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Class Information
Number: 250/309
Name: Radiant energy > Inspection of solids or liquids by charged particles > Positive ion probe or microscope type
Description: Subject matter wherein the charged particles are positively charged.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5393985 |
Apparatus for focusing an ion beam |
Feb. 28, 1995 |
| 5381003 |
Auger electron spectroscopy |
Jan. 10, 1995 |
| 5376791 |
Secondary ion mass spectometry system |
Dec. 27, 1994 |
| 5371366 |
Ion scattering spectroscope |
Dec. 6, 1994 |
| 5350920 |
Ion beam analyzing apparatus |
Sep. 27, 1994 |
| 5347126 |
Time-of-flight direct recoil ion scattering spectrometer |
Sep. 13, 1994 |
| 5336895 |
Impurity free reference grid for use charged partiole beam spectroscopes |
Aug. 9, 1994 |
| 5331161 |
Ion irradiation system and method |
Jul. 19, 1994 |
| 5289408 |
Memory apparatus using tunnel current techniques |
Feb. 22, 1994 |
| 5278407 |
Secondary-ion mass spectrometry apparatus using field limiting method |
Jan. 11, 1994 |
| 5272338 |
Molecular imaging system |
Dec. 21, 1993 |
| 5270552 |
Method for separating specimen and method for analyzing the specimen separated by the specimen separating method |
Dec. 14, 1993 |
| 5214284 |
Method and arrangement for testing and repairing an integrated circuit |
May. 25, 1993 |
| 5208457 |
Method of secondary ion mass spectrometry analysis |
May. 4, 1993 |
| 5182453 |
Ion scattering spectrometer |
Jan. 26, 1993 |
| 5179279 |
Non-contact electrical pathway |
Jan. 12, 1993 |
| 5171987 |
Combined magnetic sector mass spectrometer and time-of-flight mass spectrometer |
Dec. 15, 1992 |
| 5166521 |
Ion-scattering spectrometer |
Nov. 24, 1992 |
| 5164596 |
Focused ion beam irradiating apparatus |
Nov. 17, 1992 |
| 5164594 |
Charged particle extraction arrangement |
Nov. 17, 1992 |
| 5159196 |
Apparatus and method for discharging a specimen disposed in an evacuated chamber |
Oct. 27, 1992 |
| 5159195 |
Position microscopy |
Oct. 27, 1992 |
| 5157555 |
Apparatus for adjustable correction of spherical aberration |
Oct. 20, 1992 |
| 5149974 |
Gas delivery for ion beam deposition and etching |
Sep. 22, 1992 |
| 5150392 |
X-ray mask containing a cantilevered tip for gap control and alignment |
Sep. 22, 1992 |
| 5149966 |
Apparatus and method for the absolute determination of the energy of a ion beam |
Sep. 22, 1992 |
| 5148027 |
Method of microarea analysis with a focused cesium ion beam |
Sep. 15, 1992 |
| 5146089 |
Ion beam device and method for carrying out potential measurements by means of an ion beam |
Sep. 8, 1992 |
| 5140164 |
IC modification with focused ion beam system |
Aug. 18, 1992 |
| 5113072 |
Device having superlattice structure, and method of and apparatus for manufacturing the same |
May. 12, 1992 |
| 5111043 |
Apparatus for material surface observation |
May. 5, 1992 |
| 5105082 |
Laser ionization sputtered neutral mass spectrometer |
Apr. 14, 1992 |
| 5095208 |
Charged particle generating device and focusing lens therefor |
Mar. 10, 1992 |
| 5093572 |
Scanning electron microscope for observation of cross section and method of observing cross section employing the same |
Mar. 3, 1992 |
| 5089699 |
Secondary charged particle analyzing apparatus and secondary charged particle extracting section |
Feb. 18, 1992 |
| 5087815 |
High resolution mass spectrometry of recoiled ions for isotopic and trace elemental analysis |
Feb. 11, 1992 |
| 5086227 |
Secondary ion mass analyzing apparatus |
Feb. 4, 1992 |
| 5086230 |
Apparatus for forming, correcting pattern |
Feb. 4, 1992 |
| 5083020 |
Mass spectrometer |
Jan. 21, 1992 |
| 5068535 |
Time-of-flight ion-scattering spectrometer for scattering and recoiling for electron density and structure |
Nov. 26, 1991 |
| 5063293 |
Positron microscopy |
Nov. 5, 1991 |
| 5063294 |
Converged ion beam apparatus |
Nov. 5, 1991 |
| 5061850 |
High-repetition rate position sensitive atom probe |
Oct. 29, 1991 |
| 5061856 |
Corpuscular beam device |
Oct. 29, 1991 |
| 5061851 |
Inspection method and device for an aperture in a focused ion beam generating apparatus |
Oct. 29, 1991 |
| 5059785 |
Backscattering spectrometry device for identifying unknown elements present in a workpiece |
Oct. 22, 1991 |
| 5041725 |
Secondary ion mass spectrometry apparatus |
Aug. 20, 1991 |
| 5034605 |
Secondary ion mass spectrometer with independently variable extraction field |
Jul. 23, 1991 |
| 5032723 |
Charged particle energy analyzer |
Jul. 16, 1991 |
| 5032724 |
Multichannel charged-particle analyzer |
Jul. 16, 1991 |
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