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Class Information
Number: 250/398
Name: Radiant energy > With charged particle beam deflection or focussing > With target means
Description: Subject matter having means to hold, position or accommodate an object to be irradiated by the beam, or such an object itself in combination with the lens.

Sub-classes under this class:

Class Number Class Name Patents
250/399 Secondary emissive type 110
250/400 With means to convey or guide the target 118

Patents under this class:

Patent Number Title Of Patent Date Issued
7057193 Exposure apparatus Jun. 6, 2006
7049606 Electron beam treatment apparatus May. 23, 2006
7049610 Charged particle beam exposure method, charged particle beam exposure apparatus, and device manufacturing method May. 23, 2006
7049611 Charged-particle beam lithographic system May. 23, 2006
7038225 Method and apparatus for electron beam processing of substrates May. 2, 2006
7034297 Method and system for use in the monitoring of samples with a charged particle beam Apr. 25, 2006
7034315 Particle source with selectable beam current and energy spread Apr. 25, 2006
7030396 Medical particle irradiation apparatus Apr. 18, 2006
7030398 Laser driven ion accelerator Apr. 18, 2006
7026614 Automatic methods for focus and astigmatism corrections in charged-particle beam instrument Apr. 11, 2006
7026635 Particle beam processing apparatus and materials treatable using the apparatus Apr. 11, 2006
7015481 Charged-particle optical system Mar. 21, 2006
7012267 Particle beam therapy system Mar. 14, 2006
7009187 Particle detector suitable for detecting ions and electrons Mar. 7, 2006
7005789 Method and apparatus for magnetic focusing of off-axis electron beam Feb. 28, 2006
6998606 Electric sector time-of-flight mass spectrometer with adjustable ion optical elements Feb. 14, 2006
6998611 Electron beam apparatus and device manufacturing method using same Feb. 14, 2006
6992289 Method for performing focusing in a particle-optical device with the aid of astigmatism in the particle beam Jan. 31, 2006
6989545 Device and method for measurement of beam angle and divergence Jan. 24, 2006
6984823 Electron microscope and method for controlling focus position thereof Jan. 10, 2006
6984833 Ion implanter and method for controlling the same Jan. 10, 2006
6979822 Charged particle beam system Dec. 27, 2005
6977382 Method for measuring the intensity profile of an electron beam, in particular a beam of an electron-beam machining device, and/or for measuring an optical system for an electron beam and/or fo Dec. 20, 2005
6977383 Method and apparatus for generating a membrane target for laser produced plasma Dec. 20, 2005
6965116 Method of determining dose uniformity of a scanning ion implanter Nov. 15, 2005
6960763 Energy filter and electron microscope Nov. 1, 2005
6956219 MEMS based charged particle deflector design Oct. 18, 2005
6953943 Medical charged particle irradiation apparatus Oct. 11, 2005
6946662 Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method Sep. 20, 2005
6943349 Multi beam charged particle device Sep. 13, 2005
6943351 Multi-column charged particle optics assembly Sep. 13, 2005
6943359 Structured organic materials and devices using low-energy particle beams Sep. 13, 2005
6943360 Twisted-compensated low-energy electron microscope Sep. 13, 2005
6936817 Optical column for charged particle beam device Aug. 30, 2005
6936831 Divided reticles for charged-particle-beam microlithography apparatus, and methods for using same Aug. 30, 2005
6930312 Charged-particle beam instrument and method of correcting aberration therein Aug. 16, 2005
6924494 Method of exposing a target to a charged particle beam Aug. 2, 2005
6917043 Individually addressable cathodes with integrated focusing stack or detectors Jul. 12, 2005
6917045 Electron beam exposure apparatus, electron beam exposure apparatus calibration method, and semiconductor element manufacturing method Jul. 12, 2005
6914249 Particle-optical apparatus, electron microscopy system and electron lithography system Jul. 5, 2005
6911660 Method of measuring ion beam angles Jun. 28, 2005
6909103 Ion irradiation of a target at very high and very low kinetic ion energies Jun. 21, 2005
6906333 Magnetic separator for linear dispersion and method for producing the same Jun. 14, 2005
6906336 Methods for reducing blur and variation in blur in projected images produced by charged-particle-beam microlithography Jun. 14, 2005
6906338 Laser driven ion accelerator Jun. 14, 2005
6903345 Electron optical system, charged-particle beam exposure apparatus using the same, and device manufacturing method Jun. 7, 2005
6903348 Wafer holding apparatus for ion implanting system Jun. 7, 2005
6903351 Charged particle beam irradiation equipment having scanning electromagnet power supplies Jun. 7, 2005
6903352 Charged-particle beam exposure apparatus, charged-particle beam exposure method, control data determination method, and device manufacturing method using this method Jun. 7, 2005
6903356 Medical particle irradiation apparatus Jun. 7, 2005

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