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Class Information
Number: 250/310
Name: Radiant energy > Inspection of solids or liquids by charged particles > Electron probe type
Description: Subject matter having means to project a concentrated beam of electrons against the object or material, and means to detect secondary radiation emitted from the object or material, or electrons deflected by the object or material.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8710464 |
Specimen preparation device, and control method in specimen preparation device |
Apr. 29, 2014 |
| 8710439 |
Charged particle beam apparatus |
Apr. 29, 2014 |
| 8705692 |
Laser-based accelerator for interrogation of remote containers |
Apr. 22, 2014 |
| 8704528 |
Method and apparatus for inspecting electronic component |
Apr. 22, 2014 |
| 8704177 |
Electron microscope, electron-microscope image-reconstruction system and electron-microscope image-reconstruction method |
Apr. 22, 2014 |
| 8704176 |
Charged particle microscope providing depth-resolved imagery |
Apr. 22, 2014 |
| 8704175 |
Scanning electron microscope |
Apr. 22, 2014 |
| 8692878 |
Methods and apparatus for simultaneously inspecting multiple array regions having different pitches |
Apr. 8, 2014 |
| 8692197 |
Scanning electron microscope optical condition setting method and scanning electron microscope |
Apr. 8, 2014 |
| 8692195 |
Charged particle radiation device |
Apr. 8, 2014 |
| 8692194 |
Electron microscope device |
Apr. 8, 2014 |
| 8692193 |
Method for inspecting EUV reticle and apparatus thereof |
Apr. 8, 2014 |
| 8686360 |
Micro-sample processing method, observation method and apparatus |
Apr. 1, 2014 |
| 8686359 |
Characterization of nanoscale structures using an ultrafast electron microscope |
Apr. 1, 2014 |
| 8680466 |
Electron microscope, and specimen holding method |
Mar. 25, 2014 |
| 8674323 |
Forming an electron microscope sample from high-pressure frozen material |
Mar. 18, 2014 |
| 8674301 |
Magnifying observation apparatus |
Mar. 18, 2014 |
| 8674300 |
Feedback loop for emitter flashing |
Mar. 18, 2014 |
| 8669535 |
Electron gun |
Mar. 11, 2014 |
| 8669524 |
Scanning incremental focus microscopy |
Mar. 11, 2014 |
| 8669523 |
Contour-based defect detection using an inspection apparatus |
Mar. 11, 2014 |
| 8669522 |
Mask inspection apparatus and mask inspection method |
Mar. 11, 2014 |
| 8664599 |
Electron microscope |
Mar. 4, 2014 |
| 8664598 |
Electron microscope and specimen analyzing method |
Mar. 4, 2014 |
| 8664594 |
Electron-optical system for high-speed and high-sensitivity inspections |
Mar. 4, 2014 |
| 8658987 |
Circuit-pattern inspection device |
Feb. 25, 2014 |
| 8658974 |
Environmental cell for a particle-optical apparatus |
Feb. 25, 2014 |
| 8653474 |
Charged particle extraction device and method of design there for |
Feb. 18, 2014 |
| 8653459 |
Scanning electron microscope |
Feb. 18, 2014 |
| 8653458 |
Charged particle beam device |
Feb. 18, 2014 |
| 8653457 |
Spectroscopy technique using merged spectral data |
Feb. 18, 2014 |
| 8653456 |
Pattern inspection method, pattern inspection program, and electronic device inspection system |
Feb. 18, 2014 |
| 8653455 |
Charged particle beam device and evaluation method using the charged particle beam device |
Feb. 18, 2014 |
| 8648318 |
Multiple beam charged particle optical system |
Feb. 11, 2014 |
| 8648301 |
Particle beam system having a hollow light guide |
Feb. 11, 2014 |
| 8648300 |
Charged particle beam apparatus |
Feb. 11, 2014 |
| 8642981 |
Electron microscope assembly for viewing the wafer plane image of an electron beam lithography tool |
Feb. 4, 2014 |
| 8642959 |
Method and system of performing three-dimensional imaging using an electron microscope |
Feb. 4, 2014 |
| 8642958 |
Composite charged particle beam apparatus and sample processing and observing method |
Feb. 4, 2014 |
| 8642957 |
Scanning electron microscope and a method for imaging a specimen using the same |
Feb. 4, 2014 |
| 8637836 |
High aspect ratio sample holder |
Jan. 28, 2014 |
| 8637820 |
Scanning electron microscope and inspection method using same |
Jan. 28, 2014 |
| 8637819 |
Cross-section processing and observation apparatus |
Jan. 28, 2014 |
| 8633457 |
Background reduction system including louver |
Jan. 21, 2014 |
| 8633439 |
System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope |
Jan. 21, 2014 |
| 8629395 |
Charged particle beam apparatus |
Jan. 14, 2014 |
| 8629394 |
Charged particle beam device and method for correcting position with respect to charged particle beam |
Jan. 14, 2014 |
| 8624186 |
Movable detector for charged particle beam inspection or review |
Jan. 7, 2014 |
| 8624184 |
Methods for spatially resolved alignment of independent spectroscopic data from scanning transmission electron microscopes |
Jan. 7, 2014 |
| 8624182 |
Electro-optical inspection apparatus and method with dust or particle collection function |
Jan. 7, 2014 |
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