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Class Information
Number: 250/307
Name: Radiant energy > Inspection of solids or liquids by charged particles > Methods
Description: Subject matter which includes processes for inspecting an object or material with charged particles.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459704 |
Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms |
Dec. 2, 2008 |
| 7459699 |
Method of determining processing position in charged particle beam apparatus, and infrared microscope used in the method |
Dec. 2, 2008 |
| 7459683 |
Charged particle beam device with DF-STEM image valuation method |
Dec. 2, 2008 |
| 7459682 |
Spin-polarized electron source and spin-polarized scanning tunneling microscope |
Dec. 2, 2008 |
| 7456413 |
Apparatus for evacuating a sample |
Nov. 25, 2008 |
| 7456401 |
Projection electron microscope, electron microscope, specimen surface observing method and micro device producing method |
Nov. 25, 2008 |
| 7456400 |
Scanning probe microscope and scanning method |
Nov. 25, 2008 |
| 7456399 |
Calibrating multiple photoelectron spectroscopy systems |
Nov. 25, 2008 |
| 7453073 |
Method and equipment for specimen preparation |
Nov. 18, 2008 |
| 7453063 |
Calibration substrate and method for calibrating a lithographic apparatus |
Nov. 18, 2008 |
| 7449699 |
Method and apparatus for creating a topography at a surface |
Nov. 11, 2008 |
| 7449690 |
Inspection method and inspection apparatus using charged particle beam |
Nov. 11, 2008 |
| 7449688 |
Deconvolving far-field images using scanned probe data |
Nov. 11, 2008 |
| 7446313 |
Scanning electron microscope |
Nov. 4, 2008 |
| 7446309 |
In-plane distribution measurement method |
Nov. 4, 2008 |
| 7444857 |
Software synchronization of multiple scanning probes |
Nov. 4, 2008 |
| 7442930 |
Method for correcting distortions in electron backscatter diffraction patterns |
Oct. 28, 2008 |
| 7442929 |
Scanning electron microscope |
Oct. 28, 2008 |
| 7442926 |
Nano tip and fabrication method of the same |
Oct. 28, 2008 |
| 7442925 |
Working method using scanning probe |
Oct. 28, 2008 |
| 7442924 |
Repetitive circumferential milling for sample preparation |
Oct. 28, 2008 |
| 7442923 |
Scanning electron microscope |
Oct. 28, 2008 |
| 7439506 |
Method and an apparatus of an inspection system using an electron beam |
Oct. 21, 2008 |
| 7439505 |
Scanning electron microscope |
Oct. 21, 2008 |
| 7439502 |
Electron beam apparatus and device production method using the electron beam apparatus |
Oct. 21, 2008 |
| 7439501 |
Direct write nanolithography using heated tip |
Oct. 21, 2008 |
| 7439500 |
Analyzing system and charged particle beam device |
Oct. 21, 2008 |
| 7435959 |
Microstructured pattern inspection method |
Oct. 14, 2008 |
| 7435957 |
Charged particle beam equipment and charged particle microscopy |
Oct. 14, 2008 |
| 7435955 |
Scanning probe microscope control system |
Oct. 14, 2008 |
| 7435954 |
Electron microscope, methods to determine the contact point and the contact of the probe |
Oct. 14, 2008 |
| 7432511 |
Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation |
Oct. 7, 2008 |
| 7432503 |
Scanning electron microscope and method for detecting an image using the same |
Oct. 7, 2008 |
| 7432502 |
Information acquisition method and apparatus for information acquisition |
Oct. 7, 2008 |
| 7429733 |
Method and sample for radiation microscopy including a particle beam channel formed in the sample source |
Sep. 30, 2008 |
| 7427757 |
Large collection angle x-ray monochromators for electron probe microanalysis |
Sep. 23, 2008 |
| 7427756 |
Method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope |
Sep. 23, 2008 |
| 7427755 |
Integrated electron beam tip and sample heating device for a scanning tunneling microscope |
Sep. 23, 2008 |
| 7427754 |
Telegraph signal microscopy device and method |
Sep. 23, 2008 |
| 7427753 |
Method of cross-section milling with focused ion beam (FIB) device |
Sep. 23, 2008 |
| 7425712 |
Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation |
Sep. 16, 2008 |
| 7425704 |
Inspection method and apparatus using an electron beam |
Sep. 16, 2008 |
| 7425702 |
Charged particle beam apparatus |
Sep. 16, 2008 |
| 7425701 |
Electron-beam device and detector system |
Sep. 16, 2008 |
| 7423269 |
Automated feature analysis with off-axis tilting |
Sep. 9, 2008 |
| 7423266 |
Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus |
Sep. 9, 2008 |
| 7423264 |
Atomic force microscope |
Sep. 9, 2008 |
| 7423263 |
Planar view sample preparation |
Sep. 9, 2008 |
| 7421370 |
Method and apparatus for measuring a characteristic of a sample feature |
Sep. 2, 2008 |
| 7420668 |
Wafer surface inspection apparatus and wafer surface inspection method |
Sep. 2, 2008 |
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