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Class Information
Number: 250/399
Name: Radiant energy > With charged particle beam deflection or focussing > With target means > Secondary emissive type
Description: Subject matter wherein the object irradiated itself gives off invisible radiation as a result of its having been struck by the beam.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8704175 Scanning electron microscope Apr. 22, 2014
8692195 Charged particle radiation device Apr. 8, 2014
8674320 Deconvolution of time-gated cathodoluminescence images Mar. 18, 2014
8653456 Pattern inspection method, pattern inspection program, and electronic device inspection system Feb. 18, 2014
8610093 Direct write lithography system Dec. 17, 2013
8581219 Composite charged-particle-beam apparatus Nov. 12, 2013
8552373 Charged particle beam device and sample observation method Oct. 8, 2013
8546756 System and method for material analysis of a microscopic element Oct. 1, 2013
8461527 Scanning electron microscope and method for processing an image obtained by the scanning electron microscope Jun. 11, 2013
8410415 Ion detector for mass spectrometry, method for detecting ion, and method for manufacturing ion detector Apr. 2, 2013
8294097 Charged particle radiation device Oct. 23, 2012
8183547 Dual beam system May. 22, 2012
8164069 Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device Apr. 24, 2012
8164067 Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen Apr. 24, 2012
8153991 Direct write lithography system Apr. 10, 2012
8143573 Charged particle beam apparatus Mar. 27, 2012
8106357 Scanning electron microscope and method for processing an image obtained by the scanning electron microscope Jan. 31, 2012
8008629 Charged particle beam device and method for inspecting specimen Aug. 30, 2011
7912657 Method and system for providing a compensated auger spectrum Mar. 22, 2011
7910895 Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device Mar. 22, 2011
7884324 Nanopillar arrays for electron emission Feb. 8, 2011
7880147 Components for reducing background noise in a mass spectrometer Feb. 1, 2011
7847268 Three modes particle detector Dec. 7, 2010
7777195 Charged particle beam instrument and method of detecting charged particles Aug. 17, 2010
7755045 Scanning electron microscope Jul. 13, 2010
7723698 Top metal layer shield for ultra-small resonant structures May. 25, 2010
7714288 Charged particle beam apparatus May. 11, 2010
7696488 Irradiating device and method for controlling the same Apr. 13, 2010
7667208 Technique for confining secondary electrons in plasma-based ion implantation Feb. 23, 2010
7655906 Method and apparatus for scanning and measurement by electron beam Feb. 2, 2010
7573045 Plasmon wave propagation devices and methods Aug. 11, 2009
7560693 Electron-beam size measuring apparatus and size measuring method with electron beams Jul. 14, 2009
7557347 Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same Jul. 7, 2009
7521674 Method for trapping uncharged multi-pole particles Apr. 21, 2009
7501625 Electron microscope application apparatus and sample inspection method Mar. 10, 2009
7491933 Electron beam apparatus Feb. 17, 2009
7473909 Use of ion induced luminescence (IIL) as feedback control for ion implantation Jan. 6, 2009
7425708 Secondary electron detector unit for a scanning electron microscope Sep. 16, 2008
7417235 Particle detector for secondary ions and direct and or indirect secondary electrons Aug. 26, 2008
7408154 Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes Aug. 5, 2008
7375329 Scanning electron microscope May. 20, 2008
7368713 Method and apparatus for inspecting semiconductor device May. 6, 2008
7361896 Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscope Apr. 22, 2008
7304320 Charged beam exposure apparatus, charged beam control method and manufacturing method of semiconductor device Dec. 4, 2007
7297966 Utilizing an integrated plasmon detector to measure a metal deposit roughness on a semiconductor surface Nov. 20, 2007
7230243 Method and apparatus for measuring three-dimensional shape of specimen by using SEM Jun. 12, 2007
7176468 Method for charging substrate to a potential Feb. 13, 2007
7161159 Dual beam system Jan. 9, 2007
7071604 Electron source Jul. 4, 2006
7072772 Method and apparatus for modeling mass spectrometer lineshapes Jul. 4, 2006

1 2 3

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