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Class Information
Number: 250/427
Name: Radiant energy > Ion generation > Electron bombardment type
Description: Subject matter wherein the means to remove or add electrons comprises means to project electrons toward the materials to be ionized.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459858 |
Hall thruster with shared magnetic structure |
Dec. 2, 2008 |
| 7459704 |
Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms |
Dec. 2, 2008 |
| 7456491 |
Large area electron emission system for application in mask-based lithography, maskless lithography II and microscopy |
Nov. 25, 2008 |
| 7442941 |
Ion generator |
Oct. 28, 2008 |
| 7435971 |
Ion source |
Oct. 14, 2008 |
| 7420182 |
Combined radio frequency and hall effect ion source and plasma accelerator system |
Sep. 2, 2008 |
| 7411186 |
Multimode ion source with improved ionization |
Aug. 12, 2008 |
| 7405411 |
Ion source with multi-piece outer cathode |
Jul. 29, 2008 |
| 7381943 |
Neutral particle beam processing apparatus |
Jun. 3, 2008 |
| 7365341 |
Gas cluster ion beam emitting apparatus and method for ionization of gas cluster |
Apr. 29, 2008 |
| 7365339 |
Ion source |
Apr. 29, 2008 |
| 7361915 |
Beam current stabilization utilizing gas feed control loop |
Apr. 22, 2008 |
| 7332714 |
Quadrupole mass spectrometer and vacuum device using the same |
Feb. 19, 2008 |
| 7332345 |
Chemical sensor system |
Feb. 19, 2008 |
| 7320733 |
Electron bombardment heating apparatus and temperature controlling apparatus and control method thereof |
Jan. 22, 2008 |
| 7291845 |
Method for controlling space charge-driven ion instabilities in electron impact ion sources |
Nov. 6, 2007 |
| 7271397 |
Combined chemical/biological agent detection system and method utilizing mass spectrometry |
Sep. 18, 2007 |
| 7259379 |
On-axis electron impact ion source |
Aug. 21, 2007 |
| 7247863 |
System and method for rapidly controlling the output of an ion source for ion implantation |
Jul. 24, 2007 |
| 7220976 |
Ion source and ion implanter having the same |
May. 22, 2007 |
| 7204921 |
Vacuum apparatus and vacuum processing method |
Apr. 17, 2007 |
| 7205540 |
Electron beam apparatus and device manufacturing method using same |
Apr. 17, 2007 |
| 7205552 |
Monatomic boron ion source and method |
Apr. 17, 2007 |
| 7196337 |
Particle processing apparatus and methods |
Mar. 27, 2007 |
| 7183559 |
Ion source with substantially planar design |
Feb. 27, 2007 |
| 7138768 |
Indirectly heated cathode ion source |
Nov. 21, 2006 |
| 7116054 |
High-efficient ion source with improved magnetic field |
Oct. 3, 2006 |
| 7102139 |
Source arc chamber for ion implanter having repeller electrode mounted to external insulator |
Sep. 5, 2006 |
| 7067821 |
Flood gun for charge neutralization |
Jun. 27, 2006 |
| 7057170 |
Compact ion gauge using micromachining and MISOC devices |
Jun. 6, 2006 |
| 7041984 |
Replaceable anode liner for ion source |
May. 9, 2006 |
| 7038203 |
Method for observing high-altitude neutral air and device for observing high-altitude neutral air |
May. 2, 2006 |
| 7038199 |
Apparatus and method for elemental mass spectrometry |
May. 2, 2006 |
| 7034290 |
Target support with pattern recognition sites |
Apr. 25, 2006 |
| 7022999 |
Ion implantation ion source, system and method |
Apr. 4, 2006 |
| 6998611 |
Electron beam apparatus and device manufacturing method using same |
Feb. 14, 2006 |
| 6998622 |
On-axis electron impact ion source |
Feb. 14, 2006 |
| 6984831 |
Gas flow restricting cathode system for ion implanter and related method |
Jan. 10, 2006 |
| 6974957 |
Ionization device for aerosol mass spectrometer and method of ionization |
Dec. 13, 2005 |
| 6958481 |
Decaborane ion source |
Oct. 25, 2005 |
| 6919672 |
Closed drift ion source |
Jul. 19, 2005 |
| 6911649 |
Particle generator |
Jun. 28, 2005 |
| 6911770 |
Apparatus with a cap and cover assembly, an electron gun with a cap assembly, and a method of using a tube |
Jun. 28, 2005 |
| 6894296 |
Multi-inlet PFS arc chamber for hi-current implanter |
May. 17, 2005 |
| 6885010 |
Carbon nanotube electron ionization sources |
Apr. 26, 2005 |
| 6878946 |
Indirectly heated button cathode for an ion source |
Apr. 12, 2005 |
| 6864486 |
Ion sources |
Mar. 8, 2005 |
| 6855481 |
Apparatus and a method for forming a pattern using a crystal structure of material |
Feb. 15, 2005 |
| 6849854 |
Ion source |
Feb. 1, 2005 |
| 6847043 |
Ion sources for ion implantation apparatus |
Jan. 25, 2005 |
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