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Class Information
Number: 250/492.2
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices
Description: Subject matter wherein the object irradiated is made of, at least in part, a semiconductor material.

Sub-classes under this class:

Class Number Class Name Patents
250/492.21 Ion bombardment 1,492
250/492.22 Pattern control 1,095
250/492.24 Photocathode projection 55
250/492.23 Variable beam 408

Patents under this class:

Patent Number Title Of Patent Date Issued
8710469 Ion implantation method and ion implantation apparatus Apr. 29, 2014
8710468 Method of and apparatus for evaluating an optimal irradiation amount of an electron beam for drawing a pattern onto a sample Apr. 29, 2014
8710467 Multi charged particle beam writing apparatus and multi charged particle beam writing method Apr. 29, 2014
8710465 Pattern data conversion for lithography system Apr. 29, 2014
8710464 Specimen preparation device, and control method in specimen preparation device Apr. 29, 2014
8710461 Assembly for providing an aligned stack of two or more modules and a lithography system or a microscopy system comprising such an assembly Apr. 29, 2014
8710458 UV exposure method for reducing residue in de-taping process Apr. 29, 2014
8710439 Charged particle beam apparatus Apr. 29, 2014
8704464 Charged particle trajectory control apparatus, charged particle accelerator, charged particle storage ring, and deflection electromagnet Apr. 22, 2014
8692219 Method and apparatus for growing a III-nitride layer Apr. 8, 2014
8692216 Ion implantation apparatus and control method thereof Apr. 8, 2014
8692214 Charged particle beam inspection method Apr. 8, 2014
8692197 Scanning electron microscope optical condition setting method and scanning electron microscope Apr. 8, 2014
8686380 Charged particle beam apparatus Apr. 1, 2014
8686378 Charged particle beam drawing apparatus, and method of manufacturing article Apr. 1, 2014
8686370 EUV light source components and methods for producing, using and refurbishing same Apr. 1, 2014
8680489 Lithography method and device Mar. 25, 2014
8680488 System and method for producing and using multiple electron beams with quantized orbital angular momentum in an electron microscope Mar. 25, 2014
8674327 Systems and methods for uniformly implanting materials on substrates using directed magnetic fields Mar. 18, 2014
8669540 System and method for gas leak control in a substrate holder Mar. 11, 2014
8669537 Charged particle beam writing apparatus and method Mar. 11, 2014
8658993 Self-powered lithography method and apparatus using radioactive thin films Feb. 25, 2014
8658051 Lithography resolution improving method Feb. 25, 2014
8653487 Lithography apparatus and lithography method Feb. 18, 2014
8653485 Projection lens arrangement Feb. 18, 2014
8653483 Mask manufacturing device Feb. 18, 2014
8648318 Multiple beam charged particle optical system Feb. 11, 2014
8644571 Intensity-modulated proton therapy Feb. 4, 2014
8643058 Electro-optical device including nanocrystals Feb. 4, 2014
8642979 Radiotherapy device and method for balancing a radiotherapy device Feb. 4, 2014
8641592 Method and device for image guided dynamic radiation treatment of prostate cancer and other pelvic lesions Feb. 4, 2014
8637839 Method for operating a particle therapy system Jan. 28, 2014
8637838 System and method for ion implantation with improved productivity and uniformity Jan. 28, 2014
8637819 Cross-section processing and observation apparatus Jan. 28, 2014
8637382 Layer transfer of films utilizing thermal flux regime for energy controlled cleaving Jan. 28, 2014
8633458 Ion implant apparatus and a method of implanting ions Jan. 21, 2014
8633457 Background reduction system including louver Jan. 21, 2014
8629416 Charged particle beam masking for laser ablation micromachining Jan. 14, 2014
8624528 Method and apparatus coordinating synchrotron acceleration periods with patient respiration periods Jan. 7, 2014
8624478 High voltage shielding arrangement of a charged particle lithography system Jan. 7, 2014
8624210 Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates Jan. 7, 2014
8624206 Pattern modification schemes for improved FIB patterning Jan. 7, 2014
8624205 Charged particle beam writing apparatus and device production method Jan. 7, 2014
8624204 Serial irradiation of a substrate by multiple radiation sources Jan. 7, 2014
8619361 Direct derivative feedforward vibration compensation system Dec. 31, 2013
8618519 Energy degrader and charged particle irradiation system including the same Dec. 31, 2013
8618518 Apparatus and method for forming a solid immersion lens using a binary bitmap milling pattern Dec. 31, 2013
8618516 Charged-particle beam exposure apparatus and method of manufacturing article Dec. 31, 2013
8618514 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Dec. 31, 2013
8618503 Electron beam sterilizer Dec. 31, 2013

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