| |
 |
|
Class Information
Number: 250/341.4
Name: Radiant energy > Invisible radiant energy responsive electric signalling > Infrared responsive > Methods > With irradiation or heating of object or material > With semiconductor sample
Description: Subject matter wherein the object irradiated or heated is a material having resistivity intermediate that of metals and insulators (i.e., a semiconductor).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7456969 |
Device and method for monitoring the oxygen concentration in an aircraft tank |
Nov. 25, 2008 |
| 7244938 |
Method of checking a laser processed deteriorated layer |
Jul. 17, 2007 |
| 7102132 |
Process monitoring using infrared optical diagnostics |
Sep. 5, 2006 |
| 7064568 |
Optical testing of integrated circuits with temperature control |
Jun. 20, 2006 |
| 7019511 |
Optical analysis of integrated circuits |
Mar. 28, 2006 |
| 6958480 |
Sample desorption/ionization from mesoporous silica |
Oct. 25, 2005 |
| 6840666 |
Methods and systems employing infrared thermography for defect detection and analysis |
Jan. 11, 2005 |
| 6765396 |
Method, apparatus and software for testing a device including both electrical and optical portions |
Jul. 20, 2004 |
| 6753528 |
System for MEMS inspection and characterization |
Jun. 22, 2004 |
| 6636056 |
Apparatus and method for testing integrated circuits |
Oct. 21, 2003 |
| 6576906 |
Method and apparatus for screening combinatorial libraries for semiconducting properties |
Jun. 10, 2003 |
| 6545279 |
Surface state monitoring method and apparatus |
Apr. 8, 2003 |
| 6493086 |
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use |
Dec. 10, 2002 |
| 6455853 |
Determination of thickness and impurity profiles in thin membranes utilizing spectorscopic data obtained from ellipsometric investigation of both front and back surfaces |
Sep. 24, 2002 |
| 6452180 |
Infrared inspection for determining residual films on semiconductor devices |
Sep. 17, 2002 |
| 6433339 |
Surface state monitoring method and apparatus |
Aug. 13, 2002 |
| 6384415 |
Method of evaluating quality of silicon wafer and method of reclaiming the water |
May. 7, 2002 |
| 6252228 |
Method of analyzing morphology of bulk defect and surface defect on semiconductor wafer |
Jun. 26, 2001 |
| 6242739 |
Method and apparatus for non-destructive determination of film thickness and dopant concentration using fourier transform infrared spectrometry |
Jun. 5, 2001 |
| 6201603 |
Position detecting apparatus for semiconductor wafer |
Mar. 13, 2001 |
| 6177681 |
Apparatus method for testing opening state for hole in semiconductor device |
Jan. 23, 2001 |
| 6072179 |
Method and apparatus using an infrared laser based optical probe for measuring voltages directly from active regions in an integrated circuit |
Jun. 6, 2000 |
| 6011612 |
Processing apparatus using a laser light source |
Jan. 4, 2000 |
| 5981949 |
Locating defects in solid material |
Nov. 9, 1999 |
| 5880850 |
Method and system for sensitive detection of molecular species in a vacuum by harmonic detection spectroscopy |
Mar. 9, 1999 |
| 5872360 |
Method and apparatus using an infrared laser based optical probe for measuring electric fields directly from active regions in an integrated circuit |
Feb. 16, 1999 |
| RE36087 |
Method and system for decoupling inoperative passive elements on a semiconductor chip |
Feb. 9, 1999 |
| 5814816 |
System for monitoring surface stress and other conditions in structures |
Sep. 29, 1998 |
| 5757003 |
Method to determine the extent of oxygen precipitate in silicon |
May. 26, 1998 |
| 5696490 |
FM (VHF) infrared wireless digital metal detector |
Dec. 9, 1997 |
| 5635409 |
Real-time multi-zone semiconductor wafer temperature and process uniformity control system |
Jun. 3, 1997 |
| 5612539 |
Method of evaluating lifetime related quality of semiconductor surface |
Mar. 18, 1997 |
| 5595916 |
Silicon oxide film evaluation method |
Jan. 21, 1997 |
| 5565676 |
Method of driving photoelectric conversion device |
Oct. 15, 1996 |
| 5550374 |
Methods and apparatus for determining interstitial oxygen content of relatively large diameter silicon crystals by infrared spectroscopy |
Aug. 27, 1996 |
| 5534698 |
Solid state surface evaluation methods and devices |
Jul. 9, 1996 |
| 5512999 |
Method for nondestructive measurement of dislocation density in GaAs |
Apr. 30, 1996 |
| 5444246 |
Determining carbon concentration in silicon single crystal by FT-IR |
Aug. 22, 1995 |
| 5386118 |
Method and apparatus for determination of interstitial oxygen concentration in silicon single crystal |
Jan. 31, 1995 |
| 5329237 |
Method and system for decoupling inoperative passive elements on a semiconductor chip |
Jul. 12, 1994 |
| 5308161 |
Pyrometer apparatus for use in rapid thermal processing of semiconductor wafers |
May. 3, 1994 |
| 5272342 |
Diffused layer depth measurement apparatus |
Dec. 21, 1993 |
| 5266806 |
Transmission damage tester |
Nov. 30, 1993 |
| 5262646 |
Infra-red scanning microscopy |
Nov. 16, 1993 |
| 5255286 |
Multi-point pyrometry with real-time surface emissivity compensation |
Oct. 19, 1993 |
| 5208528 |
Method for inspecting a populated printed circuit board, particularly for inspecting solder joints on the board and a system for working this method |
May. 4, 1993 |
| 5166525 |
Through the wafer optical transmission sensor |
Nov. 24, 1992 |
| 5156461 |
Multi-point pyrometry with real-time surface emissivity compensation |
Oct. 20, 1992 |
| 5126569 |
Apparatus for measuring optical properties of materials |
Jun. 30, 1992 |
| 5118945 |
Photothermal test process, apparatus for performing the process and heat microscope |
Jun. 2, 1992 |
|
|
|
