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Class Information
Number: 250/492.2
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices
Description: Subject matter wherein the object irradiated is made of, at least in part, a semiconductor material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619808 |
Light wave front construction |
Nov. 17, 2009 |
| 7619729 |
Method for detecting particles and defects and inspection equipment thereof |
Nov. 17, 2009 |
| 7619230 |
Charged particle beam writing method and apparatus and readable storage medium |
Nov. 17, 2009 |
| 7619229 |
Technique for matching performance of ion implantation devices using an in-situ mask |
Nov. 17, 2009 |
| 7619227 |
Method of reducing radiation-induced damage in fused silica and articles having such reduction |
Nov. 17, 2009 |
| 7618751 |
RET for optical maskless lithography |
Nov. 17, 2009 |
| 7615763 |
System for magnetic scanning and correction of an ion beam |
Nov. 10, 2009 |
| 7612866 |
Lithography system |
Nov. 3, 2009 |
| 7612353 |
Lithographic apparatus, contaminant trap, and device manufacturing method |
Nov. 3, 2009 |
| 7612351 |
Ion implanter with function of compensating wafer cut angle and ion implantation method using the same |
Nov. 3, 2009 |
| 7612337 |
Focused ion beam system and a method of sample preparation and observation |
Nov. 3, 2009 |
| 7611975 |
Method of implanting a substrate and an ion implanter for performing the method |
Nov. 3, 2009 |
| 7608845 |
Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect |
Oct. 27, 2009 |
| 7608843 |
Method and apparatus for scanning a workpiece through an ion beam |
Oct. 27, 2009 |
| 7608821 |
Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method |
Oct. 27, 2009 |
| 7605385 |
Electro-less discharge extreme ultraviolet light source |
Oct. 20, 2009 |
| 7605383 |
Pattern writing apparatus using charged particle beam, and program-recorded readable recording medium |
Oct. 20, 2009 |
| 7605382 |
Ion implanter |
Oct. 20, 2009 |
| 7601974 |
Charged particle beam apparatus |
Oct. 13, 2009 |
| 7601968 |
Charged particle beam writing method and apparatus |
Oct. 13, 2009 |
| 7598755 |
Probe navigation method and device and defect inspection device |
Oct. 6, 2009 |
| 7598509 |
Laser produced plasma EUV light source |
Oct. 6, 2009 |
| 7598507 |
Adjustable lithography blocking device and method |
Oct. 6, 2009 |
| 7598505 |
Multichannel ion gun |
Oct. 6, 2009 |
| 7598504 |
Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus |
Oct. 6, 2009 |
| 7598499 |
Charged-particle exposure apparatus |
Oct. 6, 2009 |
| 7598495 |
Methods and systems for trapping ion beam particles and focusing an ion beam |
Oct. 6, 2009 |
| 7598490 |
SEM-type reviewing apparatus and a method for reviewing defects using the same |
Oct. 6, 2009 |
| 7595496 |
Optimized correction of wafer thermal deformations in a lithographic process |
Sep. 29, 2009 |
| 7595490 |
Charged particle beam emitting device and method for operating a charged particle beam emitting device |
Sep. 29, 2009 |
| 7595488 |
Method and apparatus for specifying working position on a sample and method of working the sample |
Sep. 29, 2009 |
| 7592611 |
Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam |
Sep. 22, 2009 |
| 7592610 |
Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Sep. 22, 2009 |
| 7592598 |
Illumination system particularly for microlithography |
Sep. 22, 2009 |
| 7589332 |
Via-hole processing method |
Sep. 15, 2009 |
| 7589328 |
Gas field ION source for multiple applications |
Sep. 15, 2009 |
| 7586113 |
EUV illumination system |
Sep. 8, 2009 |
| 7586111 |
Ion implanter having combined hybrid and double mechanical scan architecture |
Sep. 8, 2009 |
| 7586109 |
Technique for improving the performance and extending the lifetime of an ion source with gas dilution |
Sep. 8, 2009 |
| 7586108 |
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector |
Sep. 8, 2009 |
| 7583834 |
Laser etched fiducials in roll-roll display |
Sep. 1, 2009 |
| 7582884 |
Charged particle beam exposure method and charged particle beam exposure device |
Sep. 1, 2009 |
| 7582883 |
Method of scanning a substrate in an ion implanter |
Sep. 1, 2009 |
| 7582881 |
Lithographic apparatus and device manufacturing method |
Sep. 1, 2009 |
| 7580110 |
Exposure apparatus and exposure method |
Aug. 25, 2009 |
| 7579606 |
Method and system for logic design for cell projection particle beam lithography |
Aug. 25, 2009 |
| 7579591 |
Method and apparatus for analyzing sample |
Aug. 25, 2009 |
| 7576343 |
Method and apparatus for generating laser produced plasma |
Aug. 18, 2009 |
| 7576341 |
Lithography systems and methods for operating the same |
Aug. 18, 2009 |
| 7576340 |
Focused ion beam processing method |
Aug. 18, 2009 |
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