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Class Information
Number: 250/311
Name: Radiant energy > Inspection of solids or liquids by charged particles > Electron microscope type
Description: Subject matter wherein electrons are impelled toward the object or material and the particles detected are electrons which have passed near or through the object or material without substantial deflection.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7626166 |
Electron microscope |
Dec. 1, 2009 |
| 7626164 |
Method of scanning a substrate, and method and apparatus for analyzing crystal characteristics |
Dec. 1, 2009 |
| 7626163 |
Defect review method and device for semiconductor device |
Dec. 1, 2009 |
| 7622714 |
Standard specimen for a charged particle beam apparatus, specimen preparation method thereof, and charged particle beam apparatus |
Nov. 24, 2009 |
| 7619220 |
Method of measuring aberrations and correcting aberrations using Ronchigram and electron microscope |
Nov. 17, 2009 |
| 7619218 |
Charged particle optical apparatus with aberration corrector |
Nov. 17, 2009 |
| 7615739 |
Spin microscope based on optically detected magnetic resonance |
Nov. 10, 2009 |
| 7612337 |
Focused ion beam system and a method of sample preparation and observation |
Nov. 3, 2009 |
| 7612336 |
Scanning electron microscope having a monochromator |
Nov. 3, 2009 |
| 7612334 |
Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same |
Nov. 3, 2009 |
| 7608821 |
Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method |
Oct. 27, 2009 |
| 7605378 |
Charged-particle beam system |
Oct. 20, 2009 |
| 7605364 |
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope |
Oct. 20, 2009 |
| 7601957 |
Electron microscope and combined illumination lens |
Oct. 13, 2009 |
| 7601956 |
Method for measuring diffraction patterns from a transmission electron microscopy to determine crystal structures and a device therefor |
Oct. 13, 2009 |
| 7601955 |
Scanning electron microscope |
Oct. 13, 2009 |
| 7598594 |
Wafer-scale microcolumn array using low temperature co-fired ceramic substrate |
Oct. 6, 2009 |
| 7598491 |
Observing method and its apparatus using electron microscope |
Oct. 6, 2009 |
| 7598490 |
SEM-type reviewing apparatus and a method for reviewing defects using the same |
Oct. 6, 2009 |
| 7595490 |
Charged particle beam emitting device and method for operating a charged particle beam emitting device |
Sep. 29, 2009 |
| 7595489 |
Method and apparatus for material identification |
Sep. 29, 2009 |
| 7595482 |
Standard component for length measurement, method for producing the same, and electron beam metrology system using the same |
Sep. 29, 2009 |
| 7592606 |
Manufacturing equipment using ION beam or electron beam |
Sep. 22, 2009 |
| 7592604 |
Charged particle beam apparatus |
Sep. 22, 2009 |
| 7586105 |
Microfabricated cantilever chip |
Sep. 8, 2009 |
| 7586093 |
Apparatus and method for inspecting a sample of a specimen by means of an electron beam |
Sep. 8, 2009 |
| 7576325 |
Electron microscopic method and electron microscope using same |
Aug. 18, 2009 |
| 7573053 |
Polarized pulsed front-end beam source for electron microscope |
Aug. 11, 2009 |
| 7573047 |
Wafer holder and sample producing apparatus using it |
Aug. 11, 2009 |
| 7573030 |
Specimen observation method |
Aug. 11, 2009 |
| 7571653 |
Stress measuring method and system |
Aug. 11, 2009 |
| 7566888 |
Method and system for treating an interior surface of a workpiece using a charged particle beam |
Jul. 28, 2009 |
| 7566873 |
High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus |
Jul. 28, 2009 |
| 7566871 |
Method and apparatus for pattern inspection |
Jul. 28, 2009 |
| 7564557 |
Apparatus and methods for detecting overlay errors using scatterometry |
Jul. 21, 2009 |
| 7560940 |
Method and installation for analyzing an integrated circuit |
Jul. 14, 2009 |
| 7560693 |
Electron-beam size measuring apparatus and size measuring method with electron beams |
Jul. 14, 2009 |
| 7560692 |
Method of TEM sample preparation for electron holography for semiconductor devices |
Jul. 14, 2009 |
| 7558412 |
System and method for compensation of scintillator hysteresis in x-ray detectors |
Jul. 7, 2009 |
| 7557347 |
Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same |
Jul. 7, 2009 |
| 7556749 |
Electron source |
Jul. 7, 2009 |
| 7554099 |
Ultra-thin liquid control plate and combination of box-like member and the control plate |
Jun. 30, 2009 |
| 7554094 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
Jun. 30, 2009 |
| 7554082 |
Pattern observation apparatus, pattern observation method, method of manufacturing semiconductor device, and program |
Jun. 30, 2009 |
| 7550750 |
Method and apparatus for processing a micro sample |
Jun. 23, 2009 |
| 7547884 |
Pattern defect inspection method and apparatus thereof |
Jun. 16, 2009 |
| 7544954 |
Device for operating gas in vacuum or low-pressure environment and for observation of the operation |
Jun. 9, 2009 |
| 7544951 |
Electron gun assembly |
Jun. 9, 2009 |
| 7544939 |
Method for determining the aberration coefficients of the aberration function of a particle-optical lens |
Jun. 9, 2009 |
| 7544938 |
Methods and apparatus for statistical characterization of nano-particles |
Jun. 9, 2009 |
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