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Class Information
Number: 250/398
Name: Radiant energy > With charged particle beam deflection or focussing > With target means
Description: Subject matter having means to hold, position or accommodate an object to be irradiated by the beam, or such an object itself in combination with the lens.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459681 |
Scanning electron microscope |
Dec. 2, 2008 |
| 7456415 |
Charged particle beam extraction system and method |
Nov. 25, 2008 |
| 7453076 |
Bi-polar treatment facility for treating target cells with both positive and negative ions |
Nov. 18, 2008 |
| 7449690 |
Inspection method and inspection apparatus using charged particle beam |
Nov. 11, 2008 |
| 7446320 |
Electronically-variable immersion electrostatic lens |
Nov. 4, 2008 |
| 7439502 |
Electron beam apparatus and device production method using the electron beam apparatus |
Oct. 21, 2008 |
| 7435956 |
Apparatus and method for inspection and testing of flat panel display substrates |
Oct. 14, 2008 |
| 7435949 |
Mass spectrometric analysis method and system using the method |
Oct. 14, 2008 |
| 7427765 |
Electron beam column for writing shaped electron beams |
Sep. 23, 2008 |
| 7423277 |
Ion beam monitoring in an ion implanter using an imaging device |
Sep. 9, 2008 |
| 7420179 |
Electron microscope |
Sep. 2, 2008 |
| 7417233 |
Beam exposure correction system and method |
Aug. 26, 2008 |
| 7417242 |
Method of measuring ion beam position |
Aug. 26, 2008 |
| 7408172 |
Charged particle beam apparatus and charged particle beam irradiation method |
Aug. 5, 2008 |
| 7394071 |
Micro column electron beam apparatus formed in low temperature co-fired ceramic substrate |
Jul. 1, 2008 |
| 7394082 |
Ion beam delivery equipment and an ion beam delivery method |
Jul. 1, 2008 |
| 7391033 |
Skew-oriented multiple electron beam apparatus and method |
Jun. 24, 2008 |
| 7391034 |
Electron imaging beam with reduced space charge defocusing |
Jun. 24, 2008 |
| 7391037 |
Apparatus for generating a plurality of beamlets |
Jun. 24, 2008 |
| 7385202 |
Divergent charged particle implantation for improved transistor symmetry |
Jun. 10, 2008 |
| 7385208 |
Systems and methods for implant dosage control |
Jun. 10, 2008 |
| 7378668 |
Method and apparatus for applying charged particle beam |
May. 27, 2008 |
| 7378667 |
Particle-optical appliance provided with aberration-correcting means |
May. 27, 2008 |
| 7375357 |
Permanent magnet radiation dose delivery enhancement |
May. 20, 2008 |
| 7372053 |
Rotating gantry of particle beam therapy system |
May. 13, 2008 |
| 7368738 |
Advanced pattern definition for particle-beam exposure |
May. 6, 2008 |
| 7365338 |
Apparatus for generating a plurality of beamlets |
Apr. 29, 2008 |
| 7365346 |
Ion-implanting apparatus, ion-implanting method, and device manufactured thereby |
Apr. 29, 2008 |
| 7365348 |
Adjusting device of an apparatus for generating a beam of charged particles |
Apr. 29, 2008 |
| 7361914 |
Means to establish orientation of ion beam to wafer and correct angle errors |
Apr. 22, 2008 |
| 7358510 |
Ion implanter with variable scan frequency |
Apr. 15, 2008 |
| 7358493 |
Method and apparatus for automated beam optimization in a scanning electron microscope |
Apr. 15, 2008 |
| 7358512 |
Dynamic pattern generator for controllably reflecting charged-particles |
Apr. 15, 2008 |
| 7355175 |
Method and apparatus for automatically correcting charged-particle beam and method of controlling aberration corrector for charged-particle beam |
Apr. 8, 2008 |
| 7355188 |
Technique for uniformity tuning in an ion implanter system |
Apr. 8, 2008 |
| 7351983 |
Focused ion beam system |
Apr. 1, 2008 |
| 7351986 |
Method and apparatus for reducing cross contamination of species during ion implantation |
Apr. 1, 2008 |
| 7351988 |
Beam allocation apparatus and beam allocation method for medical particle accelerators |
Apr. 1, 2008 |
| 7348580 |
Particle beam processing apparatus and materials treatable using the apparatus |
Mar. 25, 2008 |
| 7348567 |
Apparatus for generating a plurality of beamlets |
Mar. 25, 2008 |
| 7345292 |
Particle beam therapy system |
Mar. 18, 2008 |
| 7345436 |
Apparatus and method for controlling the beam current of a charged particle beam |
Mar. 18, 2008 |
| 7342240 |
Ion beam current monitoring |
Mar. 11, 2008 |
| 7342241 |
Method and apparatus for electron-beam lithography |
Mar. 11, 2008 |
| 7332730 |
Device and method for imaging a multiple particle beam on a substrate |
Feb. 19, 2008 |
| 7323700 |
Method and system for controlling beam scanning in an ion implantation device |
Jan. 29, 2008 |
| 7319231 |
Particle beam therapy system |
Jan. 15, 2008 |
| 7315035 |
Apparatus and method for doping |
Jan. 1, 2008 |
| 7315029 |
Electrostatic deflection system with low aberrations and vertical beam incidence |
Jan. 1, 2008 |
| 7282709 |
Charged particle beam detection system |
Oct. 16, 2007 |
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