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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.

Patents under this class:

Patent Number Title Of Patent Date Issued
8710464 Specimen preparation device, and control method in specimen preparation device Apr. 29, 2014
8709269 Method and system for imaging a cross section of a specimen Apr. 29, 2014
8692217 Multi-source plasma focused ion beam system Apr. 8, 2014
8692216 Ion implantation apparatus and control method thereof Apr. 8, 2014
8692215 Heated rotary seal and bearing for chilled ion implantation system Apr. 8, 2014
8686379 Method and apparatus for preparing serial planar cross sections Apr. 1, 2014
8680491 Method of controlling ion implantation apparatus Mar. 25, 2014
8680490 Solar cell, solar cell manufacturing device, and method for manufacturing the same Mar. 25, 2014
8674327 Systems and methods for uniformly implanting materials on substrates using directed magnetic fields Mar. 18, 2014
8674324 Charged particle beam apparatus and sample transporting apparatus Mar. 18, 2014
8674321 Microplasma ion source for focused ion beam applications Mar. 18, 2014
8673450 Graphite member for beam-line internal member of ion implantation apparatus Mar. 18, 2014
8669537 Charged particle beam writing apparatus and method Mar. 11, 2014
8664619 Hybrid electrostatic lens for improved beam transmission Mar. 4, 2014
8653807 Apparatus and method for measuring ion beam current Feb. 18, 2014
8653489 Ion beam sample preparation apparatus and methods Feb. 18, 2014
8653486 Method and apparatus for improved uniformity control with dynamic beam shaping Feb. 18, 2014
8648315 Accelerator having a multi-channel micro-collimator Feb. 11, 2014
8648299 Isotope ion microscope methods and systems Feb. 11, 2014
8644571 Intensity-modulated proton therapy Feb. 4, 2014
8642980 Composite charged particle beam apparatus Feb. 4, 2014
8637838 System and method for ion implantation with improved productivity and uniformity Jan. 28, 2014
8629416 Charged particle beam masking for laser ablation micromachining Jan. 14, 2014
8629394 Charged particle beam device and method for correcting position with respect to charged particle beam Jan. 14, 2014
8624185 Sample preparation Jan. 7, 2014
8623137 Method and device for slicing a shaped silicon ingot using layer transfer Jan. 7, 2014
8618518 Apparatus and method for forming a solid immersion lens using a binary bitmap milling pattern Dec. 31, 2013
8618514 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Dec. 31, 2013
8618497 Drawing apparatus, method of manufacturing article, and information processing apparatus Dec. 31, 2013
8610090 Ion beam sample preparation thermal management apparatus and methods Dec. 17, 2013
8604449 Glitch control during implantation Dec. 10, 2013
8598547 Handling beam glitches during ion implantation of workpieces Dec. 3, 2013
8598545 Multiple beam charged particle optical system Dec. 3, 2013
8598485 Stage for working, focused beam working apparatus and focused beam working method Dec. 3, 2013
8598051 Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate Dec. 3, 2013
8592786 Platen clamping surface monitoring Nov. 26, 2013
8592785 Multi-ion beam implantation apparatus and method Nov. 26, 2013
8592784 Method for modifying a material layer using gas cluster ion beam processing Nov. 26, 2013
8592763 Ion beam sample preparation apparatus and methods Nov. 26, 2013
8586460 Controlling laser annealed junction depth by implant modification Nov. 19, 2013
8581218 Treatment planning system, device for calculating a scanning path and particle therapy system Nov. 12, 2013
8581217 Method for monitoring ion implantation Nov. 12, 2013
8581216 Manufacturing method of semiconductor device, method for controlling ion beam, and ion implantation apparatus Nov. 12, 2013
8575574 Ion implanting system Nov. 5, 2013
8563951 Exposure systems for integrated circuit fabrication Oct. 22, 2013
8563944 Ion beam device Oct. 22, 2013
8563943 Particle beam irradiation apparatus, particle beam therapy system, and data display program Oct. 22, 2013
8563407 Dual sided workpiece handling Oct. 22, 2013
8558486 D. c. Charged particle accelerator, a method of accelerating charged particles using d. c. voltages and a high voltage power supply apparatus for use therewith Oct. 15, 2013
8558197 Ion implanting system Oct. 15, 2013

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