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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7429733 |
Method and sample for radiation microscopy including a particle beam channel formed in the sample source |
Sep. 30, 2008 |
| 7429741 |
Faraday system and ion implantation apparatus comprising the faraday system |
Sep. 30, 2008 |
| 7429743 |
Irradiation system ion beam and method to enhance accuracy of irradiation |
Sep. 30, 2008 |
| 7427753 |
Method of cross-section milling with focused ion beam (FIB) device |
Sep. 23, 2008 |
| 7423276 |
Irradiation system with ion beam/charged particle beam |
Sep. 9, 2008 |
| 7423277 |
Ion beam monitoring in an ion implanter using an imaging device |
Sep. 9, 2008 |
| 7423274 |
Electron beam writing system and electron beam writing method |
Sep. 9, 2008 |
| 7423266 |
Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus |
Sep. 9, 2008 |
| 7421973 |
System and method for performing SIMOX implants using an ion shower |
Sep. 9, 2008 |
| 7420189 |
Ultra precise polishing method and ultra precise polishing apparatus |
Sep. 2, 2008 |
| 7420188 |
Exposure method and apparatus for immersion lithography |
Sep. 2, 2008 |
| 7420182 |
Combined radio frequency and hall effect ion source and plasma accelerator system |
Sep. 2, 2008 |
| 7420181 |
Liquid metal ion gun |
Sep. 2, 2008 |
| 7417241 |
Ion implantation method and method for manufacturing semiconductor device |
Aug. 26, 2008 |
| 7417234 |
Spatial-phase locking of energy beams for determining two-dimensional location and beam shape |
Aug. 26, 2008 |
| 7417240 |
Apparatus for producing secondary electrons, a secondary electrode, and an acceleration electrode |
Aug. 26, 2008 |
| 7417242 |
Method of measuring ion beam position |
Aug. 26, 2008 |
| 7414252 |
Method and apparatus for the automated process of in-situ lift-out |
Aug. 19, 2008 |
| 7414250 |
Cryogenic variable temperature vacuum scanning tunneling microscope |
Aug. 19, 2008 |
| 7414249 |
Broad energy-range ribbon ion beam collimation using a variable-gradient dipole |
Aug. 19, 2008 |
| 7413596 |
Method and apparatus for the production of purified liquids and vapors |
Aug. 19, 2008 |
| 7408178 |
Method for the removal of a microscopic sample from a substrate |
Aug. 5, 2008 |
| 7405407 |
Ion beam therapy system and its couch positioning method |
Jul. 29, 2008 |
| 7402816 |
Electron injection in ion implanter magnets |
Jul. 22, 2008 |
| 7402820 |
Ion beam contamination determination |
Jul. 22, 2008 |
| 7402821 |
Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage |
Jul. 22, 2008 |
| 7399980 |
Systems and methods for beam angle adjustment in ion implanters |
Jul. 15, 2008 |
| 7397048 |
Technique for boron implantation |
Jul. 8, 2008 |
| 7397054 |
Particle beam therapy system and control system for particle beam therapy |
Jul. 8, 2008 |
| 7397052 |
Method and apparatus for specimen fabrication |
Jul. 8, 2008 |
| 7397051 |
Method and apparatus for specimen fabrication |
Jul. 8, 2008 |
| 7397046 |
Method for implanter angle verification and calibration |
Jul. 8, 2008 |
| 7397047 |
Technique for tuning an ion implanter system |
Jul. 8, 2008 |
| 7397050 |
Method and apparatus for specimen fabrication |
Jul. 8, 2008 |
| 7397049 |
Determining ion beam parallelism using refraction method |
Jul. 8, 2008 |
| 7394079 |
Architecture for ribbon ion beam ion implanter system |
Jul. 1, 2008 |
| 7394078 |
Technique for ion beam angle spread control for advanced applications |
Jul. 1, 2008 |
| 7394073 |
Methods and apparatus for ion beam angle measurement in two dimensions |
Jul. 1, 2008 |
| 7391039 |
Semiconductor processing method and system |
Jun. 24, 2008 |
| 7391038 |
Technique for isocentric ion beam scanning |
Jun. 24, 2008 |
| 7388218 |
Subsurface imaging using an electron beam |
Jun. 17, 2008 |
| 7385209 |
Micromachining process, system and product |
Jun. 10, 2008 |
| 7385208 |
Systems and methods for implant dosage control |
Jun. 10, 2008 |
| 7385207 |
Movable inclination-angle measuring apparatus for ion beam, and method of use |
Jun. 10, 2008 |
| 7385206 |
Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method |
Jun. 10, 2008 |
| 7385183 |
Substrate processing apparatus using neutralized beam and method thereof |
Jun. 10, 2008 |
| 7381977 |
Ion beam profiler |
Jun. 3, 2008 |
| 7377228 |
System for and method of gas cluster ion beam processing |
May. 27, 2008 |
| 7378670 |
Shielding assembly for a semiconductor manufacturing apparatus and method of using the same |
May. 27, 2008 |
| 7375354 |
Ion implanting method and apparatus |
May. 20, 2008 |
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