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Class Information
Number: 250/492.2
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices
Description: Subject matter wherein the object irradiated is made of, at least in part, a semiconductor material.

Sub-classes under this class:

Class Number Class Name Patents
250/492.21 Ion bombardment 1,492
250/492.22 Pattern control 1,095
250/492.24 Photocathode projection 55
250/492.23 Variable beam 408

Patents under this class:

Patent Number Title Of Patent Date Issued
8507881 Nanolithography system Aug. 13, 2013
8507856 Pattern measuring method and pattern measuring device Aug. 13, 2013
8502175 Charged particle beam pattern forming apparatus and charged particle beam pattern forming method Aug. 6, 2013
8502172 Three dimensional fiducial Aug. 6, 2013
8502145 Electron microscope system and method for evaluating film thickness reduction of resist patterns Aug. 6, 2013
8502144 Tool-to-tool matching control method and its system for scanning electron microscope Aug. 6, 2013
8497000 X-ray induced wettability modification Jul. 30, 2013
8492736 Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates Jul. 23, 2013
8492732 Multi charged particle beam writing apparatus and multi charged particle beam writing method Jul. 23, 2013
8487285 Deep-ultraviolet light source capable of stopping leakage of harmful X-rays Jul. 16, 2013
8487280 Modulating implantation for improved workpiece splitting Jul. 16, 2013
8481960 Deceleration lens Jul. 9, 2013
8481959 Apparatus and method for multi-directionally scanning a beam of charged particles Jul. 9, 2013
8476606 Drawing apparatus and method of manufacturing article Jul. 2, 2013
8471225 Charged particle beam writing method and apparatus therefor Jun. 25, 2013
8466439 Electron beam lithography apparatus and electron beam lithography method Jun. 18, 2013
8462826 Laser device Jun. 11, 2013
8461558 System and method for ion implantation with dual purpose mask Jun. 11, 2013
8461556 Using beam blockers to perform a patterned implant of a workpiece Jun. 11, 2013
8461553 Masked ion implant with fast-slow scan Jun. 11, 2013
8461552 Active particle trapping for process control Jun. 11, 2013
8461033 Heat treatment apparatus and method for heating substrate by light-irradiation Jun. 11, 2013
8455840 Gas field ion microscopes having multiple operation modes Jun. 4, 2013
8451457 Chromatic confocal sensor May. 28, 2013
8450704 Phonon-enhanced crystal growth and lattice healing May. 28, 2013
8445871 Pattern measurement apparatus May. 21, 2013
8445869 Projection lens arrangement May. 21, 2013
8436326 Ion beam apparatus and method employing magnetic scanning May. 7, 2013
8436325 Synchrotron and particle therapy system using the same May. 7, 2013
8436324 Preparation unit for lithography machine May. 7, 2013
8431914 Method and system for manufacturing a surface using charged particle beam lithography with variable beam blur Apr. 30, 2013
8431912 Simultaneous measurement of beams in lithography system Apr. 30, 2013
8431907 Particle beam treatment device and irradiation dose setting method of the particle beam treatment device Apr. 30, 2013
8431894 Electron beam device Apr. 30, 2013
8431892 Detector and inspecting apparatus Apr. 30, 2013
8426835 Charged particle radiation device Apr. 23, 2013
8426832 Cell projection charged particle beam lithography Apr. 23, 2013
8426831 Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector Apr. 23, 2013
8426830 Focused ion beam apparatus, sample processing method using the same, and computer program for focused ion beam processing Apr. 23, 2013
8426808 Method of mass spectrometry Apr. 23, 2013
8421039 Method and apparatus for improved uniformity control with dynamic beam shaping Apr. 16, 2013
8421028 Device for deflecting or guiding in a particle beam Apr. 16, 2013
8415644 Processing system Apr. 9, 2013
8414787 Electron beam processing device and method using carbon nanotube emitter Apr. 9, 2013
8410459 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Apr. 2, 2013
8410438 Charged particle beam device Apr. 2, 2013
8405055 Source module, radiation source and lithographic apparatus Mar. 26, 2013
8405053 Method and apparatus for specimen fabrication Mar. 26, 2013
8405051 Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing method Mar. 26, 2013
8399861 Lithography apparatus using extreme UV radiation and having a volatile organic compounds sorbing member comprising a getter material Mar. 19, 2013

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