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Class Information
Number: 250/309
Name: Radiant energy > Inspection of solids or liquids by charged particles > Positive ion probe or microscope type
Description: Subject matter wherein the charged particles are positively charged.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5028780 |
Preparation and observation method of micro-section |
Jul. 2, 1991 |
| 5023453 |
Apparatus for preparation and observation of a topographic section |
Jun. 11, 1991 |
| 5012109 |
Charged particle beam apparatus |
Apr. 30, 1991 |
| 5008537 |
Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope |
Apr. 16, 1991 |
| 5004927 |
Process for forming a fine pattern having a high aspect ratio |
Apr. 2, 1991 |
| 4992661 |
Method and apparatus for neutralizing an accumulated charge on a specimen by means of a conductive lattice deposited on the specimen |
Feb. 12, 1991 |
| 4983831 |
Time-of-flight analysis method with continuous scanning and analyzer to implement this method |
Jan. 8, 1991 |
| 4983832 |
Scanning electron microscope |
Jan. 8, 1991 |
| 4983830 |
Focused ion beam apparatus having charged particle energy filter |
Jan. 8, 1991 |
| 4982090 |
Method and apparatus for the quantitative, depth differential analysis of solid samples with the use of two ion beams |
Jan. 1, 1991 |
| 4973842 |
Lens system for a photo ion spectrometer |
Nov. 27, 1990 |
| 4968888 |
Pulsed field sample neutralization |
Nov. 6, 1990 |
| 4967078 |
Rutherford backscattering surface analyzer with 180-degree deflecting and focusing permanent magnet |
Oct. 30, 1990 |
| 4958074 |
Apparatus and method for inspecting a mask |
Sep. 18, 1990 |
| 4954705 |
Method for examining a specimen in a particle beam instrument |
Sep. 4, 1990 |
| 4945236 |
Direct imaging type SIMS instrument having TOF mass spectrometric mode |
Jul. 31, 1990 |
| 4939364 |
Specimen or substrate cutting method using focused charged particle beam and secondary ion spectroscopic analysis method utilizing the cutting method |
Jul. 3, 1990 |
| 4933565 |
Method and apparatus for correcting defects of X-ray mask |
Jun. 12, 1990 |
| 4926055 |
Field emission electron gun |
May. 15, 1990 |
| 4924104 |
Ion beam apparatus and method of modifying substrate |
May. 8, 1990 |
| RE33193 |
Ion beam processing apparatus and method of correcting mask defects |
Apr. 3, 1990 |
| 4912326 |
Direct imaging type SIMS instrument |
Mar. 27, 1990 |
| 4912325 |
Method for sample analysis by sputtering with a particle beam, and device to implement said method |
Mar. 27, 1990 |
| 4912327 |
Pulsed microfocused ion beams |
Mar. 27, 1990 |
| 4896035 |
High mass ion detection system and method |
Jan. 23, 1990 |
| 4886971 |
Ion beam irradiating apparatus including ion neutralizer |
Dec. 12, 1989 |
| 4874946 |
Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices |
Oct. 17, 1989 |
| 4874947 |
Focused ion beam imaging and process control |
Oct. 17, 1989 |
| 4866272 |
Surface analyzer for determining the energy distribution of scattered proton beams |
Sep. 12, 1989 |
| 4864131 |
Positron microscopy |
Sep. 5, 1989 |
| 4864130 |
Photo ion spectrometer |
Sep. 5, 1989 |
| 4860224 |
Surface analysis spectroscopy apparatus |
Aug. 22, 1989 |
| 4855596 |
Photo ion spectrometer |
Aug. 8, 1989 |
| 4851673 |
Secondary ion mass spectrometer |
Jul. 25, 1989 |
| 4849629 |
Charged particle analyzer |
Jul. 18, 1989 |
| 4843238 |
Method for identifying a blistered film in layered films |
Jun. 27, 1989 |
| 4841143 |
Charged particle beam apparatus |
Jun. 20, 1989 |
| 4833323 |
Determining the composition of a solid body |
May. 23, 1989 |
| 4829178 |
Apparatus for surface analysis |
May. 9, 1989 |
| 4829179 |
Surface analyzer |
May. 9, 1989 |
| 4818872 |
Integrated charge neutralization and imaging system |
Apr. 4, 1989 |
| 4806754 |
High luminosity spherical analyzer for charged particles |
Feb. 21, 1989 |
| 4803355 |
Mass spectrometer |
Feb. 7, 1989 |
| 4800273 |
Secondary ion mass spectrometer |
Jan. 24, 1989 |
| 4791295 |
Method and apparatus for automatically correcting astigmatism of scanning electron microscope or the like |
Dec. 13, 1988 |
| 4785172 |
Secondary ion mass spectrometry system and method for focused ion beam with parallel ion detection |
Nov. 15, 1988 |
| 4785173 |
Element analyzing apparatus |
Nov. 15, 1988 |
| 4778993 |
Time-of-flight mass spectrometry |
Oct. 18, 1988 |
| 4769542 |
Charged particle energy analyzer |
Sep. 6, 1988 |
| 4766313 |
Apparatus for quantitative secondary ion mass spectrometry |
Aug. 23, 1988 |
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