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Class Information
Number: 250/398
Name: Radiant energy > With charged particle beam deflection or focussing > With target means
Description: Subject matter having means to hold, position or accommodate an object to be irradiated by the beam, or such an object itself in combination with the lens.

Sub-classes under this class:

Class Number Class Name Patents
250/399 Secondary emissive type 110
250/400 With means to convey or guide the target 118

Patents under this class:

Patent Number Title Of Patent Date Issued
7453076 Bi-polar treatment facility for treating target cells with both positive and negative ions Nov. 18, 2008
7449690 Inspection method and inspection apparatus using charged particle beam Nov. 11, 2008
7446320 Electronically-variable immersion electrostatic lens Nov. 4, 2008
7439502 Electron beam apparatus and device production method using the electron beam apparatus Oct. 21, 2008
7435956 Apparatus and method for inspection and testing of flat panel display substrates Oct. 14, 2008
7435949 Mass spectrometric analysis method and system using the method Oct. 14, 2008
7427765 Electron beam column for writing shaped electron beams Sep. 23, 2008
7423277 Ion beam monitoring in an ion implanter using an imaging device Sep. 9, 2008
7420179 Electron microscope Sep. 2, 2008
7417242 Method of measuring ion beam position Aug. 26, 2008
7417233 Beam exposure correction system and method Aug. 26, 2008
7408172 Charged particle beam apparatus and charged particle beam irradiation method Aug. 5, 2008
7394082 Ion beam delivery equipment and an ion beam delivery method Jul. 1, 2008
7394071 Micro column electron beam apparatus formed in low temperature co-fired ceramic substrate Jul. 1, 2008
7391037 Apparatus for generating a plurality of beamlets Jun. 24, 2008
7391034 Electron imaging beam with reduced space charge defocusing Jun. 24, 2008
7391033 Skew-oriented multiple electron beam apparatus and method Jun. 24, 2008
7385208 Systems and methods for implant dosage control Jun. 10, 2008
7385202 Divergent charged particle implantation for improved transistor symmetry Jun. 10, 2008
7378668 Method and apparatus for applying charged particle beam May. 27, 2008
7378667 Particle-optical appliance provided with aberration-correcting means May. 27, 2008
7375357 Permanent magnet radiation dose delivery enhancement May. 20, 2008
7372053 Rotating gantry of particle beam therapy system May. 13, 2008
7368738 Advanced pattern definition for particle-beam exposure May. 6, 2008
7365348 Adjusting device of an apparatus for generating a beam of charged particles Apr. 29, 2008
7365346 Ion-implanting apparatus, ion-implanting method, and device manufactured thereby Apr. 29, 2008
7365338 Apparatus for generating a plurality of beamlets Apr. 29, 2008
7361914 Means to establish orientation of ion beam to wafer and correct angle errors Apr. 22, 2008
7358512 Dynamic pattern generator for controllably reflecting charged-particles Apr. 15, 2008
7358510 Ion implanter with variable scan frequency Apr. 15, 2008
7358493 Method and apparatus for automated beam optimization in a scanning electron microscope Apr. 15, 2008
7355188 Technique for uniformity tuning in an ion implanter system Apr. 8, 2008
7355175 Method and apparatus for automatically correcting charged-particle beam and method of controlling aberration corrector for charged-particle beam Apr. 8, 2008
7351988 Beam allocation apparatus and beam allocation method for medical particle accelerators Apr. 1, 2008
7351986 Method and apparatus for reducing cross contamination of species during ion implantation Apr. 1, 2008
7351983 Focused ion beam system Apr. 1, 2008
7348580 Particle beam processing apparatus and materials treatable using the apparatus Mar. 25, 2008
7348567 Apparatus for generating a plurality of beamlets Mar. 25, 2008
7345436 Apparatus and method for controlling the beam current of a charged particle beam Mar. 18, 2008
7345292 Particle beam therapy system Mar. 18, 2008
7342241 Method and apparatus for electron-beam lithography Mar. 11, 2008
7342240 Ion beam current monitoring Mar. 11, 2008
7332730 Device and method for imaging a multiple particle beam on a substrate Feb. 19, 2008
7323700 Method and system for controlling beam scanning in an ion implantation device Jan. 29, 2008
7319231 Particle beam therapy system Jan. 15, 2008
7315035 Apparatus and method for doping Jan. 1, 2008
7315029 Electrostatic deflection system with low aberrations and vertical beam incidence Jan. 1, 2008
7282727 Electron beam directed energy device and methods of using same Oct. 16, 2007
7282722 Charged particle beam apparatus and charged particle beam irradiation method Oct. 16, 2007
7282709 Charged particle beam detection system Oct. 16, 2007

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