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Class Information
Number: 250/398
Name: Radiant energy > With charged particle beam deflection or focussing > With target means
Description: Subject matter having means to hold, position or accommodate an object to be irradiated by the beam, or such an object itself in combination with the lens.

Sub-classes under this class:

Class Number Class Name Patents
250/399 Secondary emissive type 110
250/400 With means to convey or guide the target 118

Patents under this class:

Patent Number Title Of Patent Date Issued
8129693 Charged particle beam column and method of operating same Mar. 6, 2012
8115183 Method for maskless particle-beam exposure Feb. 14, 2012
8106358 Layered scanning charged particle microscope with differential pumping aperture Jan. 31, 2012
8101928 Deflection signal compensation for charged particle beam Jan. 24, 2012
8101920 Spin isolation apparatus, spin asymmetric material producing method, current source, and signal processing method Jan. 24, 2012
8101911 Method and device for improved alignment of a high brightness charged particle gun Jan. 24, 2012
8093564 Ion beam focusing lens method and apparatus used in conjunction with a charged particle cancer therapy system Jan. 10, 2012
8089056 Projection lens arrangement Jan. 3, 2012
8076649 Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam Dec. 13, 2011
8058631 Semiconductor manufacturing apparatus Nov. 15, 2011
8053746 Irradiation device Nov. 8, 2011
8053725 Beam quality in FIB systems Nov. 8, 2011
8044374 Ion implantation apparatus Oct. 25, 2011
8039813 Charged particle-optical systems, methods and components Oct. 18, 2011
8030626 Apparatus and method for charged-particle beam writing Oct. 4, 2011
8030625 Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium Oct. 4, 2011
8008639 System for processing an object Aug. 30, 2011
8003958 Apparatus and method for doping Aug. 23, 2011
8003952 Integrated deflectors for beam alignment and blanking in charged particle columns Aug. 23, 2011
7994488 Low contamination, low energy beamline architecture for high current ion implantation Aug. 9, 2011
7989777 Method for inspecting settling time of deflection amplifier, and method for judging failure of deflection amplifier Aug. 2, 2011
7982194 Single nanoparticle tracking spectroscopic microscope Jul. 19, 2011
7982192 Beam processing apparatus Jul. 19, 2011
7974804 Registration detection system Jul. 5, 2011
7960697 Electron beam apparatus Jun. 14, 2011
7952083 Ion beam system and machining method May. 31, 2011
7935947 Glass composition for ultraviolet light and optical device using the same May. 3, 2011
7935946 Ion implantation method and apparatus May. 3, 2011
7935945 Ion implantation method and apparatus May. 3, 2011
7928414 Charged particle beam writing apparatus and charged particle beam writing method Apr. 19, 2011
7928405 Magnetic lens assembly Apr. 19, 2011
7928404 Variable-ratio double-deflection beam blanker Apr. 19, 2011
7928383 Charged particle system including segmented detection elements Apr. 19, 2011
7923699 Tracking control method and electron beam writing system Apr. 12, 2011
7906761 Charged particle beam apparatus Mar. 15, 2011
7902527 Apparatus and methods for ion beam implantation using ribbon and spot beams Mar. 8, 2011
7902521 Method for focusing electron beam in electron column Mar. 8, 2011
7897942 Dynamic tracking of wafer motion and distortion during lithography Mar. 1, 2011
RE42111 Multideflector Feb. 8, 2011
7884334 Charged particle beam imaging method and system thereof Feb. 8, 2011
7875868 Charged particle beam irradiation system Jan. 25, 2011
7875860 Charged particle beam profile measurement Jan. 25, 2011
7875857 X-ray photoelectron spectroscopy analysis system for surface analysis and method therefor Jan. 25, 2011
7872241 Method and apparatus for production and maintenance of electron beam space-charge neutralization Jan. 18, 2011
7872232 Electronic microscope apparatus Jan. 18, 2011
7868301 Deflecting a beam of electrically charged particles onto a curved particle path Jan. 11, 2011
7868300 Lithography system, sensor and measuring method Jan. 11, 2011
7863564 Electric charged particle beam microscope and microscopy Jan. 4, 2011
7855361 Detection of positive and negative ions Dec. 21, 2010
7851767 Beam control assembly for ribbon beam of ions for ion implantation Dec. 14, 2010

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