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Class Information
Number: 250/492.1
Name: Radiant energy > Irradiation of objects or material
Description: Subject matter comprising means or methods of irradiation an object or material including a source and not provided for in any of the preceding subclasses.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7501618 |
Deformation method of nanometer scale material using particle beam and nano tool thereby |
Mar. 10, 2009 |
| 7498588 |
Tandem accelerator having low-energy static voltage injection and method of operation thereof |
Mar. 3, 2009 |
| 7498586 |
Ion source control system |
Mar. 3, 2009 |
| 7498065 |
UV printing and curing of CDs, DVDs, Golf Balls And Other Products |
Mar. 3, 2009 |
| 7495245 |
Apparatus and method for controlled particle beam manufacturing |
Feb. 24, 2009 |
| 7495244 |
Apparatus and method for controlled particle beam manufacturing |
Feb. 24, 2009 |
| 7495243 |
Writing method of charged particle beam, support apparatus of charged particle beam writing apparatus, writing data generating method and program-recorded readable recording medium |
Feb. 24, 2009 |
| 7495242 |
Apparatus and method for controlled particle beam manufacturing |
Feb. 24, 2009 |
| 7495241 |
Ion beam irradiation apparatus and insulating spacer for the same |
Feb. 24, 2009 |
| 7495240 |
Apparatus and method for modifying an object |
Feb. 24, 2009 |
| 7495239 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
Feb. 24, 2009 |
| 7495238 |
Two-dimensional patterning method, electronic device using same, and magnetic device fabricating method |
Feb. 24, 2009 |
| 7491950 |
Method for retrofitting concrete structures |
Feb. 17, 2009 |
| 7488960 |
Apparatus and method for controlled particle beam manufacturing |
Feb. 10, 2009 |
| 7488958 |
High conductance ion source |
Feb. 10, 2009 |
| 7488957 |
Pattern generation methods and apparatuses |
Feb. 10, 2009 |
| 7488937 |
Method and apparatus for the improvement of material/voltage contrast |
Feb. 10, 2009 |
| 7485881 |
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system |
Feb. 3, 2009 |
| 7485879 |
Electron beam writing apparatus and writing method |
Feb. 3, 2009 |
| 7485258 |
Method and device for sterilizing containers |
Feb. 3, 2009 |
| 7482611 |
Lithographic apparatus and device manufacturing method |
Jan. 27, 2009 |
| 7482609 |
LPP EUV light source drive laser system |
Jan. 27, 2009 |
| 7482606 |
Apparatus and method for compensation of movements of a target volume during ion beam irradiation |
Jan. 27, 2009 |
| 7482604 |
Electron beam lithography apparatus, lithography method, lithography program, and manufacturing method of a semiconductor device |
Jan. 27, 2009 |
| 7482603 |
Apparatus and method for specimen fabrication |
Jan. 27, 2009 |
| 7479646 |
Extreme ultraviolet source with wide angle vapor containment and reflux |
Jan. 20, 2009 |
| 7479632 |
E-beam vision system for monitoring and control |
Jan. 20, 2009 |
| 7476883 |
Biomarker generator system |
Jan. 13, 2009 |
| 7476882 |
Calibration method for electron-beam system and electron-beam system |
Jan. 13, 2009 |
| 7476881 |
Charged beam drawing apparatus and charged beam drawing method |
Jan. 13, 2009 |
| 7476875 |
Contact opening metrology |
Jan. 13, 2009 |
| 7473917 |
Lithographic apparatus and method |
Jan. 6, 2009 |
| 7473916 |
Apparatus and method for detecting contamination within a lithographic apparatus |
Jan. 6, 2009 |
| 7473915 |
System and method to pattern an object through control of a radiation source |
Jan. 6, 2009 |
| 7473912 |
Method and apparatus for patterning micro and nano structures using a mask-less process |
Jan. 6, 2009 |
| 7473910 |
Electron beam lithography apparatus |
Jan. 6, 2009 |
| 7473909 |
Use of ion induced luminescence (IIL) as feedback control for ion implantation |
Jan. 6, 2009 |
| 7473908 |
Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface |
Jan. 6, 2009 |
| 7470921 |
Light-emitting diode device |
Dec. 30, 2008 |
| 7470919 |
Substrate support assembly with thermal isolating plate |
Dec. 30, 2008 |
| 7470916 |
Lithographic apparatus, device manufacturing method and radiation collector |
Dec. 30, 2008 |
| 7465946 |
Alternative fuels for EUV light source |
Dec. 16, 2008 |
| 7465945 |
Method and apparatus for processing a micro sample |
Dec. 16, 2008 |
| 7465922 |
Accelerating electrostatic lens gun for high-speed electron beam inspection |
Dec. 16, 2008 |
| 7462850 |
Radical cleaning arrangement for a lithographic apparatus |
Dec. 9, 2008 |
| 7462843 |
Apparatus and methods for ion beam implantation |
Dec. 9, 2008 |
| 7462842 |
Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements |
Dec. 9, 2008 |
| 7462841 |
Lithographic apparatus, device manufacturing method, and use of a radiation collector |
Dec. 9, 2008 |
| 7459703 |
Ion implant beam angle integrity monitoring and adjusting |
Dec. 2, 2008 |
| 7459701 |
Stage apparatus, lithographic apparatus and device manufacturing method |
Dec. 2, 2008 |
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