| |
 |
|
Class Information
Number: 250/309
Name: Radiant energy > Inspection of solids or liquids by charged particles > Positive ion probe or microscope type
Description: Subject matter wherein the charged particles are positively charged.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6791097 |
Adjustable conductance limiting aperture for ion implanters |
Sep. 14, 2004 |
| 6787771 |
Nanodosimeter based on single ion detection |
Sep. 7, 2004 |
| 6784425 |
Energy filter multiplexing |
Aug. 31, 2004 |
| 6777688 |
Rotational stage for high speed, large area scanning in focused beam systems |
Aug. 17, 2004 |
| 6768110 |
Ion beam milling system and method for electron microscopy specimen preparation |
Jul. 27, 2004 |
| 6765205 |
Electron microscope including apparatus for X-ray analysis and method of analyzing specimens using same |
Jul. 20, 2004 |
| 6744058 |
Geometric compensation method for charged particle beam irradiation |
Jun. 1, 2004 |
| 6740877 |
Scanning electron microscope and sample observation method using the same |
May. 25, 2004 |
| 6734427 |
TEM/SEM sample preparation |
May. 11, 2004 |
| 6723987 |
Method of inspecting holes using charged-particle beam |
Apr. 20, 2004 |
| 6713760 |
Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods |
Mar. 30, 2004 |
| 6710338 |
Focused ion beam system |
Mar. 23, 2004 |
| 6710337 |
Laser scanning microscope and shutter for an optical system |
Mar. 23, 2004 |
| 6703612 |
Large geometric factor charged particle spectrometer |
Mar. 9, 2004 |
| 6693278 |
Particle-optical inspection device especially for semiconductor wafers |
Feb. 17, 2004 |
| 6686600 |
TEM sample slicing process |
Feb. 3, 2004 |
| 6683305 |
Method to obtain transparent image of resist contact hole or feature by SEM without deforming the feature by ion beam |
Jan. 27, 2004 |
| 6683307 |
Scanning type charged particle beam microscope |
Jan. 27, 2004 |
| 6683320 |
Through-the-lens neutralization for charged particle beam system |
Jan. 27, 2004 |
| 6677585 |
Scanning charged particle microscope, and focal distance adjusting method and astigmatism correction method thereof |
Jan. 13, 2004 |
| 6677584 |
Manufacturing fluid including fluorescent dye penetrant and method for using to make components |
Jan. 13, 2004 |
| 6674076 |
Humidified imaging with an environmental scanning electron microscope |
Jan. 6, 2004 |
| 6670610 |
System and method for directing a miller |
Dec. 30, 2003 |
| 6670624 |
Ion implanter in-situ mass spectrometer |
Dec. 30, 2003 |
| 6664540 |
Microprobe and sample surface measuring apparatus |
Dec. 16, 2003 |
| 6649919 |
Real time monitoring simultaneous imaging and exposure in charged particle beam systems |
Nov. 18, 2003 |
| 6646261 |
SEM provided with a secondary electron detector having a central electrode |
Nov. 11, 2003 |
| 6642529 |
Methods for the automated testing of reticle feature geometries |
Nov. 4, 2003 |
| 6642519 |
Fine pattern inspection apparatus and method and managing apparatus and method of critical dimension scanning electron microscope device |
Nov. 4, 2003 |
| 6642512 |
Focused ion beam apparatus |
Nov. 4, 2003 |
| 6635871 |
Positron lifetime spectrometer using a DC positron beam |
Oct. 21, 2003 |
| 6630668 |
Remote control of a scanning electron microscope aperture and gun alignment |
Oct. 7, 2003 |
| 6630666 |
Positron trap beam source for positron microbeam production |
Oct. 7, 2003 |
| 6630667 |
Compact, high collection efficiency scintillator for secondary electron detection |
Oct. 7, 2003 |
| 6627889 |
Apparatus and method for observing sample using electron beam |
Sep. 30, 2003 |
| 6627885 |
Method of focused ion beam pattern transfer using a smart dynamic template |
Sep. 30, 2003 |
| 6593583 |
Ion beam processing position correction method |
Jul. 15, 2003 |
| 6583411 |
Multiple local probe measuring device and method |
Jun. 24, 2003 |
| 6580072 |
Method for performing failure analysis on copper metallization |
Jun. 17, 2003 |
| 6580069 |
Atom probe |
Jun. 17, 2003 |
| 6580070 |
Time-of-flight mass spectrometer array instrument |
Jun. 17, 2003 |
| 6576901 |
Arrangement for scanning a specimen receiving device |
Jun. 10, 2003 |
| 6570170 |
Total release method for sample extraction from a charged-particle instrument |
May. 27, 2003 |
| 6565720 |
Substrate removal as a function of sputtered ions |
May. 20, 2003 |
| 6563113 |
Microscope, especially a fluorescence microscope, particularly a stereo fluorescence microscope |
May. 13, 2003 |
| 6555816 |
Scanning electron microscope and sample observation method using the same |
Apr. 29, 2003 |
| 6555362 |
Gene sequence-reading instrument |
Apr. 29, 2003 |
| 6552338 |
Ion photon emission microscope |
Apr. 22, 2003 |
| 6532805 |
Micro-material testing apparatus |
Mar. 18, 2003 |
| 6528786 |
Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods |
Mar. 4, 2003 |
|
|
|
