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Class Information
Number: 250/492.2
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices
Description: Subject matter wherein the object irradiated is made of, at least in part, a semiconductor material.










Sub-classes under this class:

Class Number Class Name Patents
250/492.21 Ion bombardment 1,492
250/492.22 Pattern control 1,095
250/492.24 Photocathode projection 55
250/492.23 Variable beam 408


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Next

Patent Number Title Of Patent Date Issued
RE41681 Enhanced illuminator for use in photolithographic systems Sep. 14, 2010
RE41667 Illumination system particularly for microlithography Sep. 14, 2010
7791048 Ion implanting apparatus and method for implanting ions Sep. 7, 2010
7786454 Optics for generation of high current density patterned charged particle beams Aug. 31, 2010
7786453 Charged-particle beam pattern writing method and apparatus with a pipeline process to transfer data Aug. 31, 2010
7786452 Ion sources, systems and methods Aug. 31, 2010
7777203 Substrate holding apparatus Aug. 17, 2010
7777202 Electron beam exposure apparatus involving the position and velocity calculation Aug. 17, 2010
7777201 Method for maskless particle-beam exposure Aug. 17, 2010
7772570 Assembly for blocking a beam of radiation and method of blocking a beam of radiation Aug. 10, 2010
7772564 Particle-optical apparatus equipped with a gas ion source Aug. 10, 2010
7767985 EUV pellicle and method for fabricating semiconductor dies using same Aug. 3, 2010
7767984 Resist collapse prevention using immersed hardening Aug. 3, 2010
7767983 Exposure device Aug. 3, 2010
7763872 High power EUV lamp system Jul. 27, 2010
7763869 UV light irradiating apparatus with liquid filter Jul. 27, 2010
7763866 Charged particle beam device with aperture Jul. 27, 2010
7763394 Protected pattern mask for reflection lithography in the extreme UV or soft X-ray range Jul. 27, 2010
7760341 Systems and methods for in-situ reflectivity degradation monitoring of optical collectors used in extreme ultraviolet (EUV) lithography processes Jul. 20, 2010
7755657 Method for high precision printing of patterns Jul. 13, 2010
7755070 Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation source Jul. 13, 2010
7755065 Focused ion beam apparatus Jul. 13, 2010
7755064 Resist pattern processing equipment and resist pattern processing method Jul. 13, 2010
7755063 Superresolution in microlithography and fluorescence microscopy Jul. 13, 2010
7755044 Apparatus for working and observing samples and method of working and observing cross sections Jul. 13, 2010
7750326 Lithographic apparatus and cleaning method therefor Jul. 6, 2010
7750323 Ion implanter and method for implanting a wafer Jul. 6, 2010
7750322 Ion implanter for photovoltaic cell fabrication Jul. 6, 2010
7750320 System and method for two-dimensional beam scan across a workpiece of an ion implanter Jul. 6, 2010
7750319 Method and system for measuring contamination of a lithographical element Jul. 6, 2010
7750318 Working method by focused ion beam and focused ion beam working apparatus Jul. 6, 2010
7750298 Interferometer having three electron biprisms Jul. 6, 2010
7750295 Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof Jul. 6, 2010
7749434 Device and method for sterilization Jul. 6, 2010
7741620 Multi-beam modulator for a particle beam and use of the multi-beam modulator for the maskless structuring of a substrate Jun. 22, 2010
7741616 EUV light source, EUV exposure equipment, and semiconductor device manufacturing method Jun. 22, 2010
7737422 Charged-particle exposure apparatus Jun. 15, 2010
7737421 Electron beam exposure apparatus and method for cleaning the same Jun. 15, 2010
7737419 Alignment apparatus, exposure apparatus, and device manufacturing method Jun. 15, 2010
7737418 Debris mitigation system and lithographic apparatus Jun. 15, 2010
7732792 Pattern measurement apparatus Jun. 8, 2010
7732790 Ion implanting apparatus for forming ion beam geometry Jun. 8, 2010
7732789 Optical system having a cleaning arrangement Jun. 8, 2010
7732763 Pattern inspection method, pattern inspection apparatus, semiconductor device manufacturing method, and program Jun. 8, 2010
RE41362 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby Jun. 1, 2010
7728312 Apparatus and method for partial ion implantation Jun. 1, 2010
7728308 Apparatus for blanking a charged particle beam Jun. 1, 2010
7727682 System and method for providing phase shift mask passivation layer Jun. 1, 2010
7723707 Techniques for plasma injection May. 25, 2010
7723704 EUV pellicle with increased EUV light transmittance May. 25, 2010

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