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Class Information
Number: 250/310
Name: Radiant energy > Inspection of solids or liquids by charged particles > Electron probe type
Description: Subject matter having means to project a concentrated beam of electrons against the object or material, and means to detect secondary radiation emitted from the object or material, or electrons deflected by the object or material.

Patents under this class:

Patent Number Title Of Patent Date Issued
8710464 Specimen preparation device, and control method in specimen preparation device Apr. 29, 2014
8710439 Charged particle beam apparatus Apr. 29, 2014
8705692 Laser-based accelerator for interrogation of remote containers Apr. 22, 2014
8704528 Method and apparatus for inspecting electronic component Apr. 22, 2014
8704177 Electron microscope, electron-microscope image-reconstruction system and electron-microscope image-reconstruction method Apr. 22, 2014
8704176 Charged particle microscope providing depth-resolved imagery Apr. 22, 2014
8704175 Scanning electron microscope Apr. 22, 2014
8692878 Methods and apparatus for simultaneously inspecting multiple array regions having different pitches Apr. 8, 2014
8692197 Scanning electron microscope optical condition setting method and scanning electron microscope Apr. 8, 2014
8692195 Charged particle radiation device Apr. 8, 2014
8692194 Electron microscope device Apr. 8, 2014
8692193 Method for inspecting EUV reticle and apparatus thereof Apr. 8, 2014
8686360 Micro-sample processing method, observation method and apparatus Apr. 1, 2014
8686359 Characterization of nanoscale structures using an ultrafast electron microscope Apr. 1, 2014
8680466 Electron microscope, and specimen holding method Mar. 25, 2014
8674323 Forming an electron microscope sample from high-pressure frozen material Mar. 18, 2014
8674301 Magnifying observation apparatus Mar. 18, 2014
8674300 Feedback loop for emitter flashing Mar. 18, 2014
8669535 Electron gun Mar. 11, 2014
8669524 Scanning incremental focus microscopy Mar. 11, 2014
8669523 Contour-based defect detection using an inspection apparatus Mar. 11, 2014
8669522 Mask inspection apparatus and mask inspection method Mar. 11, 2014
8664599 Electron microscope Mar. 4, 2014
8664598 Electron microscope and specimen analyzing method Mar. 4, 2014
8664594 Electron-optical system for high-speed and high-sensitivity inspections Mar. 4, 2014
8658987 Circuit-pattern inspection device Feb. 25, 2014
8658974 Environmental cell for a particle-optical apparatus Feb. 25, 2014
8653474 Charged particle extraction device and method of design there for Feb. 18, 2014
8653459 Scanning electron microscope Feb. 18, 2014
8653458 Charged particle beam device Feb. 18, 2014
8653457 Spectroscopy technique using merged spectral data Feb. 18, 2014
8653456 Pattern inspection method, pattern inspection program, and electronic device inspection system Feb. 18, 2014
8653455 Charged particle beam device and evaluation method using the charged particle beam device Feb. 18, 2014
8648318 Multiple beam charged particle optical system Feb. 11, 2014
8648301 Particle beam system having a hollow light guide Feb. 11, 2014
8648300 Charged particle beam apparatus Feb. 11, 2014
8642981 Electron microscope assembly for viewing the wafer plane image of an electron beam lithography tool Feb. 4, 2014
8642959 Method and system of performing three-dimensional imaging using an electron microscope Feb. 4, 2014
8642958 Composite charged particle beam apparatus and sample processing and observing method Feb. 4, 2014
8642957 Scanning electron microscope and a method for imaging a specimen using the same Feb. 4, 2014
8637836 High aspect ratio sample holder Jan. 28, 2014
8637820 Scanning electron microscope and inspection method using same Jan. 28, 2014
8637819 Cross-section processing and observation apparatus Jan. 28, 2014
8633457 Background reduction system including louver Jan. 21, 2014
8633439 System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope Jan. 21, 2014
8629395 Charged particle beam apparatus Jan. 14, 2014
8629394 Charged particle beam device and method for correcting position with respect to charged particle beam Jan. 14, 2014
8624186 Movable detector for charged particle beam inspection or review Jan. 7, 2014
8624184 Methods for spatially resolved alignment of independent spectroscopic data from scanning transmission electron microscopes Jan. 7, 2014
8624182 Electro-optical inspection apparatus and method with dust or particle collection function Jan. 7, 2014

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