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Class Information
Number: 250/309
Name: Radiant energy > Inspection of solids or liquids by charged particles > Positive ion probe or microscope type
Description: Subject matter wherein the charged particles are positively charged.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7030375 |
Time of flight electron detector |
Apr. 18, 2006 |
| 7026614 |
Automatic methods for focus and astigmatism corrections in charged-particle beam instrument |
Apr. 11, 2006 |
| 7019294 |
Inspection method and apparatus using charged particle beam |
Mar. 28, 2006 |
| 7015483 |
Focused ion beam system |
Mar. 21, 2006 |
| 7012261 |
Multipole lens, charged-particle beam instrument fitted with multipole lenses, and method of fabricating multipole lens |
Mar. 14, 2006 |
| 7012248 |
Time of flight system on a chip |
Mar. 14, 2006 |
| 7009192 |
Charged particle beam application apparatus |
Mar. 7, 2006 |
| 7005640 |
Method and apparatus for the characterization of a depth structure in a substrate |
Feb. 28, 2006 |
| 7005636 |
Method and apparatus for manipulating a microscopic sample |
Feb. 28, 2006 |
| 6992288 |
Apparatus and method for directing gas towards a specimen |
Jan. 31, 2006 |
| 6991932 |
Carbon nanotube connected instrument |
Jan. 31, 2006 |
| 6982418 |
Contact hole standard test device, method of forming the same, method of testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a wafer |
Jan. 3, 2006 |
| 6979822 |
Charged particle beam system |
Dec. 27, 2005 |
| 6969854 |
Arrangement for holding a particle beam apparatus |
Nov. 29, 2005 |
| 6969847 |
High dynamic range mass spectrometer |
Nov. 29, 2005 |
| 6967327 |
Contact hole standard test device, method of forming the same, method testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a wafer |
Nov. 22, 2005 |
| 6963068 |
Method for the manufacture and transmissive irradiation of a sample, and particle-optical system |
Nov. 8, 2005 |
| 6958124 |
SPM sensor and process for producing it |
Oct. 25, 2005 |
| 6956211 |
Charged particle beam apparatus and charged particle beam irradiation method |
Oct. 18, 2005 |
| 6952014 |
End-point detection for FIB circuit modification |
Oct. 4, 2005 |
| 6950179 |
Shape measuring apparatus, shape measuring method, and aligning method |
Sep. 27, 2005 |
| 6949756 |
Shaped and low density focused ion beams |
Sep. 27, 2005 |
| 6946663 |
Method of fabricating multipole lens, multipole lens, and charged-particle beam instrument equipped therewith |
Sep. 20, 2005 |
| 6943349 |
Multi beam charged particle device |
Sep. 13, 2005 |
| 6936817 |
Optical column for charged particle beam device |
Aug. 30, 2005 |
| 6930316 |
Ion implantation system and ion implantation method |
Aug. 16, 2005 |
| 6930309 |
Dual-energy electron flooding for neutralization of charged substrate |
Aug. 16, 2005 |
| 6924480 |
Apparatus and method for using a volume conductive electrode with ion optical elements for a time-of-flight mass spectrometer |
Aug. 2, 2005 |
| 6919563 |
Defect evaluation apparatus utilizing positrons |
Jul. 19, 2005 |
| 6919556 |
System and method for monitoring and evaluating solid and semi-solid materials |
Jul. 19, 2005 |
| 6914244 |
Ion beam milling system and method for electron microscopy specimen preparation |
Jul. 5, 2005 |
| 6911656 |
Rotational stage for high speed, large area scanning in focused beam systems |
Jun. 28, 2005 |
| 6911832 |
Focused ion beam endpoint detection using charge pulse detection electronics |
Jun. 28, 2005 |
| 6903351 |
Charged particle beam irradiation equipment having scanning electromagnet power supplies |
Jun. 7, 2005 |
| 6900446 |
Charged particle beam irradiation equipment and control method thereof |
May. 31, 2005 |
| 6897440 |
Contact hole standard test device |
May. 24, 2005 |
| 6891171 |
Method for repairing a phase shift mask and a focused ion beam apparatus for carrying out method |
May. 10, 2005 |
| 6888136 |
Method of obtaining a particle-optical image of a sample in a particle-optical device |
May. 3, 2005 |
| 6881970 |
Charged particle beam irradiation equipment and control method thereof |
Apr. 19, 2005 |
| 6875981 |
Scanning atom probe and analysis method utilizing scanning atom probe |
Apr. 5, 2005 |
| 6865927 |
Sharpness testing of micro-objects such as miniature diamond tool tips |
Mar. 15, 2005 |
| 6864479 |
High dynamic range mass spectrometer |
Mar. 8, 2005 |
| 6864481 |
Probe for scanning probe microscope |
Mar. 8, 2005 |
| 6855931 |
Scanning electron microscope and sample observation method using the same |
Feb. 15, 2005 |
| 6855928 |
Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods |
Feb. 15, 2005 |
| 6822247 |
Ion irradiation system |
Nov. 23, 2004 |
| 6818902 |
Positron source |
Nov. 16, 2004 |
| 6815676 |
Material defect evaluation apparatus using positron and its evaluation method |
Nov. 9, 2004 |
| 6803582 |
One dimensional beam blanker array |
Oct. 12, 2004 |
| 6800853 |
Electron microscope and method of photographing TEM images |
Oct. 5, 2004 |
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