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Class Information
Number: 250/307
Name: Radiant energy > Inspection of solids or liquids by charged particles > Methods
Description: Subject matter which includes processes for inspecting an object or material with charged particles.

Patents under this class:

Patent Number Title Of Patent Date Issued
8710439 Charged particle beam apparatus Apr. 29, 2014
8710438 Scanning transmission electron microscope and axial adjustment method thereof Apr. 29, 2014
8707461 Scanning method for scanning a sample with a probe Apr. 22, 2014
8704528 Method and apparatus for inspecting electronic component Apr. 22, 2014
8704177 Electron microscope, electron-microscope image-reconstruction system and electron-microscope image-reconstruction method Apr. 22, 2014
8704176 Charged particle microscope providing depth-resolved imagery Apr. 22, 2014
8704175 Scanning electron microscope Apr. 22, 2014
8694382 System and method for automatic guidance control of a vehicle Apr. 8, 2014
8692197 Scanning electron microscope optical condition setting method and scanning electron microscope Apr. 8, 2014
8692193 Method for inspecting EUV reticle and apparatus thereof Apr. 8, 2014
8686379 Method and apparatus for preparing serial planar cross sections Apr. 1, 2014
8686359 Characterization of nanoscale structures using an ultrafast electron microscope Apr. 1, 2014
8686358 Sub-microsecond-resolution probe microscopy Apr. 1, 2014
8680488 System and method for producing and using multiple electron beams with quantized orbital angular momentum in an electron microscope Mar. 25, 2014
8680465 Charged particle beam apparatus and film thickness measurement method Mar. 25, 2014
8674323 Forming an electron microscope sample from high-pressure frozen material Mar. 18, 2014
8674320 Deconvolution of time-gated cathodoluminescence images Mar. 18, 2014
8674317 Sample surface inspection apparatus and method Mar. 18, 2014
8674301 Magnifying observation apparatus Mar. 18, 2014
8674300 Feedback loop for emitter flashing Mar. 18, 2014
8669525 Sample inspection methods, systems and components Mar. 11, 2014
8669524 Scanning incremental focus microscopy Mar. 11, 2014
8669523 Contour-based defect detection using an inspection apparatus Mar. 11, 2014
8669522 Mask inspection apparatus and mask inspection method Mar. 11, 2014
8664596 Method for characterizing identified defects during charged particle beam inspection and application thereof Mar. 4, 2014
8664595 Cluster analysis of unknowns in SEM-EDS dataset Mar. 4, 2014
8664594 Electron-optical system for high-speed and high-sensitivity inspections Mar. 4, 2014
8658987 Circuit-pattern inspection device Feb. 25, 2014
8658974 Environmental cell for a particle-optical apparatus Feb. 25, 2014
8653489 Ion beam sample preparation apparatus and methods Feb. 18, 2014
8653472 Electromagnetic field application system Feb. 18, 2014
8653458 Charged particle beam device Feb. 18, 2014
8653457 Spectroscopy technique using merged spectral data Feb. 18, 2014
8653456 Pattern inspection method, pattern inspection program, and electronic device inspection system Feb. 18, 2014
8653455 Charged particle beam device and evaluation method using the charged particle beam device Feb. 18, 2014
8653454 Electron-beam image reconstruction Feb. 18, 2014
8648300 Charged particle beam apparatus Feb. 11, 2014
8648299 Isotope ion microscope methods and systems Feb. 11, 2014
8644571 Intensity-modulated proton therapy Feb. 4, 2014
8642981 Electron microscope assembly for viewing the wafer plane image of an electron beam lithography tool Feb. 4, 2014
8642980 Composite charged particle beam apparatus Feb. 4, 2014
8642959 Method and system of performing three-dimensional imaging using an electron microscope Feb. 4, 2014
8642957 Scanning electron microscope and a method for imaging a specimen using the same Feb. 4, 2014
8642956 Transmission electron microscope and method of operating a transmission electron microscope Feb. 4, 2014
8639463 Electron beam apparatus for inspecting a pattern on a sample using multiple electron beams Jan. 28, 2014
8637834 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Jan. 28, 2014
8637821 Blocking member for use in the diffraction plane of a TEM Jan. 28, 2014
8637819 Cross-section processing and observation apparatus Jan. 28, 2014
8635003 System and method for calibration and fault detection of non-contact position sensor Jan. 21, 2014
8633457 Background reduction system including louver Jan. 21, 2014

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