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Class Information
Number: 250/309
Name: Radiant energy > Inspection of solids or liquids by charged particles > Positive ion probe or microscope type
Description: Subject matter wherein the charged particles are positively charged.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7427753 |
Method of cross-section milling with focused ion beam (FIB) device |
Sep. 23, 2008 |
| 7423266 |
Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus |
Sep. 9, 2008 |
| 7423269 |
Automated feature analysis with off-axis tilting |
Sep. 9, 2008 |
| 7420166 |
Real-time S-parameter imager |
Sep. 2, 2008 |
| 7417444 |
Method and apparatus for inspecting integrated circuit pattern |
Aug. 26, 2008 |
| 7414243 |
Transmission ion microscope |
Aug. 19, 2008 |
| 7408154 |
Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes |
Aug. 5, 2008 |
| 7391039 |
Semiconductor processing method and system |
Jun. 24, 2008 |
| 7391038 |
Technique for isocentric ion beam scanning |
Jun. 24, 2008 |
| 7391037 |
Apparatus for generating a plurality of beamlets |
Jun. 24, 2008 |
| 7391022 |
Scanning probe microscope |
Jun. 24, 2008 |
| 7385206 |
Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method |
Jun. 10, 2008 |
| 7381970 |
Specimen stage for charged-particle scanning microscopy |
Jun. 3, 2008 |
| 7381971 |
Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope |
Jun. 3, 2008 |
| 7375330 |
Charged particle beam equipment |
May. 20, 2008 |
| 7375325 |
Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used therefor |
May. 20, 2008 |
| 7375322 |
Cantilever holder and scanning probe microscope |
May. 20, 2008 |
| 7375321 |
Dynamics bionems sensors and arrays of bionems sensor immersed in fluids |
May. 20, 2008 |
| 7372026 |
System for repositioning a microfabricated cantilever |
May. 13, 2008 |
| 7372025 |
Scanning probe microscope using a surface drive actuator to position the scanning tip |
May. 13, 2008 |
| 7372050 |
Method of preventing charging, and apparatus for charged particle beam using the same |
May. 13, 2008 |
| 7368727 |
Atomic level ion source and method of manufacture and operation |
May. 6, 2008 |
| 7368729 |
Method, apparatus and system for specimen fabrication by using an ion beam |
May. 6, 2008 |
| 7365323 |
Environmental scanning electron microcope |
Apr. 29, 2008 |
| 7361909 |
Method and apparatus for correcting drift during automated FIB processing |
Apr. 22, 2008 |
| 7358491 |
Method and apparatus for the depth-resolved characterization of a layer of a carrier |
Apr. 15, 2008 |
| 7358492 |
Apparatus, method, and computer program product for deconvolution analysis |
Apr. 15, 2008 |
| 7351971 |
Charged-particle beam instrument and method of detection |
Apr. 1, 2008 |
| 7351966 |
High-resolution optical channel for non-destructive navigation and processing of integrated circuits |
Apr. 1, 2008 |
| 7351525 |
Positronium-mediated method for identifying a contaminant gas in a gaseous mixture |
Apr. 1, 2008 |
| 7348571 |
Scanning mechanism for scanning probe microscope and scanning probe microscope |
Mar. 25, 2008 |
| 7348556 |
Method of measuring three-dimensional surface roughness of a structure |
Mar. 25, 2008 |
| 7348559 |
Defect inspection and charged particle beam apparatus |
Mar. 25, 2008 |
| 7339167 |
Charged particle beam apparatus |
Mar. 4, 2008 |
| 7326923 |
Programmable molecular manipulating processes |
Feb. 5, 2008 |
| 7323697 |
Wafer alignment method for dual beam system |
Jan. 29, 2008 |
| 7323685 |
Ion beam processing method |
Jan. 29, 2008 |
| 7321118 |
Scanning transmission ion microscope |
Jan. 22, 2008 |
| 7319223 |
Method and apparatus for characterizing a recess located on a surface of a substrate |
Jan. 15, 2008 |
| 7304320 |
Charged beam exposure apparatus, charged beam control method and manufacturing method of semiconductor device |
Dec. 4, 2007 |
| 7297947 |
Apparatus and method for evaluating cross section of specimen |
Nov. 20, 2007 |
| 7285778 |
Probe current imaging |
Oct. 23, 2007 |
| 7285785 |
Apparatus with permanent magnetic lenses |
Oct. 23, 2007 |
| 7285792 |
Scratch repairing processing method and scanning probe microscope (SPM) used therefor |
Oct. 23, 2007 |
| 7276693 |
Inspection method and apparatus using charged particle beam |
Oct. 2, 2007 |
| 7276691 |
Ion beam device and ion beam processing method |
Oct. 2, 2007 |
| 7268348 |
Scanning probe for data storage and microscopy |
Sep. 11, 2007 |
| 7268358 |
Method of modulating laser-accelerated protons for radiation therapy |
Sep. 11, 2007 |
| 7259372 |
Processing method using probe of scanning probe microscope |
Aug. 21, 2007 |
| 7259373 |
Apparatus and method for controlled particle beam manufacturing |
Aug. 21, 2007 |
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