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Class Information
Number: 250/400
Name: Radiant energy > With charged particle beam deflection or focussing > With target means > With means to convey or guide the target
Description: Subject matter combined with means to move the material irradiated to, through, within or from the beam path or to cause a moving material to move to, through, within or from the beam path.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459692 |
Electron confinement inside magnet of ion implanter |
Dec. 2, 2008 |
| 7435969 |
Method of manufacturing electrostatic deflector, and electrostatic deflector |
Oct. 14, 2008 |
| 7423276 |
Irradiation system with ion beam/charged particle beam |
Sep. 9, 2008 |
| 7397039 |
Real-time compensation of mechanical position error in pattern generation or imaging applications |
Jul. 8, 2008 |
| 7397026 |
Efficient electron transfer dissociation for mass spectrometry |
Jul. 8, 2008 |
| 7385185 |
Molecular activation for tandem mass spectroscopy |
Jun. 10, 2008 |
| 7385203 |
Charged particle beam extraction system and method |
Jun. 10, 2008 |
| 7375357 |
Permanent magnet radiation dose delivery enhancement |
May. 20, 2008 |
| 7361916 |
Coupled nano-resonating energy emitting structures |
Apr. 22, 2008 |
| 7348569 |
Acceleration of charged particles using spatially and temporally shaped electromagnetic radiation |
Mar. 25, 2008 |
| 7317192 |
High energy polyenergetic ion selection systems, ion beam therapy systems, and ion beam treatment centers |
Jan. 8, 2008 |
| 7294844 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Nov. 13, 2007 |
| 7285787 |
Epi-illumination microscope and fluorescence filter set |
Oct. 23, 2007 |
| 7282707 |
Method and apparatus for handling a sample plate for use in mass analysis |
Oct. 16, 2007 |
| 7247848 |
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus |
Jul. 24, 2007 |
| 7230240 |
Enhanced scanning control of charged particle beam systems |
Jun. 12, 2007 |
| 7205541 |
Charged particle beam apparatus |
Apr. 17, 2007 |
| 7173253 |
Object-moving method, object-moving apparatus, production process and produced apparatus |
Feb. 6, 2007 |
| 7138642 |
Ion source with controlled superposition of electrostatic and gas flow fields |
Nov. 21, 2006 |
| 7109481 |
Matrix-assisted laser desorption and ionization (MALDI) sample plate releasably coupled to a sample plate adapter |
Sep. 19, 2006 |
| 7067827 |
Apparatus and method for electron beam irradiation having improved dose uniformity ratio |
Jun. 27, 2006 |
| 6894435 |
Method and device for rastering source redundancy |
May. 17, 2005 |
| 6888139 |
Electron microscope |
May. 3, 2005 |
| 6872942 |
High-speed inspection of flat substrates with underlying visible topology |
Mar. 29, 2005 |
| 6855926 |
Instrument and method for combined surface topography and spectroscopic analysis |
Feb. 15, 2005 |
| 6740894 |
Adjustable implantation angle workpiece support structure for an ion beam implanter utilizing a linear scan motor |
May. 25, 2004 |
| 6710353 |
Actuator and transducer |
Mar. 23, 2004 |
| 6703627 |
Real time monitor method and system for extraction electrode |
Mar. 9, 2004 |
| 6674073 |
Scattering target-holding mechanism and an electron spin analyzer |
Jan. 6, 2004 |
| 6657204 |
Cooling of voice coil motors in lithographic projection apparatus |
Dec. 2, 2003 |
| 6559463 |
Mask pattern transfer method, mask pattern transfer apparatus using the method, and device manufacturing method |
May. 6, 2003 |
| 6542219 |
Optical correction plate, and its application in a lithographic projection apparatus |
Apr. 1, 2003 |
| 6528798 |
Technique for manufacturing an electrostatic element for steering a charged particle beam |
Mar. 4, 2003 |
| 6239543 |
Electron beam plasma formation for surface chemistry |
May. 29, 2001 |
| 6222196 |
Rotatable workpiece support including cyclindrical workpiece support surfaces for an ion beam implanter |
Apr. 24, 2001 |
| 6210516 |
Process of enhanced chemical bonding by electron seam radiation |
Apr. 3, 2001 |
| 6110318 |
System for selective electron beam irradiation |
Aug. 29, 2000 |
| 6093456 |
Beam stop apparatus for an ion implanter |
Jul. 25, 2000 |
| 5801387 |
Method of and apparatus for the electron beam treatment of powders and aggregates in pneumatic transfer |
Sep. 1, 1998 |
| 5610406 |
Charged particle beam exposure method and apparatus |
Mar. 11, 1997 |
| 5554856 |
Conveyer-type unit for radiation sterilization |
Sep. 10, 1996 |
| RE35203 |
Electron beam array for surface treatment |
Apr. 9, 1996 |
| 5449917 |
Method and apparatus for forming a plurality of tracks in a flexible workpiece with a high energy particle |
Sep. 12, 1995 |
| 5449916 |
Electron radiation dose tailoring by variable beam pulse generation |
Sep. 12, 1995 |
| 5414267 |
Electron beam array for surface treatment |
May. 9, 1995 |
| 5404018 |
Method of and an apparatus for charged particle beam exposure |
Apr. 4, 1995 |
| 5382802 |
Method of irradiating running strip with energy beams |
Jan. 17, 1995 |
| 5338940 |
Apparatus for ion implantation including contactless cooling and beam current measurement means |
Aug. 16, 1994 |
| 5334846 |
Correction of charged particle beam exposure deflection by detecting stage position and a position detection mark |
Aug. 2, 1994 |
| 5214290 |
Electron beam lithography and workpiece supporting apparatus having supporting means for workpiece stage and moving means detachably mounted to cover opening in vacuum chamber |
May. 25, 1993 |
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