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Class Information
Number: 250/442.11
Name: Radiant energy > Inspection of solids or liquids by charged particles > Analyte supports > With object moving or positioning means
Description: Subject matter having means to change the location or position of material or an article to be examined or treated.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7456413 |
Apparatus for evacuating a sample |
Nov. 25, 2008 |
| 7449690 |
Inspection method and inspection apparatus using charged particle beam |
Nov. 11, 2008 |
| 7442942 |
Charged particle beam apparatus |
Oct. 28, 2008 |
| 7435974 |
Electron microscope and specimen stage positioning control method for the electron microscope |
Oct. 14, 2008 |
| 7432503 |
Scanning electron microscope and method for detecting an image using the same |
Oct. 7, 2008 |
| 7425713 |
Synchronous raster scanning lithographic system |
Sep. 16, 2008 |
| 7423263 |
Planar view sample preparation |
Sep. 9, 2008 |
| 7423264 |
Atomic force microscope |
Sep. 9, 2008 |
| 7423269 |
Automated feature analysis with off-axis tilting |
Sep. 9, 2008 |
| 7420184 |
Particle-optical apparatus with temperature switch |
Sep. 2, 2008 |
| 7417242 |
Method of measuring ion beam position |
Aug. 26, 2008 |
| 7414250 |
Cryogenic variable temperature vacuum scanning tunneling microscope |
Aug. 19, 2008 |
| 7405396 |
Sample handling mechanisms and methods for mass spectrometry |
Jul. 29, 2008 |
| 7397051 |
Method and apparatus for specimen fabrication |
Jul. 8, 2008 |
| 7397026 |
Efficient electron transfer dissociation for mass spectrometry |
Jul. 8, 2008 |
| 7397040 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jul. 8, 2008 |
| 7394076 |
Moving vacuum chamber stage with air bearing and differentially pumped grooves |
Jul. 1, 2008 |
| 7394078 |
Technique for ion beam angle spread control for advanced applications |
Jul. 1, 2008 |
| 7391038 |
Technique for isocentric ion beam scanning |
Jun. 24, 2008 |
| 7385185 |
Molecular activation for tandem mass spectroscopy |
Jun. 10, 2008 |
| 7385206 |
Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method |
Jun. 10, 2008 |
| 7381971 |
Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope |
Jun. 3, 2008 |
| 7381970 |
Specimen stage for charged-particle scanning microscopy |
Jun. 3, 2008 |
| 7375346 |
Positioning device and method of initializing a positioning device |
May. 20, 2008 |
| 7375325 |
Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used therefor |
May. 20, 2008 |
| 7372027 |
Electron beam apparatus and method for manufacturing semiconductor device |
May. 13, 2008 |
| 7368729 |
Method, apparatus and system for specimen fabrication by using an ion beam |
May. 6, 2008 |
| 7361905 |
Substrate processing apparatus and maintenance method therefor |
Apr. 22, 2008 |
| 7361915 |
Beam current stabilization utilizing gas feed control loop |
Apr. 22, 2008 |
| 7355188 |
Technique for uniformity tuning in an ion implanter system |
Apr. 8, 2008 |
| 7350404 |
Scanning type probe microscope and probe moving control method therefor |
Apr. 1, 2008 |
| 7348576 |
Technique for ion beam angle process control |
Mar. 25, 2008 |
| 7348571 |
Scanning mechanism for scanning probe microscope and scanning probe microscope |
Mar. 25, 2008 |
| 7323695 |
Reciprocating drive for scanning a workpiece |
Jan. 29, 2008 |
| 7301146 |
Probe driving method, and probe apparatus |
Nov. 27, 2007 |
| 7301157 |
Cluster tool for microscopic processing of samples |
Nov. 27, 2007 |
| 7297944 |
Ion beam device and ion beam processing method, and holder member |
Nov. 20, 2007 |
| 7291847 |
Specimen tip and tip holder assembly |
Nov. 6, 2007 |
| 7285778 |
Probe current imaging |
Oct. 23, 2007 |
| 7282707 |
Method and apparatus for handling a sample plate for use in mass analysis |
Oct. 16, 2007 |
| 7278299 |
Method of processing vertical cross-section using atomic force microscope |
Oct. 9, 2007 |
| 7276712 |
Method and apparatus for scanning a workpiece in a vacuum chamber of an ion beam implanter |
Oct. 2, 2007 |
| 7267520 |
Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights |
Sep. 11, 2007 |
| 7263162 |
Sample mounts for microcrystal crystallography |
Aug. 28, 2007 |
| 7259380 |
Scanning mechanism of an ion implanter |
Aug. 21, 2007 |
| 7253419 |
Apertured plate support mechanism and charged-particle beam instrument equipped therewith |
Aug. 7, 2007 |
| 7253423 |
Technique for uniformity tuning in an ion implanter system |
Aug. 7, 2007 |
| 7253408 |
Environmental cell for a scanning probe microscope |
Aug. 7, 2007 |
| 7247848 |
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus |
Jul. 24, 2007 |
| 7238953 |
Specimen holder for an electron microscope and method for reducing thermal drift in a microscope |
Jul. 3, 2007 |
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