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Class Information
Number: 250/492.1
Name: Radiant energy > Irradiation of objects or material
Description: Subject matter comprising means or methods of irradiation an object or material including a source and not provided for in any of the preceding subclasses.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619234 |
Ultraviolet monitoring system |
Nov. 17, 2009 |
| 7619233 |
Light source |
Nov. 17, 2009 |
| 7619229 |
Technique for matching performance of ion implantation devices using an in-situ mask |
Nov. 17, 2009 |
| 7619227 |
Method of reducing radiation-induced damage in fused silica and articles having such reduction |
Nov. 17, 2009 |
| 7615767 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Nov. 10, 2009 |
| 7615766 |
Target supplier |
Nov. 10, 2009 |
| 7615765 |
Charged particle beam apparatus |
Nov. 10, 2009 |
| 7615763 |
System for magnetic scanning and correction of an ion beam |
Nov. 10, 2009 |
| 7612353 |
Lithographic apparatus, contaminant trap, and device manufacturing method |
Nov. 3, 2009 |
| 7608845 |
Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect |
Oct. 27, 2009 |
| 7608843 |
Method and apparatus for scanning a workpiece through an ion beam |
Oct. 27, 2009 |
| 7608842 |
Driving scanning fiber devices with variable frequency drive signals |
Oct. 27, 2009 |
| 7608821 |
Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method |
Oct. 27, 2009 |
| 7605383 |
Pattern writing apparatus using charged particle beam, and program-recorded readable recording medium |
Oct. 20, 2009 |
| 7604922 |
Process of surface treatment, surface treating device, surface treated plate, and electro-optic device, and electronic equipment |
Oct. 20, 2009 |
| 7601976 |
Dual beam system |
Oct. 13, 2009 |
| 7601974 |
Charged particle beam apparatus |
Oct. 13, 2009 |
| 7601968 |
Charged particle beam writing method and apparatus |
Oct. 13, 2009 |
| 7598507 |
Adjustable lithography blocking device and method |
Oct. 6, 2009 |
| 7598505 |
Multichannel ion gun |
Oct. 6, 2009 |
| 7598504 |
Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus |
Oct. 6, 2009 |
| 7598503 |
Lithographic apparatus and cleaning method therefor |
Oct. 6, 2009 |
| 7598499 |
Charged-particle exposure apparatus |
Oct. 6, 2009 |
| 7598491 |
Observing method and its apparatus using electron microscope |
Oct. 6, 2009 |
| 7596197 |
Gamma source for active interrogation |
Sep. 29, 2009 |
| 7595496 |
Optimized correction of wafer thermal deformations in a lithographic process |
Sep. 29, 2009 |
| 7592611 |
Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam |
Sep. 22, 2009 |
| 7592606 |
Manufacturing equipment using ION beam or electron beam |
Sep. 22, 2009 |
| 7592604 |
Charged particle beam apparatus |
Sep. 22, 2009 |
| 7592598 |
Illumination system particularly for microlithography |
Sep. 22, 2009 |
| 7589336 |
Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectors |
Sep. 15, 2009 |
| 7589334 |
Ion beam delivery equipment and an ion beam delivery method |
Sep. 15, 2009 |
| 7588803 |
Multi step ebeam process for modifying dielectric materials |
Sep. 15, 2009 |
| 7586113 |
EUV illumination system |
Sep. 8, 2009 |
| 7586112 |
Particle therapy system |
Sep. 8, 2009 |
| 7586108 |
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector |
Sep. 8, 2009 |
| 7586102 |
Automated system for formulating radiopharmaceuticals |
Sep. 8, 2009 |
| 7582884 |
Charged particle beam exposure method and charged particle beam exposure device |
Sep. 1, 2009 |
| 7582883 |
Method of scanning a substrate in an ion implanter |
Sep. 1, 2009 |
| 7579606 |
Method and system for logic design for cell projection particle beam lithography |
Aug. 25, 2009 |
| 7579604 |
Beam stop and beam tuning methods |
Aug. 25, 2009 |
| 7579603 |
Particle therapy device and method of designing a radiation path |
Aug. 25, 2009 |
| 7576344 |
Target positioner |
Aug. 18, 2009 |
| 7576343 |
Method and apparatus for generating laser produced plasma |
Aug. 18, 2009 |
| 7576337 |
Power supply for an ion implantation system |
Aug. 18, 2009 |
| 7573052 |
Exposure apparatus, exposure method, and device manufacturing method |
Aug. 11, 2009 |
| 7573047 |
Wafer holder and sample producing apparatus using it |
Aug. 11, 2009 |
| 7569841 |
Deflection signal compensation for charged particle beam |
Aug. 4, 2009 |
| 7569840 |
Alignment method of a laser beam processing machine |
Aug. 4, 2009 |
| 7568365 |
Method and apparatus for micromachining bulk transparent materials using localized heating by nonlinearly absorbed laser radiation, and devices fabricated thereby |
Aug. 4, 2009 |
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