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Class Information
Number: 250/398
Name: Radiant energy > With charged particle beam deflection or focussing > With target means
Description: Subject matter having means to hold, position or accommodate an object to be irradiated by the beam, or such an object itself in combination with the lens.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7078714 |
Ion implanting apparatus |
Jul. 18, 2006 |
| 7075092 |
Charged particle beam microscope with minicolumn |
Jul. 11, 2006 |
| 7067820 |
Particle-optical apparatus with a permanent-magnetic lens and an electrostatic lens |
Jun. 27, 2006 |
| 7067807 |
Charged particle beam column and method of its operation |
Jun. 27, 2006 |
| 7057193 |
Exposure apparatus |
Jun. 6, 2006 |
| 7049611 |
Charged-particle beam lithographic system |
May. 23, 2006 |
| 7049610 |
Charged particle beam exposure method, charged particle beam exposure apparatus, and device manufacturing method |
May. 23, 2006 |
| 7049606 |
Electron beam treatment apparatus |
May. 23, 2006 |
| 7038225 |
Method and apparatus for electron beam processing of substrates |
May. 2, 2006 |
| 7034315 |
Particle source with selectable beam current and energy spread |
Apr. 25, 2006 |
| 7034297 |
Method and system for use in the monitoring of samples with a charged particle beam |
Apr. 25, 2006 |
| 7030396 |
Medical particle irradiation apparatus |
Apr. 18, 2006 |
| 7030398 |
Laser driven ion accelerator |
Apr. 18, 2006 |
| 7026614 |
Automatic methods for focus and astigmatism corrections in charged-particle beam instrument |
Apr. 11, 2006 |
| 7026635 |
Particle beam processing apparatus and materials treatable using the apparatus |
Apr. 11, 2006 |
| 7015481 |
Charged-particle optical system |
Mar. 21, 2006 |
| 7012267 |
Particle beam therapy system |
Mar. 14, 2006 |
| 7009187 |
Particle detector suitable for detecting ions and electrons |
Mar. 7, 2006 |
| 7005789 |
Method and apparatus for magnetic focusing of off-axis electron beam |
Feb. 28, 2006 |
| 6998606 |
Electric sector time-of-flight mass spectrometer with adjustable ion optical elements |
Feb. 14, 2006 |
| 6998611 |
Electron beam apparatus and device manufacturing method using same |
Feb. 14, 2006 |
| 6992289 |
Method for performing focusing in a particle-optical device with the aid of astigmatism in the particle beam |
Jan. 31, 2006 |
| 6989545 |
Device and method for measurement of beam angle and divergence |
Jan. 24, 2006 |
| 6984833 |
Ion implanter and method for controlling the same |
Jan. 10, 2006 |
| 6984823 |
Electron microscope and method for controlling focus position thereof |
Jan. 10, 2006 |
| 6979822 |
Charged particle beam system |
Dec. 27, 2005 |
| 6977383 |
Method and apparatus for generating a membrane target for laser produced plasma |
Dec. 20, 2005 |
| 6977382 |
Method for measuring the intensity profile of an electron beam, in particular a beam of an electron-beam machining device, and/or for measuring an optical system for an electron beam and/or fo |
Dec. 20, 2005 |
| 6965116 |
Method of determining dose uniformity of a scanning ion implanter |
Nov. 15, 2005 |
| 6960763 |
Energy filter and electron microscope |
Nov. 1, 2005 |
| 6956219 |
MEMS based charged particle deflector design |
Oct. 18, 2005 |
| 6953943 |
Medical charged particle irradiation apparatus |
Oct. 11, 2005 |
| 6946662 |
Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method |
Sep. 20, 2005 |
| 6943360 |
Twisted-compensated low-energy electron microscope |
Sep. 13, 2005 |
| 6943351 |
Multi-column charged particle optics assembly |
Sep. 13, 2005 |
| 6943349 |
Multi beam charged particle device |
Sep. 13, 2005 |
| 6943359 |
Structured organic materials and devices using low-energy particle beams |
Sep. 13, 2005 |
| 6936817 |
Optical column for charged particle beam device |
Aug. 30, 2005 |
| 6936831 |
Divided reticles for charged-particle-beam microlithography apparatus, and methods for using same |
Aug. 30, 2005 |
| 6930312 |
Charged-particle beam instrument and method of correcting aberration therein |
Aug. 16, 2005 |
| 6924494 |
Method of exposing a target to a charged particle beam |
Aug. 2, 2005 |
| 6917043 |
Individually addressable cathodes with integrated focusing stack or detectors |
Jul. 12, 2005 |
| 6917045 |
Electron beam exposure apparatus, electron beam exposure apparatus calibration method, and semiconductor element manufacturing method |
Jul. 12, 2005 |
| 6914249 |
Particle-optical apparatus, electron microscopy system and electron lithography system |
Jul. 5, 2005 |
| 6911660 |
Method of measuring ion beam angles |
Jun. 28, 2005 |
| 6909103 |
Ion irradiation of a target at very high and very low kinetic ion energies |
Jun. 21, 2005 |
| 6906333 |
Magnetic separator for linear dispersion and method for producing the same |
Jun. 14, 2005 |
| 6906336 |
Methods for reducing blur and variation in blur in projected images produced by charged-particle-beam microlithography |
Jun. 14, 2005 |
| 6906338 |
Laser driven ion accelerator |
Jun. 14, 2005 |
| 6903345 |
Electron optical system, charged-particle beam exposure apparatus using the same, and device manufacturing method |
Jun. 7, 2005 |
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