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Class Information
Number: 250/492.1
Name: Radiant energy > Irradiation of objects or material
Description: Subject matter comprising means or methods of irradiation an object or material including a source and not provided for in any of the preceding subclasses.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459703 |
Ion implant beam angle integrity monitoring and adjusting |
Dec. 2, 2008 |
| 7459701 |
Stage apparatus, lithographic apparatus and device manufacturing method |
Dec. 2, 2008 |
| 7459700 |
Anthrax remediation and response |
Dec. 2, 2008 |
| 7456416 |
Plug-in radiation source module for a weathering apparatus |
Nov. 25, 2008 |
| 7456415 |
Charged particle beam extraction system and method |
Nov. 25, 2008 |
| 7456408 |
Illumination system particularly for microlithography |
Nov. 25, 2008 |
| 7454990 |
Variably controlled accelerated weathering test apparatus |
Nov. 25, 2008 |
| 7453560 |
Method of evaluating optical element |
Nov. 18, 2008 |
| 7453076 |
Bi-polar treatment facility for treating target cells with both positive and negative ions |
Nov. 18, 2008 |
| 7453074 |
Ion implanter with ionization chamber electrode design |
Nov. 18, 2008 |
| 7453073 |
Method and equipment for specimen preparation |
Nov. 18, 2008 |
| 7449700 |
Electron beam exposure apparatus, electron beam exposure method and method of manufacturing semiconductor device |
Nov. 11, 2008 |
| 7449699 |
Method and apparatus for creating a topography at a surface |
Nov. 11, 2008 |
| 7449690 |
Inspection method and inspection apparatus using charged particle beam |
Nov. 11, 2008 |
| 7446328 |
Patient alignment system with external measurement and object coordination for radiation therapy system |
Nov. 4, 2008 |
| 7446326 |
Technique for improving ion implanter productivity |
Nov. 4, 2008 |
| 7446325 |
Reflector for generating a neutral beam and substrate processing apparatus including the same |
Nov. 4, 2008 |
| 7446324 |
Methods utilizing scanning probe microscope tips and products thereof or produced thereby |
Nov. 4, 2008 |
| 7446309 |
In-plane distribution measurement method |
Nov. 4, 2008 |
| 7443948 |
Illumination system particularly for microlithography |
Oct. 28, 2008 |
| 7442940 |
Focal plane array incorporating ultra-small resonant structures |
Oct. 28, 2008 |
| 7441444 |
AFM cantilevers and methods for making and using same |
Oct. 28, 2008 |
| 7439528 |
Particle therapy system and method |
Oct. 21, 2008 |
| 7439527 |
Ion beam irradiation apparatus |
Oct. 21, 2008 |
| 7439525 |
Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particl |
Oct. 21, 2008 |
| 7435981 |
Electron beam sterilizer |
Oct. 14, 2008 |
| 7435980 |
Electron beam irradiation device |
Oct. 14, 2008 |
| 7435978 |
System, method and a program for correcting conditions for controlling a charged particle beam for lithography and observation, and a program and method for manufacturing a semiconductor devic |
Oct. 14, 2008 |
| 7433751 |
Sorting a group of integrated circuit devices for those devices requiring special testing |
Oct. 7, 2008 |
| 7432516 |
Rapid cycling medical synchrotron and beam delivery system |
Oct. 7, 2008 |
| 7432513 |
Gas shower, lithographic apparatus and use of a gas shower |
Oct. 7, 2008 |
| 7427753 |
Method of cross-section milling with focused ion beam (FIB) device |
Sep. 23, 2008 |
| 7426018 |
Lithographic apparatus, illumination system and filter system |
Sep. 16, 2008 |
| 7425715 |
Digital parallel electron beam lithography stamp |
Sep. 16, 2008 |
| 7425714 |
Measurement method of electron beam current, electron beam writing system and electron beam detector |
Sep. 16, 2008 |
| 7423276 |
Irradiation system with ion beam/charged particle beam |
Sep. 9, 2008 |
| 7423269 |
Automated feature analysis with off-axis tilting |
Sep. 9, 2008 |
| 7420189 |
Ultra precise polishing method and ultra precise polishing apparatus |
Sep. 2, 2008 |
| 7420188 |
Exposure method and apparatus for immersion lithography |
Sep. 2, 2008 |
| 7417242 |
Method of measuring ion beam position |
Aug. 26, 2008 |
| 7417239 |
Method and device for electron beam irradiation |
Aug. 26, 2008 |
| 7417227 |
Scanning interference electron microscope |
Aug. 26, 2008 |
| 7414251 |
Method for providing an operable filter system for filtering particles out of a beam of radiation, filter system, apparatus and lithographic apparatus comprising the filter system |
Aug. 19, 2008 |
| 7412086 |
Setting a relative position of a radiation device and a patient |
Aug. 12, 2008 |
| 7411709 |
Beam processing system and beam processing method |
Aug. 12, 2008 |
| 7411202 |
Irradiating apparatus |
Aug. 12, 2008 |
| 7411201 |
Projection objective for a microlithographic projection exposure apparatus |
Aug. 12, 2008 |
| 7408692 |
Process for producing three-dimensional structure |
Aug. 5, 2008 |
| 7405415 |
Ion source with particular grid assembly |
Jul. 29, 2008 |
| 7405407 |
Ion beam therapy system and its couch positioning method |
Jul. 29, 2008 |
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