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Class Information
Number: 250/492.2
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices
Description: Subject matter wherein the object irradiated is made of, at least in part, a semiconductor material.

Sub-classes under this class:

Class Number Class Name Patents
250/492.21 Ion bombardment 1,492
250/492.22 Pattern control 1,095
250/492.24 Photocathode projection 55
250/492.23 Variable beam 408

Patents under this class:

Patent Number Title Of Patent Date Issued
8049181 Method of suppressing beam position drift, method of suppressing beam dimension drift, and charged particle beam lithography system Nov. 1, 2011
8049180 Achromatic mass separator Nov. 1, 2011
8044374 Ion implantation apparatus Oct. 25, 2011
8044373 Lithographic apparatus and device manufacturing method Oct. 25, 2011
8044372 Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment Oct. 25, 2011
8040146 Inspection apparatus having a heating mechanism for performing sample temperature regulation Oct. 18, 2011
8039822 Particle therapy apparatus and method for modulating a particle beam generated in an accelerator Oct. 18, 2011
8039807 Exposure apparatus, exposure method, and method for producing device Oct. 18, 2011
8030626 Apparatus and method for charged-particle beam writing Oct. 4, 2011
8030625 Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium Oct. 4, 2011
8030624 Photoluminescent coating for vehicles Oct. 4, 2011
8026491 Charged particle beam apparatus and method for charged particle beam adjustment Sep. 27, 2011
8022377 Method and apparatus for excimer curing Sep. 20, 2011
8017922 Ion implantation method and apparatus Sep. 13, 2011
8008636 Ion implantation with diminished scanning field effects Aug. 30, 2011
8008631 Method of acquiring offset deflection amount for shaped beam and lithography apparatus Aug. 30, 2011
8008630 Ion implantation apparatus and method of correcting deviation angle of ion beam Aug. 30, 2011
8003956 Method and apparatus for controlling beam current uniformity in an ion implanter Aug. 23, 2011
8003952 Integrated deflectors for beam alignment and blanking in charged particle columns Aug. 23, 2011
8003940 Tool-to-tool matching control method and its system for scanning electron microscope Aug. 23, 2011
7995829 Method and apparatus for inspecting components Aug. 9, 2011
7994488 Low contamination, low energy beamline architecture for high current ion implantation Aug. 9, 2011
7994487 Control of particles on semiconductor wafers when implanting boron hydrides Aug. 9, 2011
7989784 Ion implantation apparatus and a method Aug. 2, 2011
7989783 Nanolithography system Aug. 2, 2011
7989782 Apparatus and method for specimen fabrication Aug. 2, 2011
7985958 Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program Jul. 26, 2011
7982198 Particle beam irradiation system Jul. 19, 2011
7982197 Ion implantation apparatus and a method for fluid cooling Jul. 19, 2011
7982196 Method for modifying a material layer using gas cluster ion beam processing Jul. 19, 2011
7982192 Beam processing apparatus Jul. 19, 2011
7977655 Method and system of monitoring E-beam overlay and providing advanced process control Jul. 12, 2011
7977651 Illumination system particularly for microlithography Jul. 12, 2011
7972583 Iron silicide sputtering target and method for production thereof Jul. 5, 2011
7964856 Ion implanting apparatus Jun. 21, 2011
7960709 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Jun. 14, 2011
7956337 Scribe process monitoring methodology Jun. 7, 2011
7947968 Processing substrates using direct and recycled radiation May. 24, 2011
7947967 Method for evaluating a semiconductor substrate May. 24, 2011
7947958 Exposure apparatus, exposure method, and method for producing device May. 24, 2011
7943903 Defect inspection method and its system May. 17, 2011
7939813 E-beam exposure apparatus May. 10, 2011
7935946 Ion implantation method and apparatus May. 3, 2011
7935945 Ion implantation method and apparatus May. 3, 2011
7935944 Ion beam irradiating apparatus, and method of producing semiconductor device May. 3, 2011
7935942 Technique for low-temperature ion implantation May. 3, 2011
7935926 Inspection equipment for fine pattern and morphology using microcolumn May. 3, 2011
7932020 Contact or proximity printing using a magnified mask image Apr. 26, 2011
7928382 Detector and inspecting apparatus Apr. 19, 2011
7926000 Integrated circuit system employing dipole multiple exposure Apr. 12, 2011

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