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Class Information
Number: 250/397
Name: Radiant energy > With charged particle beam deflection or focussing > With detector
Description: Subject matter having means responsive to invisible radiation to signal the presence or intensity of such radiation.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459680 |
Method of analysis using energy loss spectrometer and transmission electron microscope equipped therewith |
Dec. 2, 2008 |
| 7459705 |
Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure de |
Dec. 2, 2008 |
| 7459681 |
Scanning electron microscope |
Dec. 2, 2008 |
| 7456403 |
Charged particle beam device |
Nov. 25, 2008 |
| 7456415 |
Charged particle beam extraction system and method |
Nov. 25, 2008 |
| 7453070 |
Methods and apparatus for beam density measurement in two dimensions |
Nov. 18, 2008 |
| 7453074 |
Ion implanter with ionization chamber electrode design |
Nov. 18, 2008 |
| 7453076 |
Bi-polar treatment facility for treating target cells with both positive and negative ions |
Nov. 18, 2008 |
| 7449691 |
Detecting apparatus and device manufacturing method |
Nov. 11, 2008 |
| 7446320 |
Electronically-variable immersion electrostatic lens |
Nov. 4, 2008 |
| 7446327 |
Apparatus for amplifying a stream of charged particles |
Nov. 4, 2008 |
| 7442945 |
Faraday assembly of ion implantation apparatus |
Oct. 28, 2008 |
| 7442944 |
Ion beam implant current, spot width and position tuning |
Oct. 28, 2008 |
| 7442940 |
Focal plane array incorporating ultra-small resonant structures |
Oct. 28, 2008 |
| 7439500 |
Analyzing system and charged particle beam device |
Oct. 21, 2008 |
| 7439506 |
Method and an apparatus of an inspection system using an electron beam |
Oct. 21, 2008 |
| 7435970 |
Beam current meter |
Oct. 14, 2008 |
| 7435977 |
Ion beam angle measurement systems and methods for ion implantation systems |
Oct. 14, 2008 |
| 7429741 |
Faraday system and ion implantation apparatus comprising the faraday system |
Sep. 30, 2008 |
| 7425714 |
Measurement method of electron beam current, electron beam writing system and electron beam detector |
Sep. 16, 2008 |
| 7425702 |
Charged particle beam apparatus |
Sep. 16, 2008 |
| 7425708 |
Secondary electron detector unit for a scanning electron microscope |
Sep. 16, 2008 |
| 7423268 |
Projection imaging type electron microscope |
Sep. 9, 2008 |
| 7420167 |
Apparatus and method for electron beam inspection with projection electron microscopy |
Sep. 2, 2008 |
| 7417233 |
Beam exposure correction system and method |
Aug. 26, 2008 |
| 7417234 |
Spatial-phase locking of energy beams for determining two-dimensional location and beam shape |
Aug. 26, 2008 |
| 7417235 |
Particle detector for secondary ions and direct and or indirect secondary electrons |
Aug. 26, 2008 |
| 7417242 |
Method of measuring ion beam position |
Aug. 26, 2008 |
| 7411190 |
Inspection system, inspection method, and process management method |
Aug. 12, 2008 |
| 7408147 |
Nanoelectromechanical and microelectromechanical sensors and analyzers |
Aug. 5, 2008 |
| 7402799 |
MEMS mass spectrometer |
Jul. 22, 2008 |
| 7394066 |
Electron microscope and electron beam inspection system |
Jul. 1, 2008 |
| 7394073 |
Methods and apparatus for ion beam angle measurement in two dimensions |
Jul. 1, 2008 |
| 7394078 |
Technique for ion beam angle spread control for advanced applications |
Jul. 1, 2008 |
| 7394082 |
Ion beam delivery equipment and an ion beam delivery method |
Jul. 1, 2008 |
| 7391017 |
Mass scale alignment of time-of-flight mass spectra |
Jun. 24, 2008 |
| 7388201 |
Radiation detector having coated nanostructure and method |
Jun. 17, 2008 |
| 7388198 |
Electron microscope |
Jun. 17, 2008 |
| 7385194 |
Charged particle beam application system |
Jun. 10, 2008 |
| 7385210 |
Device for spectroscopy using charged analytes |
Jun. 10, 2008 |
| 7385202 |
Divergent charged particle implantation for improved transistor symmetry |
Jun. 10, 2008 |
| 7385207 |
Movable inclination-angle measuring apparatus for ion beam, and method of use |
Jun. 10, 2008 |
| 7385208 |
Systems and methods for implant dosage control |
Jun. 10, 2008 |
| 7381945 |
Non-linear time-of-flight mass spectrometer |
Jun. 3, 2008 |
| 7381977 |
Ion beam profiler |
Jun. 3, 2008 |
| 7378667 |
Particle-optical appliance provided with aberration-correcting means |
May. 27, 2008 |
| 7375345 |
Exposed conductor system and method for sensing an electron beam |
May. 20, 2008 |
| 7375329 |
Scanning electron microscope |
May. 20, 2008 |
| 7372051 |
Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system |
May. 13, 2008 |
| 7372019 |
ICP mass spectrometer |
May. 13, 2008 |
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