Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Electrical & Energy
Class Information
Number: 250/398
Name: Radiant energy > With charged particle beam deflection or focussing > With target means
Description: Subject matter having means to hold, position or accommodate an object to be irradiated by the beam, or such an object itself in combination with the lens.










Sub-classes under this class:

Class Number Class Name Patents
250/399 Secondary emissive type 110
250/400 With means to convey or guide the target 118


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Next

Patent Number Title Of Patent Date Issued
5384463 Pattern inspection apparatus and electron beam apparatus Jan. 24, 1995
5384465 Spectrum analyzer in an ion implanter Jan. 24, 1995
5384466 Electron beam lithography apparatus and a method thereof Jan. 24, 1995
5378899 Ion implantation target charge control system Jan. 3, 1995
5378917 Particle-beam imaging system Jan. 3, 1995
5376802 Stencil mask and charge particle beam exposure method and apparatus using the stencil mask Dec. 27, 1994
5373164 Ion beam conical scanning system Dec. 13, 1994
5371373 Electron beam lithography method and apparatus separating repetitive and non-repetitive pattern data Dec. 6, 1994
5369282 Electron beam exposure method and system for exposing a pattern on a substrate with an improved accuracy and throughput Nov. 29, 1994
5363021 Massively parallel array cathode Nov. 8, 1994
5350924 Ion-optical imaging system Sep. 27, 1994
5350926 Compact high current broad beam ion implanter Sep. 27, 1994
5349198 Beam supply device Sep. 20, 1994
5345085 Method and structure for electronically measuring beam parameters Sep. 6, 1994
5343047 Ion implantation system Aug. 30, 1994
5336892 Method and system for electron beam lithography Aug. 9, 1994
5331172 Ionized metal cluster beam systems and methods Jul. 19, 1994
5326979 Electron beam lithography system Jul. 5, 1994
5315119 Electron beam irradiating apparatus and electric signal detecting apparatus May. 24, 1994
5313067 Ion processing apparatus including plasma ion source and mass spectrometer for ion deposition, ion implantation, or isotope separation May. 17, 1994
5313068 Partitioning method for E-beam lithography May. 17, 1994
5311026 Charged particle beam lithography system and method therefor May. 10, 1994
5311028 System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions May. 10, 1994
5306922 Production of high beam currents at low energies for use in ion implantation systems Apr. 26, 1994
5304811 Lithography system using charged-particle beam and method of using the same Apr. 19, 1994
5305225 Charged particle litography method and apparatus Apr. 19, 1994
5293045 Electrostatic lens Mar. 8, 1994
5293508 Ion implanter and controlling method therefor Mar. 8, 1994
5289010 Ion purification for plasma ion implantation Feb. 22, 1994
5286978 Method of removing electric charge accumulated on a semiconductor substrate in ion implantation Feb. 15, 1994
5278419 Electron beam exposure process for writing a pattern on an object by an electron beam with a compensation of the proximity effect Jan. 11, 1994
5278420 Scanning control system involved in an ion-implantation apparatus Jan. 11, 1994
5278421 Pattern fabrication method using a charged particle beam and apparatus for realizing same Jan. 11, 1994
5276331 Electron beam exposure system Jan. 4, 1994
5276334 Charged particle beam exposure method and apparatus Jan. 4, 1994
5268579 Monopole magnetic lens field Dec. 7, 1993
5264707 Ion implantation method Nov. 23, 1993
5262902 Filter for a low-pressure mercury vapor lamp Nov. 16, 1993
5260579 Charged particle beam exposure system and charged particle beam exposure method Nov. 9, 1993
5260581 Method of treatment room selection verification in a radiation beam therapy system Nov. 9, 1993
5254417 Reflection mask and electrically charged beam exposing apparatus using the reflection mask Oct. 19, 1993
5250812 Electron beam lithography using an aperture having an array of repeated unit patterns Oct. 5, 1993
5233196 Electron beam apparatus and method for driving the same Aug. 3, 1993
5229320 Method for forming quantum dots Jul. 20, 1993
5229615 End station for a parallel beam ion implanter Jul. 20, 1993
5225676 Electrooptical viewing apparatus capable of switching depth of focus Jul. 6, 1993
5225684 Charged particle beam exposure apparatus control system and a method of operation for providing a drawing start signal Jul. 6, 1993
5223719 Mask for use in a charged particle beam apparatus including beam passing sections Jun. 29, 1993
5221844 Charged particle beam device Jun. 22, 1993
5216253 Ion implantation apparatus with variable width slits providing an ion beam of high purity Jun. 1, 1993

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Next










 
 
  Recently Added Patents
Handheld electronic device with text disambiguation employing advanced editing feature
Method and system to generate finite state grammars using sample phrases
Antibodies to Clostridium difficile toxins
Electronic component and a system and method for producing an electronic component
Process of preparing functionalized polymers via enzymatic catalysis
Low power voltage controlled oscillator (VCO)
Multi-protocol data transfers
  Randomly Featured Patents
Semiconductor device and method of fabricating the same
Polarization-rotation modulated, spread polarization-rotation, wide-bandwidth radio-wave communications system
Method to manufacture a coreless packaging substrate
Process for manufacturing devices carrying at least one active material by deposition of a low-melting alloy
Teether
Method for producing implant structures for contacting or electrostimulation of living tissue cells or nerves
Protective end cap for tube end
Memory Access apparatus
Low power LCD with gray shade driving scheme
5,5'-/(1,3-propanediyl) bis-/imino(2-oxo-2,1-ethanediyl)acetylimino/bis(2,4,6-triiodo-1,3-benzen edicarboxylamides), and contrast media containing them