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Class Information
Number: 250/443.1
Name: Radiant energy > Inspection of solids or liquids by charged particles > Analyte supports > With heat transfer or temperature-indication means
Description: Subject matter wherein means are provided for conducting heat to or away from the object, or means for displaying information about the temperature of the object.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7427755 |
Integrated electron beam tip and sample heating device for a scanning tunneling microscope |
Sep. 23, 2008 |
| 7420184 |
Particle-optical apparatus with temperature switch |
Sep. 2, 2008 |
| 7414250 |
Cryogenic variable temperature vacuum scanning tunneling microscope |
Aug. 19, 2008 |
| 7361915 |
Beam current stabilization utilizing gas feed control loop |
Apr. 22, 2008 |
| 7330583 |
Integrated visual imaging and electronic sensing inspection systems |
Feb. 12, 2008 |
| 7304302 |
Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis |
Dec. 4, 2007 |
| 7276709 |
System and method for electron-beam lithography |
Oct. 2, 2007 |
| 7247864 |
Charged particle beam apparatus |
Jul. 24, 2007 |
| 7238953 |
Specimen holder for an electron microscope and method for reducing thermal drift in a microscope |
Jul. 3, 2007 |
| 7233438 |
Specimen temperature adjusting apparatus |
Jun. 19, 2007 |
| 7211806 |
Particle beam apparatus |
May. 1, 2007 |
| 7151269 |
Sample inspection apparatus |
Dec. 19, 2006 |
| 7105836 |
Method and apparatus for cooling a reticle during lithographic exposure |
Sep. 12, 2006 |
| 7078689 |
Integrated electron beam and contaminant removal system |
Jul. 18, 2006 |
| 7060991 |
Method and apparatus for the portable identification of material thickness and defects along uneven surfaces using spatially controlled heat application |
Jun. 13, 2006 |
| 7057184 |
Scanning electron microscope |
Jun. 6, 2006 |
| 6949752 |
Electron beam apparatus and high-voltage discharge prevention method |
Sep. 27, 2005 |
| 6894288 |
Manipulator for an optical or particle-optical apparatus |
May. 17, 2005 |
| 6888136 |
Method of obtaining a particle-optical image of a sample in a particle-optical device |
May. 3, 2005 |
| 6734426 |
Probe scanning device |
May. 11, 2004 |
| 6734439 |
Wafer pedestal tilt mechanism and cooling system |
May. 11, 2004 |
| 6696692 |
Process control methods for use with e-beam fabrication technology |
Feb. 24, 2004 |
| 6686598 |
Wafer clamping apparatus and method |
Feb. 3, 2004 |
| 6677594 |
Scanning wheel for ion implantation process chamber |
Jan. 13, 2004 |
| 6627904 |
Ion implantation apparatus |
Sep. 30, 2003 |
| 6617575 |
Modified ion source targets for use in liquid maldi MS |
Sep. 9, 2003 |
| 6605814 |
Apparatus for curing resist |
Aug. 12, 2003 |
| 6590378 |
Real time parameter monitoring apparatus for high voltage chamber in semiconductor wafer processing system |
Jul. 8, 2003 |
| 6570169 |
Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device |
May. 27, 2003 |
| 6545275 |
Beam evaluation |
Apr. 8, 2003 |
| 6495838 |
Sample heating holder, method of observing a sample and charged particle beam apparatus |
Dec. 17, 2002 |
| 6486785 |
Method of taking infrared temperature readings through a wildlife shield for electrical equipment |
Nov. 26, 2002 |
| 6458723 |
High temperature implant apparatus |
Oct. 1, 2002 |
| 6414323 |
Charged particle beam apparatus and method of controlling charged particle beam |
Jul. 2, 2002 |
| 6403969 |
Ion implantation system and ion implantation method |
Jun. 11, 2002 |
| 6365905 |
Focused ion beam processing apparatus |
Apr. 2, 2002 |
| 6239441 |
Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device |
May. 29, 2001 |
| 6111260 |
Method and apparatus for in situ anneal during ion implant |
Aug. 29, 2000 |
| 6104025 |
Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer |
Aug. 15, 2000 |
| 6084240 |
Ion implanter |
Jul. 4, 2000 |
| 5986270 |
Particle-optical apparatus including a low-temperature specimen holder |
Nov. 16, 1999 |
| 5966200 |
Charged particle beam exposure apparatus |
Oct. 12, 1999 |
| 5945671 |
Scanning probe microscope and micro-area processing machine both having micro-positioning mechanism |
Aug. 31, 1999 |
| 5914493 |
Charged-particle-beam exposure apparatus and methods with substrate-temperature control |
Jun. 22, 1999 |
| 5907390 |
Positioning apparatus, exposure apparatus and method of manufacturing semiconductor device |
May. 25, 1999 |
| 5898177 |
Electron microscope |
Apr. 27, 1999 |
| 5828070 |
System and method for cooling workpieces processed by an ion implantation system |
Oct. 27, 1998 |
| 5821545 |
Heated stage for a scanning probe microscope |
Oct. 13, 1998 |
| 5816052 |
Method and apparatus for mechanically cooling energy dispersive X-ray spectrometers |
Oct. 6, 1998 |
| 5753924 |
Ultra-high tilt specimen cryotransfer holder for electron microscope |
May. 19, 1998 |
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