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Class Information
Number: 250/397
Name: Radiant energy > With charged particle beam deflection or focussing > With detector
Description: Subject matter having means responsive to invisible radiation to signal the presence or intensity of such radiation.










Patents under this class:

Patent Number Title Of Patent Date Issued
8710439 Charged particle beam apparatus Apr. 29, 2014
8692218 Charged particle beam exposure apparatus Apr. 8, 2014
8692216 Ion implantation apparatus and control method thereof Apr. 8, 2014
8692195 Charged particle radiation device Apr. 8, 2014
8686375 Molecule mass detection via field emission of electrons from membranes Apr. 1, 2014
8686374 Drawing apparatus, and method of manufacturing article Apr. 1, 2014
8680481 Detection apparatus for detecting charged particles, methods for detecting charged particles and mass spectrometer Mar. 25, 2014
8680465 Charged particle beam apparatus and film thickness measurement method Mar. 25, 2014
8674319 Beam monitor system and particle beam irradiation system Mar. 18, 2014
8674317 Sample surface inspection apparatus and method Mar. 18, 2014
8664620 Particle beam rotational irradiation apparatus Mar. 4, 2014
8653490 Ion implanter Feb. 18, 2014
8653456 Pattern inspection method, pattern inspection program, and electronic device inspection system Feb. 18, 2014
8642973 Detection apparatus for detecting charged particles, methods for detecting charged particles and mass spectrometer Feb. 4, 2014
8642955 Toroidal ion trap mass analyzer with cylindrical electrodes Feb. 4, 2014
8629395 Charged particle beam apparatus Jan. 14, 2014
8624186 Movable detector for charged particle beam inspection or review Jan. 7, 2014
8624180 Resolution enhancement for ion mobility spectrometers Jan. 7, 2014
8618499 Electron beam irradiation apparatus Dec. 31, 2013
8618498 Backscatter reduction in thin electron detectors Dec. 31, 2013
8618497 Drawing apparatus, method of manufacturing article, and information processing apparatus Dec. 31, 2013
8618496 Charged particle system comprising a manipulator device for manipulation of one or more charged particle beams Dec. 31, 2013
8604432 Defect inspection apparatus and defect inspection method Dec. 10, 2013
8604431 Pattern-height measuring apparatus and pattern-height measuring method Dec. 10, 2013
8604427 Three-dimensional mapping using scanning electron microscope images Dec. 10, 2013
8592778 Particle beam irradiation apparatus and particle beam therapy system Nov. 26, 2013
8592776 Charged particle beam apparatus Nov. 26, 2013
8586942 Beam position monitor and particle beam therapy system Nov. 19, 2013
8581218 Treatment planning system, device for calculating a scanning path and particle therapy system Nov. 12, 2013
8581188 Electron detector including one or more intimately-coupled scintillator-photomultiplier combinations, and electron microscope employing same Nov. 12, 2013
8575563 Compact isocentric gantry Nov. 5, 2013
8569694 Aberration-correcting dark-field electron microscopy Oct. 29, 2013
8563943 Particle beam irradiation apparatus, particle beam therapy system, and data display program Oct. 22, 2013
8552408 Particle beam irradiation apparatus and control method of the particle beam irradiation apparatus Oct. 8, 2013
8552405 Charged particle beam writing apparatus and charged particle beam writing method Oct. 8, 2013
8552377 Particle detection system Oct. 8, 2013
8552373 Charged particle beam device and sample observation method Oct. 8, 2013
8546756 System and method for material analysis of a microscopic element Oct. 1, 2013
8536552 Collimator for a radiation detector and method for manufacturing such a collimator as well as method for manufacturing a radiation detector comprising collimators Sep. 17, 2013
8534116 Size segregated aerosol mass concentration measurement with inlet conditioners and multiple detectors Sep. 17, 2013
8530851 Electron beam profile measurement system and method with optional Faraday cup Sep. 10, 2013
8530835 Imaging energy filter for electrically charged particles and spectroscope having same Sep. 10, 2013
8525109 Sampling system for use with surface ionization spectroscopy Sep. 3, 2013
8519364 Positioning system and method for precise stage and pattern used therof Aug. 27, 2013
8519327 Mass spectrometer Aug. 27, 2013
8513619 Non-planar extractor structure for electron source Aug. 20, 2013
8513599 Guiding spray droplets into an inlet capillary of a mass spectrometer Aug. 20, 2013
8507873 Drift measuring method, charged particle beam writing method, and charged particle beam writing apparatus Aug. 13, 2013
8507858 Pattern measurement apparatus and pattern measurement method Aug. 13, 2013
8507845 Membrane detector for time-of-flight mass spectrometry Aug. 13, 2013











 
 
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