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Class Information
Number: 250/396R
Name: Radiant energy > With charged particle beam deflection or focussing
Description:
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622721 |
Focused anode layer ion source with converging and charge compensated beam (falcon) |
Nov. 24, 2009 |
| 7622713 |
Method and apparatus for normalizing performance of an electron source |
Nov. 24, 2009 |
| 7619373 |
Selectable frequency light emitter |
Nov. 17, 2009 |
| 7619224 |
Generation, acceleration, focusing and collection of a high-brightness, space-charge-dominated circular charged-particle beam |
Nov. 17, 2009 |
| 7619219 |
Scanning electron microscope |
Nov. 17, 2009 |
| 7619213 |
Ion extraction pulser and method for mass spectrometry |
Nov. 17, 2009 |
| 7612353 |
Lithographic apparatus, contaminant trap, and device manufacturing method |
Nov. 3, 2009 |
| 7612336 |
Scanning electron microscope having a monochromator |
Nov. 3, 2009 |
| 7612334 |
Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same |
Nov. 3, 2009 |
| 7612321 |
Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner |
Nov. 3, 2009 |
| 7609009 |
Linear ion accelerator |
Oct. 27, 2009 |
| 7608845 |
Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect |
Oct. 27, 2009 |
| 7608838 |
Electron optical component |
Oct. 27, 2009 |
| 7605378 |
Charged-particle beam system |
Oct. 20, 2009 |
| 7605377 |
On-chip reflectron and ion optics |
Oct. 20, 2009 |
| 7601969 |
Illumination condenser for a particle optical projection system |
Oct. 13, 2009 |
| 7601968 |
Charged particle beam writing method and apparatus |
Oct. 13, 2009 |
| 7598504 |
Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus |
Oct. 6, 2009 |
| 7598499 |
Charged-particle exposure apparatus |
Oct. 6, 2009 |
| 7598498 |
Electric field lens and ion implanter having the same |
Oct. 6, 2009 |
| 7598497 |
Charged particle beam scanning method and charged particle beam apparatus |
Oct. 6, 2009 |
| 7598496 |
Charged-particle beam system |
Oct. 6, 2009 |
| 7598495 |
Methods and systems for trapping ion beam particles and focusing an ion beam |
Oct. 6, 2009 |
| 7595486 |
RF multipole ion guides for broad mass range |
Sep. 29, 2009 |
| 7592604 |
Charged particle beam apparatus |
Sep. 22, 2009 |
| 7592590 |
Charged particle beam device with detection unit switch and method of operation thereof |
Sep. 22, 2009 |
| 7586111 |
Ion implanter having combined hybrid and double mechanical scan architecture |
Sep. 8, 2009 |
| 7586098 |
Ion stripper device made of carbon nanotubes or fullerenes |
Sep. 8, 2009 |
| 7586097 |
Switching micro-resonant structures using at least one director |
Sep. 8, 2009 |
| 7579605 |
Multi-purpose electrostatic lens for an ion implanter system |
Aug. 25, 2009 |
| 7579604 |
Beam stop and beam tuning methods |
Aug. 25, 2009 |
| 7579602 |
Ion implantation with a collimator magnet and a neutral filter magnet |
Aug. 25, 2009 |
| 7576340 |
Focused ion beam processing method |
Aug. 18, 2009 |
| 7576339 |
Ion implantation apparatus and method for obtaining non-uniform ion implantation energy |
Aug. 18, 2009 |
| 7573051 |
Ion beam guide tube |
Aug. 11, 2009 |
| 7573050 |
Column simultaneously focusing a particle beam and an optical beam |
Aug. 11, 2009 |
| 7573045 |
Plasmon wave propagation devices and methods |
Aug. 11, 2009 |
| 7569835 |
Gating grid and method of manufacture |
Aug. 4, 2009 |
| 7569834 |
High resolution charged particle projection lens array using magnetic elements |
Aug. 4, 2009 |
| 7569833 |
Apparatus for generating a plurality of beamlets |
Aug. 4, 2009 |
| 7566888 |
Method and system for treating an interior surface of a workpiece using a charged particle beam |
Jul. 28, 2009 |
| 7566887 |
Method of reducing particle contamination for ion implanters |
Jul. 28, 2009 |
| 7566882 |
Reflection lithography using rotating platter |
Jul. 28, 2009 |
| 7566873 |
High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus |
Jul. 28, 2009 |
| 7564042 |
Ion beam apparatus having plasma sheath controller |
Jul. 21, 2009 |
| 7564025 |
Multipole devices and methods |
Jul. 21, 2009 |
| 7560717 |
Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
Jul. 14, 2009 |
| 7557365 |
Structures and methods for coupling energy from an electromagnetic wave |
Jul. 7, 2009 |
| 7557347 |
Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same |
Jul. 7, 2009 |
| 7557343 |
Segmented rod multipole as ion processing cell |
Jul. 7, 2009 |
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