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Class Information
Number: 250/398
Name: Radiant energy > With charged particle beam deflection or focussing > With target means
Description: Subject matter having means to hold, position or accommodate an object to be irradiated by the beam, or such an object itself in combination with the lens.

Sub-classes under this class:

Class Number Class Name Patents
250/399 Secondary emissive type 110
250/400 With means to convey or guide the target 118

Patents under this class:

Patent Number Title Of Patent Date Issued
7847268 Three modes particle detector Dec. 7, 2010
7842920 Methods and systems of performing device failure analysis, electrical characterization and physical characterization Nov. 30, 2010
7838830 Charged particle beam apparatus and method for operating a charged particle beam apparatus Nov. 23, 2010
7834336 Treatment of patient tumors by charged particle therapy Nov. 16, 2010
7829865 Electrostatic deflector Nov. 9, 2010
7829156 Method and apparatus for producing biaxially oriented thin films Nov. 9, 2010
7820987 Predicting dose repeatability in an ion implantation Oct. 26, 2010
7807978 Divergent charged particle implantation for improved transistor symmetry Oct. 5, 2010
7800075 Multi-function module for an electron beam column Sep. 21, 2010
7795597 Deflector array, exposure apparatus, and device manufacturing method Sep. 14, 2010
7791049 Ion implantation apparatus Sep. 7, 2010
7777205 Electron beam lithography system Aug. 17, 2010
7777201 Method for maskless particle-beam exposure Aug. 17, 2010
7777195 Charged particle beam instrument and method of detecting charged particles Aug. 17, 2010
7767986 Method and apparatus for controlling beam current uniformity in an ion implanter Aug. 3, 2010
7763867 Particle therapy system, method and device for requesting a particle beam Jul. 27, 2010
7763851 Particle-beam apparatus with improved wien-type filter Jul. 27, 2010
7759659 Charged particle beam writing method Jul. 20, 2010
7759653 Electron beam apparatus Jul. 20, 2010
7755066 Techniques for improved uniformity tuning in an ion implanter system Jul. 13, 2010
7750311 Positron emission detectors and configurations Jul. 6, 2010
7723683 Aberration correction system May. 25, 2010
7709818 Particle beam irradiation apparatus and particle beam irradiation method May. 4, 2010
7705328 Broad ribbon beam ion implanter architecture with high mass-energy capability Apr. 27, 2010
7705322 Charged-particle beam writing method Apr. 27, 2010
7705321 Charged particle beam writing apparatus and method Apr. 27, 2010
7700930 Lithographic apparatus with rotation filter device Apr. 20, 2010
7696494 Beam angle adjustment in ion implanters Apr. 13, 2010
7696488 Irradiating device and method for controlling the same Apr. 13, 2010
7692144 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Apr. 6, 2010
7683320 Transmission electron microscope Mar. 23, 2010
7675050 Apparatus and method for ion beam implantation using ribbon and spot beams Mar. 9, 2010
7675048 Wafer holding robot end effecter vertical position determination in ion implanter system Mar. 9, 2010
7675047 Technique for shaping a ribbon-shaped ion beam Mar. 9, 2010
7671333 Apparatus for observing a sample with a particle beam and an optical microscope Mar. 2, 2010
7663125 Ion beam current uniformity monitor, ion implanter and related method Feb. 16, 2010
7659521 System for taking wide-field beam-eye-view (BEV) x-ray-images simultaneously to the proton therapy delivery Feb. 9, 2010
7659507 Automatic method of axial adjustments in electron beam system Feb. 9, 2010
7655905 Charged particle beam equipment Feb. 2, 2010
7652270 Techniques for ion beam current measurement using a scanning beam current transformer Jan. 26, 2010
7642521 Laser irradiated hollow cylinder serving as a lens for ion beams Jan. 5, 2010
7638782 Semiconductor device manufacturing method and ion implanter used therein Dec. 29, 2009
7626180 Charged particle beam apparatus, method for controlling charged particle, and frequency adjustment apparatus Dec. 1, 2009
7612351 Ion implanter with function of compensating wafer cut angle and ion implantation method using the same Nov. 3, 2009
7612334 Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same Nov. 3, 2009
7608838 Electron optical component Oct. 27, 2009
7605383 Pattern writing apparatus using charged particle beam, and program-recorded readable recording medium Oct. 20, 2009
7598504 Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus Oct. 6, 2009
7598499 Charged-particle exposure apparatus Oct. 6, 2009
7598498 Electric field lens and ion implanter having the same Oct. 6, 2009

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