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Class Information
Number: 250/398
Name: Radiant energy > With charged particle beam deflection or focussing > With target means
Description: Subject matter having means to hold, position or accommodate an object to be irradiated by the beam, or such an object itself in combination with the lens.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7612334 |
Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same |
Nov. 3, 2009 |
| 7612351 |
Ion implanter with function of compensating wafer cut angle and ion implantation method using the same |
Nov. 3, 2009 |
| 7608838 |
Electron optical component |
Oct. 27, 2009 |
| 7605383 |
Pattern writing apparatus using charged particle beam, and program-recorded readable recording medium |
Oct. 20, 2009 |
| 7598499 |
Charged-particle exposure apparatus |
Oct. 6, 2009 |
| 7598504 |
Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus |
Oct. 6, 2009 |
| 7598498 |
Electric field lens and ion implanter having the same |
Oct. 6, 2009 |
| 7592590 |
Charged particle beam device with detection unit switch and method of operation thereof |
Sep. 22, 2009 |
| 7592604 |
Charged particle beam apparatus |
Sep. 22, 2009 |
| 7582886 |
Gantry for medical particle therapy facility |
Sep. 1, 2009 |
| 7579604 |
Beam stop and beam tuning methods |
Aug. 25, 2009 |
| 7576340 |
Focused ion beam processing method |
Aug. 18, 2009 |
| 7576339 |
Ion implantation apparatus and method for obtaining non-uniform ion implantation energy |
Aug. 18, 2009 |
| 7569841 |
Deflection signal compensation for charged particle beam |
Aug. 4, 2009 |
| 7566882 |
Reflection lithography using rotating platter |
Jul. 28, 2009 |
| 7560196 |
Mask for exposing an alignment mark, and method and computer program for designing the mask |
Jul. 14, 2009 |
| 7560715 |
System for the delivery of proton therapy |
Jul. 14, 2009 |
| 7557357 |
D/A conversion device and method and charged particle beam exposure apparatus and method |
Jul. 7, 2009 |
| 7554106 |
Partial ion implantation apparatus and method using bundled beam |
Jun. 30, 2009 |
| 7550741 |
Inertial electrostatic confinement fusion |
Jun. 23, 2009 |
| 7550750 |
Method and apparatus for processing a micro sample |
Jun. 23, 2009 |
| 7547898 |
Particulate prevention in ion implantation |
Jun. 16, 2009 |
| 7547899 |
Charged beam dump and particle attractor |
Jun. 16, 2009 |
| 7544957 |
Non-uniform ion implantation |
Jun. 9, 2009 |
| 7544958 |
Contamination reduction during ion implantation |
Jun. 9, 2009 |
| 7541601 |
Ion beam irradiating apparatus and method of adjusting uniformity of a beam |
Jun. 2, 2009 |
| 7531799 |
Charged particle beam column |
May. 12, 2009 |
| 7528391 |
Techniques for reducing contamination during ion implantation |
May. 5, 2009 |
| 7528392 |
Techniques for low-temperature ion implantation |
May. 5, 2009 |
| 7528393 |
Charged particle beam processing apparatus |
May. 5, 2009 |
| 7521692 |
TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam appara |
Apr. 21, 2009 |
| 7521699 |
Apparatus and method for doping |
Apr. 21, 2009 |
| 7521688 |
Charged-particle beam instrument |
Apr. 21, 2009 |
| 7521674 |
Method for trapping uncharged multi-pole particles |
Apr. 21, 2009 |
| 7518121 |
Method for determining lens errors in a particle-optical device |
Apr. 14, 2009 |
| 7518130 |
Ion beam blocking component and ion beam blocking device having the same |
Apr. 14, 2009 |
| 7511288 |
Ion implantation device |
Mar. 31, 2009 |
| 7507956 |
Charged particle beam energy width reduction system for charged particle beam system |
Mar. 24, 2009 |
| 7504624 |
Charged particle beam device |
Mar. 17, 2009 |
| 7501638 |
Charged particle beam emitting device and method for operating a charged particle beam emitting device |
Mar. 10, 2009 |
| 7501625 |
Electron microscope application apparatus and sample inspection method |
Mar. 10, 2009 |
| 7501644 |
Apparatus and method for controlled particle beam manufacturing |
Mar. 10, 2009 |
| 7495242 |
Apparatus and method for controlled particle beam manufacturing |
Feb. 24, 2009 |
| 7495244 |
Apparatus and method for controlled particle beam manufacturing |
Feb. 24, 2009 |
| 7495245 |
Apparatus and method for controlled particle beam manufacturing |
Feb. 24, 2009 |
| 7491933 |
Electron beam apparatus |
Feb. 17, 2009 |
| 7488961 |
Charged particle beam irradiation method and charged particle beam apparatus |
Feb. 10, 2009 |
| 7488960 |
Apparatus and method for controlled particle beam manufacturing |
Feb. 10, 2009 |
| 7485874 |
Apparatus for manufacturing semiconductor substrates |
Feb. 3, 2009 |
| 7485879 |
Electron beam writing apparatus and writing method |
Feb. 3, 2009 |
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