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Class Information
Number: 250/398
Name: Radiant energy > With charged particle beam deflection or focussing > With target means
Description: Subject matter having means to hold, position or accommodate an object to be irradiated by the beam, or such an object itself in combination with the lens.










Sub-classes under this class:

Class Number Class Name Patents
250/399 Secondary emissive type 110
250/400 With means to convey or guide the target 118


Patents under this class:

Patent Number Title Of Patent Date Issued
7592604 Charged particle beam apparatus Sep. 22, 2009
7592590 Charged particle beam device with detection unit switch and method of operation thereof Sep. 22, 2009
7582886 Gantry for medical particle therapy facility Sep. 1, 2009
7579604 Beam stop and beam tuning methods Aug. 25, 2009
7576340 Focused ion beam processing method Aug. 18, 2009
7576339 Ion implantation apparatus and method for obtaining non-uniform ion implantation energy Aug. 18, 2009
7569841 Deflection signal compensation for charged particle beam Aug. 4, 2009
7566882 Reflection lithography using rotating platter Jul. 28, 2009
7560715 System for the delivery of proton therapy Jul. 14, 2009
7560196 Mask for exposing an alignment mark, and method and computer program for designing the mask Jul. 14, 2009
7557357 D/A conversion device and method and charged particle beam exposure apparatus and method Jul. 7, 2009
7554106 Partial ion implantation apparatus and method using bundled beam Jun. 30, 2009
7550750 Method and apparatus for processing a micro sample Jun. 23, 2009
7550741 Inertial electrostatic confinement fusion Jun. 23, 2009
7547899 Charged beam dump and particle attractor Jun. 16, 2009
7547898 Particulate prevention in ion implantation Jun. 16, 2009
7544958 Contamination reduction during ion implantation Jun. 9, 2009
7544957 Non-uniform ion implantation Jun. 9, 2009
7541601 Ion beam irradiating apparatus and method of adjusting uniformity of a beam Jun. 2, 2009
7531799 Charged particle beam column May. 12, 2009
7528393 Charged particle beam processing apparatus May. 5, 2009
7528392 Techniques for low-temperature ion implantation May. 5, 2009
7528391 Techniques for reducing contamination during ion implantation May. 5, 2009
7521699 Apparatus and method for doping Apr. 21, 2009
7521692 TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam appara Apr. 21, 2009
7521688 Charged-particle beam instrument Apr. 21, 2009
7521674 Method for trapping uncharged multi-pole particles Apr. 21, 2009
7518130 Ion beam blocking component and ion beam blocking device having the same Apr. 14, 2009
7518121 Method for determining lens errors in a particle-optical device Apr. 14, 2009
7511288 Ion implantation device Mar. 31, 2009
7507956 Charged particle beam energy width reduction system for charged particle beam system Mar. 24, 2009
7504624 Charged particle beam device Mar. 17, 2009
7501644 Apparatus and method for controlled particle beam manufacturing Mar. 10, 2009
7501638 Charged particle beam emitting device and method for operating a charged particle beam emitting device Mar. 10, 2009
7501625 Electron microscope application apparatus and sample inspection method Mar. 10, 2009
7495245 Apparatus and method for controlled particle beam manufacturing Feb. 24, 2009
7495244 Apparatus and method for controlled particle beam manufacturing Feb. 24, 2009
7495242 Apparatus and method for controlled particle beam manufacturing Feb. 24, 2009
7491933 Electron beam apparatus Feb. 17, 2009
7488961 Charged particle beam irradiation method and charged particle beam apparatus Feb. 10, 2009
7488960 Apparatus and method for controlled particle beam manufacturing Feb. 10, 2009
7485880 Charged particle beam scan and irradiation method, charged particle beam apparatus, workpiece observation method and workpiece processing method Feb. 3, 2009
7485879 Electron beam writing apparatus and writing method Feb. 3, 2009
7485874 Apparatus for manufacturing semiconductor substrates Feb. 3, 2009
7482587 Circular silicon substrates with thin film membranes for electron microscopy Jan. 27, 2009
7479644 Ion beam diagnostics Jan. 20, 2009
7473909 Use of ion induced luminescence (IIL) as feedback control for ion implantation Jan. 6, 2009
7465944 Charged particle therapy apparatus and charged particle therapy system Dec. 16, 2008
7459681 Scanning electron microscope Dec. 2, 2008
7456415 Charged particle beam extraction system and method Nov. 25, 2008











 
 
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