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Class Information
Number: 250/492.2
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices
Description: Subject matter wherein the object irradiated is made of, at least in part, a semiconductor material.










Sub-classes under this class:

Class Number Class Name Patents
250/492.21 Ion bombardment 1,492
250/492.22 Pattern control 1,095
250/492.24 Photocathode projection 55
250/492.23 Variable beam 408


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Next

Patent Number Title Of Patent Date Issued
7847250 Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device Dec. 7, 2010
7844941 Charged particle beam exposure method and charged particle beam exposure device Nov. 30, 2010
7842936 Lithography system and projection method Nov. 30, 2010
7842935 Raster frame beam system for electron beam lithography Nov. 30, 2010
7842934 Terminal structures of an ion implanter having insulated conductors with dielectric fins Nov. 30, 2010
7842920 Methods and systems of performing device failure analysis, electrical characterization and physical characterization Nov. 30, 2010
7838849 Ion implanters Nov. 23, 2010
7838848 Patterning device holding apparatus and application thereof Nov. 23, 2010
7838828 Semiconductor device inspection apparatus Nov. 23, 2010
7834332 Thin film pattern forming device and method Nov. 16, 2010
7829863 Electron beam irradiation device Nov. 9, 2010
7829853 Sample surface observation method Nov. 9, 2010
7829852 Device having etched feature with shrinkage carryover Nov. 9, 2010
7825673 Failure analysis method and failure analysis apparatus Nov. 2, 2010
7825390 Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus Nov. 2, 2010
7825389 Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture Nov. 2, 2010
7825378 Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus Nov. 2, 2010
7825377 Electron beam apparatus with aberration corrector Nov. 2, 2010
7825375 Microchip, method for using such microchip and mass spectrometry system Nov. 2, 2010
7825015 Method for implanting ions in semiconductor device Nov. 2, 2010
7824828 Method and system for improvement of dose correction for particle beam writers Nov. 2, 2010
7824825 Stencil masks, method of manufacturing stencil masks, and method of using stencil masks Nov. 2, 2010
7824469 Method and apparatus for fluid purification Nov. 2, 2010
7821714 Apparatus and method for measuring aerial image of EUV mask Oct. 26, 2010
7820988 Implant uniformity control Oct. 26, 2010
7820985 High tilt implant angle performance using in-axis tilt Oct. 26, 2010
7816866 Photocathode comprising a plurality of openings on an electron emission layer Oct. 19, 2010
7816656 Method of implanting ion species into microstructure products by concurrently cleaning the implanter Oct. 19, 2010
7816655 Reflective electron patterning device and method of using same Oct. 19, 2010
7812330 Radical cleaning arrangement for a lithographic apparatus Oct. 12, 2010
7812329 System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus Oct. 12, 2010
7812325 Implanting with improved uniformity and angle control on tilted wafers Oct. 12, 2010
7807985 Ion beam inspection apparatus, ion beam inspecting method, semiconductor manufacturing apparatus, and ion source apparatus Oct. 5, 2010
7807982 Particle beam irradiation system Oct. 5, 2010
7807980 Charged particle beam apparatus and methods for capturing images using the same Oct. 5, 2010
7807978 Divergent charged particle implantation for improved transistor symmetry Oct. 5, 2010
7807961 Techniques for ion implantation of molecular ions Oct. 5, 2010
7807323 Exposure condition setting method, semiconductor device manufacturing method, and exposure condition setting program Oct. 5, 2010
7800085 Microelectronic multiple electron beam emitting device Sep. 21, 2010
7800084 System and method for charged-particle beam lithography Sep. 21, 2010
7800083 Plasma electron flood for ion beam implanter Sep. 21, 2010
7800081 Pulse train annealing method and apparatus Sep. 21, 2010
7800080 Laser irradiation apparatus and method of manufacturing semiconductor device Sep. 21, 2010
7800079 Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method Sep. 21, 2010
7800075 Multi-function module for an electron beam column Sep. 21, 2010
7800060 Pattern measurement method and pattern measurement system Sep. 21, 2010
7800053 Method of evaluating ion irradiation effect, process simulator and device simulator Sep. 21, 2010
7799517 Single/double dipole mask for contact holes Sep. 21, 2010
7795601 Method and apparatus to improve lithography throughput Sep. 14, 2010
7795597 Deflector array, exposure apparatus, and device manufacturing method Sep. 14, 2010

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