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Class Information
Number: 250/307
Name: Radiant energy > Inspection of solids or liquids by charged particles > Methods
Description: Subject matter which includes processes for inspecting an object or material with charged particles.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7626166 |
Electron microscope |
Dec. 1, 2009 |
| 7626164 |
Method of scanning a substrate, and method and apparatus for analyzing crystal characteristics |
Dec. 1, 2009 |
| 7626163 |
Defect review method and device for semiconductor device |
Dec. 1, 2009 |
| 7619220 |
Method of measuring aberrations and correcting aberrations using Ronchigram and electron microscope |
Nov. 17, 2009 |
| 7618465 |
Near-field antenna |
Nov. 17, 2009 |
| 7615746 |
Method and apparatus for evaluating pattern shape of a semiconductor device |
Nov. 10, 2009 |
| 7615745 |
Method for separating a minute sample from a work piece |
Nov. 10, 2009 |
| 7615743 |
Overcoming space charge effects in ion cyclotron resonance mass spectrometers |
Nov. 10, 2009 |
| 7615738 |
Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
Nov. 10, 2009 |
| 7612337 |
Focused ion beam system and a method of sample preparation and observation |
Nov. 3, 2009 |
| 7612334 |
Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same |
Nov. 3, 2009 |
| 7608845 |
Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect |
Oct. 27, 2009 |
| 7608821 |
Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method |
Oct. 27, 2009 |
| 7608820 |
Spin microscope based on optically detected magnetic resonance |
Oct. 27, 2009 |
| 7605381 |
Charged particle beam alignment method and charged particle beam apparatus |
Oct. 20, 2009 |
| 7605368 |
Vibration-type cantilever holder and scanning probe microscope |
Oct. 20, 2009 |
| 7605364 |
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope |
Oct. 20, 2009 |
| 7601957 |
Electron microscope and combined illumination lens |
Oct. 13, 2009 |
| 7598499 |
Charged-particle exposure apparatus |
Oct. 6, 2009 |
| 7598492 |
Charged particle microscopy using super resolution |
Oct. 6, 2009 |
| 7598490 |
SEM-type reviewing apparatus and a method for reviewing defects using the same |
Oct. 6, 2009 |
| 7595490 |
Charged particle beam emitting device and method for operating a charged particle beam emitting device |
Sep. 29, 2009 |
| 7595489 |
Method and apparatus for material identification |
Sep. 29, 2009 |
| 7595488 |
Method and apparatus for specifying working position on a sample and method of working the sample |
Sep. 29, 2009 |
| 7592606 |
Manufacturing equipment using ION beam or electron beam |
Sep. 22, 2009 |
| 7592604 |
Charged particle beam apparatus |
Sep. 22, 2009 |
| 7592591 |
X-ray analyzer using electron beam |
Sep. 22, 2009 |
| 7586093 |
Apparatus and method for inspecting a sample of a specimen by means of an electron beam |
Sep. 8, 2009 |
| 7582868 |
Method of nano thin film thickness measurement by auger electron spectroscopy |
Sep. 1, 2009 |
| 7579591 |
Method and apparatus for analyzing sample |
Aug. 25, 2009 |
| 7578853 |
Scanning probe microscope system |
Aug. 25, 2009 |
| 7576325 |
Electron microscopic method and electron microscope using same |
Aug. 18, 2009 |
| 7573053 |
Polarized pulsed front-end beam source for electron microscope |
Aug. 11, 2009 |
| 7573049 |
Wafer alignment method for dual beam system |
Aug. 11, 2009 |
| 7573047 |
Wafer holder and sample producing apparatus using it |
Aug. 11, 2009 |
| 7573030 |
Specimen observation method |
Aug. 11, 2009 |
| 7569818 |
Method to reduce cross talk in a multi column e-beam test system |
Aug. 4, 2009 |
| 7569817 |
Scanning probe apparatus |
Aug. 4, 2009 |
| 7566888 |
Method and system for treating an interior surface of a workpiece using a charged particle beam |
Jul. 28, 2009 |
| 7566873 |
High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus |
Jul. 28, 2009 |
| 7566871 |
Method and apparatus for pattern inspection |
Jul. 28, 2009 |
| 7560940 |
Method and installation for analyzing an integrated circuit |
Jul. 14, 2009 |
| 7560693 |
Electron-beam size measuring apparatus and size measuring method with electron beams |
Jul. 14, 2009 |
| 7560692 |
Method of TEM sample preparation for electron holography for semiconductor devices |
Jul. 14, 2009 |
| 7560691 |
High-resolution auger electron spectrometer |
Jul. 14, 2009 |
| 7557347 |
Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same |
Jul. 7, 2009 |
| 7554082 |
Pattern observation apparatus, pattern observation method, method of manufacturing semiconductor device, and program |
Jun. 30, 2009 |
| 7553335 |
Scanning probe microscope probe and manufacturing method therefor, scanning probe microscope and using method therefor, needle-like body and manufacturing method therefor, electronic device an |
Jun. 30, 2009 |
| 7550739 |
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate |
Jun. 23, 2009 |
| 7550724 |
Electron beam device and its control method |
Jun. 23, 2009 |
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