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Class Information
Number: 250/310
Name: Radiant energy > Inspection of solids or liquids by charged particles > Electron probe type
Description: Subject matter having means to project a concentrated beam of electrons against the object or material, and means to detect secondary radiation emitted from the object or material, or electrons deflected by the object or material.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459704 |
Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms |
Dec. 2, 2008 |
| 7459699 |
Method of determining processing position in charged particle beam apparatus, and infrared microscope used in the method |
Dec. 2, 2008 |
| 7459683 |
Charged particle beam device with DF-STEM image valuation method |
Dec. 2, 2008 |
| 7459682 |
Spin-polarized electron source and spin-polarized scanning tunneling microscope |
Dec. 2, 2008 |
| 7459681 |
Scanning electron microscope |
Dec. 2, 2008 |
| 7459680 |
Method of analysis using energy loss spectrometer and transmission electron microscope equipped therewith |
Dec. 2, 2008 |
| 7456402 |
Detector optics for multiple electron beam test system |
Nov. 25, 2008 |
| 7456401 |
Projection electron microscope, electron microscope, specimen surface observing method and micro device producing method |
Nov. 25, 2008 |
| 7456400 |
Scanning probe microscope and scanning method |
Nov. 25, 2008 |
| 7453274 |
Detection of defects using transient contrast |
Nov. 18, 2008 |
| 7453076 |
Bi-polar treatment facility for treating target cells with both positive and negative ions |
Nov. 18, 2008 |
| 7453063 |
Calibration substrate and method for calibrating a lithographic apparatus |
Nov. 18, 2008 |
| 7453062 |
Energy-filtering cathode lens microscopy instrument |
Nov. 18, 2008 |
| 7449898 |
Method and apparatus for reviewing defects by detecting images having voltage contrast |
Nov. 11, 2008 |
| 7449699 |
Method and apparatus for creating a topography at a surface |
Nov. 11, 2008 |
| 7449692 |
Charged particle beam apparatus |
Nov. 11, 2008 |
| 7449691 |
Detecting apparatus and device manufacturing method |
Nov. 11, 2008 |
| 7449690 |
Inspection method and inspection apparatus using charged particle beam |
Nov. 11, 2008 |
| 7449689 |
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method |
Nov. 11, 2008 |
| 7446313 |
Scanning electron microscope |
Nov. 4, 2008 |
| 7442942 |
Charged particle beam apparatus |
Oct. 28, 2008 |
| 7442930 |
Method for correcting distortions in electron backscatter diffraction patterns |
Oct. 28, 2008 |
| 7442929 |
Scanning electron microscope |
Oct. 28, 2008 |
| 7442928 |
Charged particle beam apparatus |
Oct. 28, 2008 |
| 7442925 |
Working method using scanning probe |
Oct. 28, 2008 |
| 7442924 |
Repetitive circumferential milling for sample preparation |
Oct. 28, 2008 |
| 7442923 |
Scanning electron microscope |
Oct. 28, 2008 |
| 7442922 |
Method for locally highly resolved, mass-spectroscopic characterization of surfaces using scanning probe technology |
Oct. 28, 2008 |
| 7439506 |
Method and an apparatus of an inspection system using an electron beam |
Oct. 21, 2008 |
| 7439505 |
Scanning electron microscope |
Oct. 21, 2008 |
| 7439504 |
Pattern inspection method and apparatus using electron beam |
Oct. 21, 2008 |
| 7439503 |
Charged particle beam irradiation method, method of manufacturing semiconductor device and charged particle beam apparatus |
Oct. 21, 2008 |
| 7439502 |
Electron beam apparatus and device production method using the electron beam apparatus |
Oct. 21, 2008 |
| 7439500 |
Analyzing system and charged particle beam device |
Oct. 21, 2008 |
| 7435973 |
Material processing system and method |
Oct. 14, 2008 |
| 7435960 |
Charged particle beam apparatus |
Oct. 14, 2008 |
| 7435959 |
Microstructured pattern inspection method |
Oct. 14, 2008 |
| 7435958 |
Electron beam apparatus and method for production of its specimen chamber |
Oct. 14, 2008 |
| 7435957 |
Charged particle beam equipment and charged particle microscopy |
Oct. 14, 2008 |
| 7435956 |
Apparatus and method for inspection and testing of flat panel display substrates |
Oct. 14, 2008 |
| 7435954 |
Electron microscope, methods to determine the contact point and the contact of the probe |
Oct. 14, 2008 |
| 7432503 |
Scanning electron microscope and method for detecting an image using the same |
Oct. 7, 2008 |
| 7427757 |
Large collection angle x-ray monochromators for electron probe microanalysis |
Sep. 23, 2008 |
| 7427756 |
Method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope |
Sep. 23, 2008 |
| 7427753 |
Method of cross-section milling with focused ion beam (FIB) device |
Sep. 23, 2008 |
| 7425704 |
Inspection method and apparatus using an electron beam |
Sep. 16, 2008 |
| 7425703 |
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or proce |
Sep. 16, 2008 |
| 7425702 |
Charged particle beam apparatus |
Sep. 16, 2008 |
| 7425701 |
Electron-beam device and detector system |
Sep. 16, 2008 |
| 7423746 |
Circuit-pattern inspecting apparatus and method |
Sep. 9, 2008 |
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