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Class Information
Number: 250/311
Name: Radiant energy > Inspection of solids or liquids by charged particles > Electron microscope type
Description: Subject matter wherein electrons are impelled toward the object or material and the particles detected are electrons which have passed near or through the object or material without substantial deflection.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459680 |
Method of analysis using energy loss spectrometer and transmission electron microscope equipped therewith |
Dec. 2, 2008 |
| 7459682 |
Spin-polarized electron source and spin-polarized scanning tunneling microscope |
Dec. 2, 2008 |
| 7459683 |
Charged particle beam device with DF-STEM image valuation method |
Dec. 2, 2008 |
| 7460714 |
Method and apparatus for measuring dimension using electron microscope |
Dec. 2, 2008 |
| 7456403 |
Charged particle beam device |
Nov. 25, 2008 |
| 7456402 |
Detector optics for multiple electron beam test system |
Nov. 25, 2008 |
| 7453274 |
Detection of defects using transient contrast |
Nov. 18, 2008 |
| 7449898 |
Method and apparatus for reviewing defects by detecting images having voltage contrast |
Nov. 11, 2008 |
| 7446313 |
Scanning electron microscope |
Nov. 4, 2008 |
| 7442931 |
Method and system for ultrafast photoelectron microscope |
Oct. 28, 2008 |
| 7442929 |
Scanning electron microscope |
Oct. 28, 2008 |
| 7442922 |
Method for locally highly resolved, mass-spectroscopic characterization of surfaces using scanning probe technology |
Oct. 28, 2008 |
| 7442930 |
Method for correcting distortions in electron backscatter diffraction patterns |
Oct. 28, 2008 |
| 7439504 |
Pattern inspection method and apparatus using electron beam |
Oct. 21, 2008 |
| 7435954 |
Electron microscope, methods to determine the contact point and the contact of the probe |
Oct. 14, 2008 |
| 7435957 |
Charged particle beam equipment and charged particle microscopy |
Oct. 14, 2008 |
| 7435959 |
Microstructured pattern inspection method |
Oct. 14, 2008 |
| 7435960 |
Charged particle beam apparatus |
Oct. 14, 2008 |
| 7432511 |
Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation |
Oct. 7, 2008 |
| 7432503 |
Scanning electron microscope and method for detecting an image using the same |
Oct. 7, 2008 |
| 7432502 |
Information acquisition method and apparatus for information acquisition |
Oct. 7, 2008 |
| 7429733 |
Method and sample for radiation microscopy including a particle beam channel formed in the sample source |
Sep. 30, 2008 |
| 7427756 |
Method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope |
Sep. 23, 2008 |
| 7427757 |
Large collection angle x-ray monochromators for electron probe microanalysis |
Sep. 23, 2008 |
| 7425712 |
Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation |
Sep. 16, 2008 |
| 7425704 |
Inspection method and apparatus using an electron beam |
Sep. 16, 2008 |
| 7423263 |
Planar view sample preparation |
Sep. 9, 2008 |
| 7423268 |
Projection imaging type electron microscope |
Sep. 9, 2008 |
| 7423269 |
Automated feature analysis with off-axis tilting |
Sep. 9, 2008 |
| 7420190 |
Length measurement pattern, semiconductor device, and method of manufacturing a semiconductor device |
Sep. 2, 2008 |
| 7420184 |
Particle-optical apparatus with temperature switch |
Sep. 2, 2008 |
| 7420168 |
Scanning electron microscope and CD measurement calibration standard specimen |
Sep. 2, 2008 |
| 7417227 |
Scanning interference electron microscope |
Aug. 26, 2008 |
| 7417242 |
Method of measuring ion beam position |
Aug. 26, 2008 |
| 7414252 |
Method and apparatus for the automated process of in-situ lift-out |
Aug. 19, 2008 |
| 7411192 |
Focused ion beam apparatus and focused ion beam irradiation method |
Aug. 12, 2008 |
| 7408155 |
Measuring method and its apparatus |
Aug. 5, 2008 |
| 7408154 |
Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes |
Aug. 5, 2008 |
| 7405402 |
Method and apparatus for aberration-insensitive electron beam imaging |
Jul. 29, 2008 |
| 7399964 |
Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system |
Jul. 15, 2008 |
| 7397050 |
Method and apparatus for specimen fabrication |
Jul. 8, 2008 |
| 7394071 |
Micro column electron beam apparatus formed in low temperature co-fired ceramic substrate |
Jul. 1, 2008 |
| 7394075 |
Preparation of integrated circuit device samples for observation and analysis |
Jul. 1, 2008 |
| 7394078 |
Technique for ion beam angle spread control for advanced applications |
Jul. 1, 2008 |
| 7394070 |
Method and apparatus for inspecting patterns |
Jul. 1, 2008 |
| 7391034 |
Electron imaging beam with reduced space charge defocusing |
Jun. 24, 2008 |
| 7391037 |
Apparatus for generating a plurality of beamlets |
Jun. 24, 2008 |
| 7388211 |
Semi-closed observational environment for electron microscope |
Jun. 17, 2008 |
| 7388198 |
Electron microscope |
Jun. 17, 2008 |
| 7378664 |
Deicing of radiation detectors in analytical instruments |
May. 27, 2008 |
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