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Class Information
Number: 250/398
Name: Radiant energy > With charged particle beam deflection or focussing > With target means
Description: Subject matter having means to hold, position or accommodate an object to be irradiated by the beam, or such an object itself in combination with the lens.

Sub-classes under this class:

Class Number Class Name Patents
250/399 Secondary emissive type 110
250/400 With means to convey or guide the target 118

Patents under this class:

Patent Number Title Of Patent Date Issued
8445869 Projection lens arrangement May. 21, 2013
8445846 Beam optical component having a charged particle lens May. 21, 2013
RE44179 Charged particle beam writing method Apr. 30, 2013
8431914 Method and system for manufacturing a surface using charged particle beam lithography with variable beam blur Apr. 30, 2013
8431908 Charged particle beam writing apparatus and charged particle beam writing method Apr. 30, 2013
8426833 Gantry for medical particle therapy facility Apr. 23, 2013
8426811 Electron microscope Apr. 23, 2013
8426810 Method of planar imaging on semiconductor chips using focused ion beam Apr. 23, 2013
8421031 Particle beam therapy system Apr. 16, 2013
8410438 Charged particle beam device Apr. 2, 2013
8405043 Charged particle extraction device and method of design there for Mar. 26, 2013
8399851 Systems and methods for scanning a beam of charged particles Mar. 19, 2013
8389949 Particle beam therapy system and adjustment method for particle beam therapy system Mar. 5, 2013
8378318 Fixed mask design improvements Feb. 19, 2013
8378313 Uniformity of a scanned ion beam Feb. 19, 2013
8373144 Quasi-annular reflective electron patterning device Feb. 12, 2013
8373136 Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator Feb. 12, 2013
8368015 Particle-optical system Feb. 5, 2013
8362441 Enhanced integrity projection lens assembly Jan. 29, 2013
8357895 Defect inspection apparatus, defect inspection method, and semiconductor device manufacturing method Jan. 22, 2013
8344336 Apparatus and method for doping Jan. 1, 2013
8330103 Charged particle beam apparatus and specimen inspection method Dec. 11, 2012
8314410 Combination laser and charged particle beam system Nov. 20, 2012
8314358 Thermal material-processing method Nov. 20, 2012
8309939 Particle beam treatment apparatus and particle beam treatment method Nov. 13, 2012
8309938 Ion beam incident angle detection assembly and method Nov. 13, 2012
8304750 Scanning charged particle beams Nov. 6, 2012
8304749 Charged-particle exposure apparatus with electrostatic zone plate Nov. 6, 2012
8294125 High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture Oct. 23, 2012
8269189 Methods and systems for increasing the energy of positive ions accelerated by high-power lasers Sep. 18, 2012
8263943 Ion beam device Sep. 11, 2012
8258484 Beamlet blanker arrangement Sep. 4, 2012
8253118 Charged particle beam system having multiple user-selectable operating modes Aug. 28, 2012
8242458 Irradiation system and irradiation method Aug. 14, 2012
8237136 Method and system for tilting a substrate during gas cluster ion beam processing Aug. 7, 2012
8237118 Partial ovoidal FAIMS electrode Aug. 7, 2012
8222621 Method for maskless particle-beam exposure Jul. 17, 2012
8222613 Scanning irradiation device of charged particle beam Jul. 17, 2012
8183545 Charged particle beam writing apparatus, charged particle beam writing method and apparatus of processing data for charged particle beam writing May. 22, 2012
8183543 Multi-beam source May. 22, 2012
8173981 Gantry for medical particle therapy facility May. 8, 2012
8173979 Generating and visualizing an ion beam profile May. 8, 2012
8168962 Method and apparatus for uniformly implanting a wafer with an ion beam May. 1, 2012
8164070 Collimator magnet for ion implantation system Apr. 24, 2012
8164068 Mask health monitor using a faraday probe Apr. 24, 2012
8164066 Magnetic lens, method for focusing charged particles and charged particle energy analyzer Apr. 24, 2012
8153965 Apparatus and method for merging a low energy electron flow into a high energy electron flow Apr. 10, 2012
8148702 Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns Apr. 3, 2012
8143603 Electrostatic latent image measuring device Mar. 27, 2012
8143588 Deflector array, exposure apparatus, and device manufacturing method Mar. 27, 2012

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