Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Electrical & Energy
Class Information
Number: 250/492.2
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices
Description: Subject matter wherein the object irradiated is made of, at least in part, a semiconductor material.










Sub-classes under this class:

Class Number Class Name Patents
250/492.21 Ion bombardment 1,492
250/492.22 Pattern control 1,095
250/492.24 Photocathode projection 55
250/492.23 Variable beam 408


Patents under this class:

Patent Number Title Of Patent Date Issued
8309884 Laser irradiation apparatus Nov. 13, 2012
8309444 System and method of dosage profile control Nov. 13, 2012
8309421 Dual-bulb lamphead control methodology Nov. 13, 2012
8305557 System for calculating transmission utility factor value of photo energy for exposure and method for calculating transmission utility factor value of photo energy utilizing the calculation sys Nov. 6, 2012
8304752 EUV light producing system and method utilizing an alignment laser Nov. 6, 2012
8304749 Charged-particle exposure apparatus with electrostatic zone plate Nov. 6, 2012
8304724 Microstructured pattern inspection method Nov. 6, 2012
8299446 Sub-field enhanced global alignment Oct. 30, 2012
RE43757 Rotational stage for high speed, large area scanning in focused beam systems Oct. 23, 2012
8294128 Apparatus with plasma radiation source and method of forming a beam of radiation Oct. 23, 2012
8294125 High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture Oct. 23, 2012
8294124 Scanning method and system using 2-D ion implanter Oct. 23, 2012
8294123 Laser processing method and laser processing apparatus Oct. 23, 2012
8294118 Method for adjusting optical axis of charged particle radiation and charged particle radiation device Oct. 23, 2012
8294117 Multiple beam charged particle optical system Oct. 23, 2012
8290743 Charged particle beam writing apparatus and method for diagnosing DAC amplifier unit in charged particle beam writing apparatus Oct. 16, 2012
8289038 Method and device for characterising sensitivity to energy interactions in an electronic component Oct. 16, 2012
8288740 Method for preparing specimens for atom probe analysis and specimen assemblies made thereby Oct. 16, 2012
8288724 Dark field detector for use in an electron microscope Oct. 16, 2012
8283644 Measuring in-situ UV intensity in UV cure tool Oct. 9, 2012
8283643 Systems and methods for drive laser beam delivery in an EUV light source Oct. 9, 2012
8278636 Radiation sources and methods of generating radiation Oct. 2, 2012
8278220 Method to direct pattern metals on a substrate Oct. 2, 2012
8278163 Semiconductor processing apparatus and semiconductor processing method Oct. 2, 2012
8269188 Charged particle beam apparatus and sample processing method Sep. 18, 2012
8268183 Method of processing solid surface with gas cluster ion beam Sep. 18, 2012
8263941 Mass analysis magnet for a ribbon beam Sep. 11, 2012
8258492 Differential evacuation system Sep. 4, 2012
8258491 Pattern writing system and parameters monitoring method for pattern writing apparatus Sep. 4, 2012
8258490 Ultraviolet irradiation device Sep. 4, 2012
8258484 Beamlet blanker arrangement Sep. 4, 2012
8258475 Charged particle radiation device provided with aberration corrector Sep. 4, 2012
8258472 Charged particle radiation device and image capturing condition determining method using charged particle radiation device Sep. 4, 2012
8253119 Well-based dynamic pattern generator Aug. 28, 2012
8253114 Ion source Aug. 28, 2012
8253066 Laser-based method and system for removing one or more target link structures Aug. 28, 2012
8247782 Apparatus and method for investigating and/or modifying a sample Aug. 21, 2012
8242473 Radiation source Aug. 14, 2012
8242472 Extreme ultraviolet light source device and control method for extreme ultraviolet light source device Aug. 14, 2012
8242468 Ion implanter for photovoltaic cell fabrication Aug. 14, 2012
8242467 Lithography system and projection method Aug. 14, 2012
8242460 Ultraviolet treatment apparatus Aug. 14, 2012
8242443 Semiconductor device inspection apparatus Aug. 14, 2012
8237136 Method and system for tilting a substrate during gas cluster ion beam processing Aug. 7, 2012
8237135 Enhanced low energy ion beam transport in ion implantation Aug. 7, 2012
8237133 Energy sources for curing in an imprint lithography system Aug. 7, 2012
8232536 Particle beam irradiation system and method for controlling the particle beam irradiation system Jul. 31, 2012
8232532 Off-axis ion milling device for manufacture of magnetic recording media and method for using the same Jul. 31, 2012
8227774 Method and system for feature function aware priority printing Jul. 24, 2012
8227773 Versatile beam glitch detection system Jul. 24, 2012











 
 
  Recently Added Patents
Apparatus and method for controlling semiconductor die warpage
Malicious attack detection and analysis
Integrated circuit having a discrete capacitor mounted on a semiconductor die
Switchable solvents and methods of use thereof
Methods and apparatus to determine impressions using distributed demographic information
Onium salt-containing polymer
Video surveillance system employing video primitives
  Randomly Featured Patents
Dye set for improved color quality for ink-jet printers
Apparatus for protecting memory storage blocks from I/O accesses
High-speed facsimile machine capable of parallel processing
Method for installation of grounding pole
Brushless D.C. motor with RFID rotor magnet position sensing
Head suspension assembly with a relay printed circuit board having openings through which electrodes protude
Process for the removal of carbon dioxide and mercaptans from a gas stream
Porous rod metering valve
Indium nitride layer production
Cabling apparatus