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Class Information
Number: 250/398
Name: Radiant energy > With charged particle beam deflection or focussing > With target means
Description: Subject matter having means to hold, position or accommodate an object to be irradiated by the beam, or such an object itself in combination with the lens.










Sub-classes under this class:

Class Number Class Name Patents
250/399 Secondary emissive type 110
250/400 With means to convey or guide the target 118


Patents under this class:
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Patent Number Title Of Patent Date Issued
4924104 Ion beam apparatus and method of modifying substrate May. 8, 1990
4922106 Ion beam scanning method and apparatus May. 1, 1990
4918316 Method of and apparatus for irradiating large surfaces with ions Apr. 17, 1990
4918318 Electronic optics device with variable illumination and aperture limitation, and application thereof to an electron beam lithographic system Apr. 17, 1990
4916311 Ion beaming irradiating apparatus including ion neutralizer Apr. 10, 1990
4914305 Uniform cross section ion beam system Apr. 3, 1990
4912327 Pulsed microfocused ion beams Mar. 27, 1990
4897552 Multi-electron-beam pattern drawing apparatus Jan. 30, 1990
4894549 Apparatus for demagnification or full-size ion projection lithography Jan. 16, 1990
4891524 Charged particle beam exposure system and method of compensating for eddy current effect on charged particle beam Jan. 2, 1990
4886971 Ion beam irradiating apparatus including ion neutralizer Dec. 12, 1989
4871919 Electron beam lithography alignment using electric field changes to achieve registration Oct. 3, 1989
4870286 Electron beam direct drawing device Sep. 26, 1989
4870287 Multi-station proton beam therapy system Sep. 26, 1989
4868395 Electron beam lithography system for delineating a desired pattern on a target by means of electron beams Sep. 19, 1989
4859856 Telecentric sub-field deflection with vail Aug. 22, 1989
4859857 Ion-projection apparatus and method of operating same Aug. 22, 1989
4855596 Photo ion spectrometer Aug. 8, 1989
4855602 Beam deflector Aug. 8, 1989
4853545 Particle beam apparatus for low-error imaging of line-shaped subjects Aug. 1, 1989
4851693 Compensated scan wave form generator for ion implantation equipment Jul. 25, 1989
4849641 Real time non-destructive dose monitor Jul. 18, 1989
4845370 Magnetic field former for charged particle beams Jul. 4, 1989
4839520 Production of pulsed electron beams Jun. 13, 1989
4837447 Rasterization system for converting polygonal pattern data into a bit-map Jun. 6, 1989
4835392 Ion-projection apparatus May. 30, 1989
4831270 Ion implantation apparatus May. 16, 1989
4827127 Apparatus using charged particle beam May. 2, 1989
4827137 Soft vacuum electron beam patterning apparatus and process May. 2, 1989
4823013 Charged particles exposure apparatus having an optically deformable beam bounding diaphragm Apr. 18, 1989
4818885 Electron beam writing method and system using large range deflection in combination with a continuously moving table Apr. 4, 1989
4816693 Apparatus and method for uniform ion dose control Mar. 28, 1989
4812658 Beam Redirecting Mar. 14, 1989
4812661 Method and apparatus for hybrid I.C. lithography Mar. 14, 1989
4804851 Charged particle sources Feb. 14, 1989
4804852 Treating work pieces with electro-magnetically scanned ion beams Feb. 14, 1989
4798959 Super submicron electron beam writer Jan. 17, 1989
4794305 Substrate support structure for ion implantation device Dec. 27, 1988
4791301 Device for the input of a nominal value for the impact point of an electron beam on a medium Dec. 13, 1988
4789945 Method and apparatus for charged particle beam exposure Dec. 6, 1988
4786814 Method of reducing electrostatic charge on ion-implanted devices Nov. 22, 1988
4785188 Primary particle beam irradiation apparatus and method of irradiation thereof Nov. 15, 1988
4783597 Ion implant apparatus Nov. 8, 1988
4777369 Electron beam lithographic method Oct. 11, 1988
4775789 Method and apparatus for producing neutral atomic and molecular beams Oct. 4, 1988
4775790 Transmission electron microscope Oct. 4, 1988
4767930 Method and apparatus for enlarging a charged particle beam Aug. 30, 1988
4766320 Apparatus for ion implantation Aug. 23, 1988
4763005 Rotating field electron beam apparatus and method Aug. 9, 1988
4761559 Ion beam implantation display method and apparatus Aug. 2, 1988

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