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Class Information
Number: 250/399
Name: Radiant energy > With charged particle beam deflection or focussing > With target means > Secondary emissive type
Description: Subject matter wherein the object irradiated itself gives off invisible radiation as a result of its having been struck by the beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7425708 |
Secondary electron detector unit for a scanning electron microscope |
Sep. 16, 2008 |
| 7417235 |
Particle detector for secondary ions and direct and or indirect secondary electrons |
Aug. 26, 2008 |
| 7408154 |
Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes |
Aug. 5, 2008 |
| 7375329 |
Scanning electron microscope |
May. 20, 2008 |
| 7368713 |
Method and apparatus for inspecting semiconductor device |
May. 6, 2008 |
| 7361896 |
Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscope |
Apr. 22, 2008 |
| 7304320 |
Charged beam exposure apparatus, charged beam control method and manufacturing method of semiconductor device |
Dec. 4, 2007 |
| 7297966 |
Utilizing an integrated plasmon detector to measure a metal deposit roughness on a semiconductor surface |
Nov. 20, 2007 |
| 7230243 |
Method and apparatus for measuring three-dimensional shape of specimen by using SEM |
Jun. 12, 2007 |
| 7176468 |
Method for charging substrate to a potential |
Feb. 13, 2007 |
| 7161159 |
Dual beam system |
Jan. 9, 2007 |
| 7072772 |
Method and apparatus for modeling mass spectrometer lineshapes |
Jul. 4, 2006 |
| 7071604 |
Electron source |
Jul. 4, 2006 |
| 7030388 |
Illuminant, and, electron beam detector, scanning electron microscope and mass spectroscope each including the same |
Apr. 18, 2006 |
| 7030389 |
Electron beam apparatus having electron analyzer and method of controlling lenses |
Apr. 18, 2006 |
| 7009187 |
Particle detector suitable for detecting ions and electrons |
Mar. 7, 2006 |
| 6979822 |
Charged particle beam system |
Dec. 27, 2005 |
| 6949744 |
Electron microscopy system, electron microscopy method and focusing system for charged particles |
Sep. 27, 2005 |
| 6943349 |
Multi beam charged particle device |
Sep. 13, 2005 |
| 6933500 |
Electron microscope |
Aug. 23, 2005 |
| 6888139 |
Electron microscope |
May. 3, 2005 |
| 6861650 |
Electron beam detector, scanning type electron microscope, mass spectrometer, and ion detector |
Mar. 1, 2005 |
| 6855931 |
Scanning electron microscope and sample observation method using the same |
Feb. 15, 2005 |
| 6855926 |
Instrument and method for combined surface topography and spectroscopic analysis |
Feb. 15, 2005 |
| 6815689 |
Mass spectrometry with enhanced particle flux range |
Nov. 9, 2004 |
| 6784426 |
Electron beam irradiation apparatus, electron beam exposure apparatus, and defect detection method |
Aug. 31, 2004 |
| 6784438 |
Electron projection lithography apparatus using secondary electrons |
Aug. 31, 2004 |
| 6770889 |
Method of controlling electrostatic lens and ion implantation apparatus |
Aug. 3, 2004 |
| 6740888 |
Electron beam apparatus |
May. 25, 2004 |
| 6642519 |
Fine pattern inspection apparatus and method and managing apparatus and method of critical dimension scanning electron microscope device |
Nov. 4, 2003 |
| 6586753 |
Electron beam apparatus and electron beam adjusting method |
Jul. 1, 2003 |
| 6542219 |
Optical correction plate, and its application in a lithographic projection apparatus |
Apr. 1, 2003 |
| 6211525 |
Detector devices |
Apr. 3, 2001 |
| 6072178 |
Sample analyzing apparatus |
Jun. 6, 2000 |
| 6031230 |
Reflected electron detector and a scanning electron microscope device using it |
Feb. 29, 2000 |
| 6002128 |
Sample analyzer |
Dec. 14, 1999 |
| 5903004 |
Energy dispersive X-ray analyzer |
May. 11, 1999 |
| 5780913 |
Photoelectric tube using electron beam irradiation diode as anode |
Jul. 14, 1998 |
| 5420433 |
Charged particle beam exposure apparatus |
May. 30, 1995 |
| 5414265 |
Line-width measurements of metallization coated with insulator on microelectronic circuits using energy dispersive x-ray analysis |
May. 9, 1995 |
| 5270544 |
Energy-dispersive X-ray detector |
Dec. 14, 1993 |
| 5138157 |
Neutral particle beam propagation direction determining apparatus and method |
Aug. 11, 1992 |
| 5041712 |
Method for the control of an evaporation process |
Aug. 20, 1991 |
| 5010253 |
Detection system for cathodoluminescence analysis |
Apr. 23, 1991 |
| 4929041 |
Cathodoluminescence system for use in a scanning electron microscope including means for controlling optical fiber aperture |
May. 29, 1990 |
| 4916314 |
Method and apparatus for analyzing components of selected fluid inclusions |
Apr. 10, 1990 |
| 4843246 |
Apparatus for detecting the position of incidence of a beam of charge carriers on a target |
Jun. 27, 1989 |
| 4841143 |
Charged particle beam apparatus |
Jun. 20, 1989 |
| 4803369 |
Purification device for charged particle beam diaphragm |
Feb. 7, 1989 |
| 4746571 |
X-ray detector efficiency standard for electron microscopes |
May. 24, 1988 |
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