switching off an ion beam |
Sep. 15, 2009 |
| 7589328 |
Gas field ION source for multiple applications |
Sep. 15, 2009 |
| 7586111 |
Ion implanter having combined hybrid and double mechanical scan architecture |
Sep. 8, 2009 |
| 7586110 |
Techniques for detecting ion beam contamination in an ion implantation system and interlocking same |
Sep. 8, 2009 |
| 7586109 |
Technique for improving the performance and extending the lifetime of an ion source with gas dilution |
Sep. 8, 2009 |
| 7586101 |
Ion sources for ion implantation apparatus |
Sep. 8, 2009 |
| 7582883 |
Method of scanning a substrate in an ion implanter |
Sep. 1, 2009 |
| 7579605 |
Multi-purpose electrostatic lens for an ion implanter system |
Aug. 25, 2009 |
| 7579604 |
Beam stop and beam tuning methods |
Aug. 25, 2009 |
| 7579602 |
Ion implantation with a collimator magnet and a neutral filter magnet |
Aug. 25, 2009 |
| 7579590 |
Method of measuring thin layers using SIMS |
Aug. 25, 2009 |
| 7576342 |
Ion beam delivery equipment and ion beam delivery method |
Aug. 18, 2009 |
| 7576340 |
Focused ion beam processing method |
Aug. 18, 2009 |
| 7576339 |
Ion implantation apparatus and method for obtaining non-uniform ion implantation energy |
Aug. 18, 2009 |
| 7573051 |
Ion beam guide tube |
Aug. 11, 2009 |
| 7573047 |
Wafer holder and sample producing apparatus using it |
Aug. 11, 2009 |
| 7566887 |
Method of reducing particle contamination for ion implanters |
Jul. 28, 2009 |
| 7566886 |
Throughput enhancement for scanned beam ion implanters |
Jul. 28, 2009 |
| 7566882 |
Reflection lithography using rotating platter |
Jul. 28, 2009 |
| 7564048 |
Automated faraday sensor test system |
Jul. 21, 2009 |
| 7564042 |
Ion beam apparatus having plasma sheath controller |
Jul. 21, 2009 |
| 7560712 |
Ion implanter with etch prevention member(s) |
Jul. 14, 2009 |
| 7560705 |
Workpiece handling scan arm for ion implantation system |
Jul. 14, 2009 |
| 7559557 |
Sealing between vacuum chambers |
Jul. 14, 2009 |
| 7557364 |
Charge neutralizing device |
Jul. 7, 2009 |
| 7557363 |
Closed loop dose control for ion implantation |
Jul. 7, 2009 |
| 7557361 |
Ion sources, systems and methods |
Jul. 7, 2009 |
| 7557360 |
Ion sources, systems and methods |
Jul. 7, 2009 |
| 7557359 |
Ion sources, systems and methods |
Jul. 7, 2009 |
| 7557358 |
Ion sources, systems and methods |
Jul. 7, 2009 |
| 7554108 |
Forming a semiconductor device feature using acquired parameters |
Jun. 30, 2009 |
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