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Class Information
Number: 250/309
Name: Radiant energy > Inspection of solids or liquids by charged particles > Positive ion probe or microscope type
Description: Subject matter wherein the charged particles are positively charged.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6521890 |
Focused ion beam machining method and focused ion beam machining apparatus |
Feb. 18, 2003 |
| 6518571 |
Through-the-substrate investigation of flip-chip IC's |
Feb. 11, 2003 |
| 6497194 |
Focused particle beam systems and methods using a tilt column |
Dec. 24, 2002 |
| 6495826 |
Monochrometer for electron beam |
Dec. 17, 2002 |
| 6489612 |
Method of measuring film thickness |
Dec. 3, 2002 |
| 6486471 |
Composite charge particle beam apparatus |
Nov. 26, 2002 |
| 6479817 |
Cantilever assembly and scanning tip therefor with associated optical sensor |
Nov. 12, 2002 |
| 6476390 |
Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams |
Nov. 5, 2002 |
| 6459082 |
Focused ion beam system |
Oct. 1, 2002 |
| 6452173 |
Charged particle apparatus |
Sep. 17, 2002 |
| 6452172 |
Composite charged particle beam apparatus |
Sep. 17, 2002 |
| 6452161 |
Scanning probe microscope having optical fiber spaced from point of hp |
Sep. 17, 2002 |
| 6452174 |
Charged particle beam apparatus and method of controlling same |
Sep. 17, 2002 |
| 6453063 |
Automatic focused ion beam imaging system and method |
Sep. 17, 2002 |
| 6448554 |
Ion scattering spectrometer |
Sep. 10, 2002 |
| 6444980 |
Apparatus for production and extraction of charged particles |
Sep. 3, 2002 |
| 6437330 |
Method and apparatus for adjusting a charged particle beam of a beam optical system |
Aug. 20, 2002 |
| 6429439 |
Organic field ionization source |
Aug. 6, 2002 |
| 6426500 |
Method for protecting a specific region in a sample applied in preparing an ultra-thin specimen |
Jul. 30, 2002 |
| 6420722 |
Method for sample separation and lift-out with one cut |
Jul. 16, 2002 |
| 6417515 |
In-situ ion implant activation and measurement apparatus |
Jul. 9, 2002 |
| 6417512 |
Sample distortion removing method in thin piece forming |
Jul. 9, 2002 |
| 6414307 |
Method and apparatus for enhancing yield of secondary ions |
Jul. 2, 2002 |
| 6403958 |
Method for preparing a sample for a transmission electron microscope |
Jun. 11, 2002 |
| 6399026 |
Sample holder apparatus |
Jun. 4, 2002 |
| 6392230 |
Focused ion beam forming method |
May. 21, 2002 |
| 6384412 |
Electron microscope with an energy filter having hexapole correctors which are coupled with a projective system downstream of the energy filter |
May. 7, 2002 |
| 6365905 |
Focused ion beam processing apparatus |
Apr. 2, 2002 |
| 6362475 |
Scanning electron microscope/energy dispersive spectroscopy sample preparation method and sample produced thereby |
Mar. 26, 2002 |
| 6348689 |
Focused ion beam apparatus |
Feb. 19, 2002 |
| 6323484 |
Method and apparatus for sample current spectroscopy surface measurement |
Nov. 27, 2001 |
| 6303932 |
Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam |
Oct. 16, 2001 |
| 6300628 |
Focused ion beam machining method and device thereof |
Oct. 9, 2001 |
| 6291820 |
Highly charged ion secondary ion mass spectroscopy |
Sep. 18, 2001 |
| 6291823 |
Ion-induced electron emission microscopy |
Sep. 18, 2001 |
| 6288394 |
Highly charged ion based time of flight emission microscope |
Sep. 11, 2001 |
| 6288393 |
Automated method of circuit analysis |
Sep. 11, 2001 |
| 6281496 |
Observing/forming method with focused ion beam and apparatus therefor |
Aug. 28, 2001 |
| 6271519 |
Analysis of semiconductor surfaces by secondary ion mass spectrometry |
Aug. 7, 2001 |
| 6265722 |
Organic field ionization source |
Jul. 24, 2001 |
| 6259092 |
Thickness determination of carbonaceous overlayers on substrates of differing material |
Jul. 10, 2001 |
| 6246066 |
Magnetic field generator and charged particle beam irradiator |
Jun. 12, 2001 |
| 6232600 |
Analysis of semiconductor surfaces by secondary ion mass spectrometry |
May. 15, 2001 |
| 6229141 |
Analysis of alkali elements in insulators using secondary ion mass spectrometry |
May. 8, 2001 |
| 6225626 |
Through-the-substrate investigation of flip chip IC's |
May. 1, 2001 |
| 6225627 |
Focused ion beam system |
May. 1, 2001 |
| 6218663 |
Process and device for ion thinning in a high resolution transmission electron microscope |
Apr. 17, 2001 |
| 6137110 |
Focused ion beam source method and apparatus |
Oct. 24, 2000 |
| 6121624 |
Method for controlled implantation of elements into the surface or near surface of a substrate |
Sep. 19, 2000 |
| 6118122 |
Ion beam working apparatus |
Sep. 12, 2000 |
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