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Class Information
Number: 250/306
Name: Radiant energy > Inspection of solids or liquids by charged particles
Description: Subject matter wherein the apparatus comprises a source of or means which impels charged particles toward a nongaseous object or material to be studied and both means to support, position or accommodate the object or material relative to the source or a detector, and means to detect such particles that pass near to or through the object or material, or are reflected from or diffracted by said object or material, or secondary radiation emitted from the object or material.

Sub-classes under this class:

Class Number Class Name Patents
250/440.11 Analyte supports 329
250/311 Electron microscope type 1,569
250/310 Electron probe type 2,453
250/308 Including a radioactive source 183
250/307 Methods 2,080
250/309 Positive ion probe or microscope type 678

Patents under this class:

Patent Number Title Of Patent Date Issued
8712184 Method and system for filtering noises in an image scanned by charged particles Apr. 29, 2014
8710464 Specimen preparation device, and control method in specimen preparation device Apr. 29, 2014
8710439 Charged particle beam apparatus Apr. 29, 2014
8707461 Scanning method for scanning a sample with a probe Apr. 22, 2014
8704177 Electron microscope, electron-microscope image-reconstruction system and electron-microscope image-reconstruction method Apr. 22, 2014
8704176 Charged particle microscope providing depth-resolved imagery Apr. 22, 2014
8692196 Method of use for a multipole detector for a transmission electron microscope Apr. 8, 2014
8692195 Charged particle radiation device Apr. 8, 2014
8686360 Micro-sample processing method, observation method and apparatus Apr. 1, 2014
8686359 Characterization of nanoscale structures using an ultrafast electron microscope Apr. 1, 2014
8686358 Sub-microsecond-resolution probe microscopy Apr. 1, 2014
8680466 Electron microscope, and specimen holding method Mar. 25, 2014
8680465 Charged particle beam apparatus and film thickness measurement method Mar. 25, 2014
8674320 Deconvolution of time-gated cathodoluminescence images Mar. 18, 2014
8674317 Sample surface inspection apparatus and method Mar. 18, 2014
8674301 Magnifying observation apparatus Mar. 18, 2014
8674300 Feedback loop for emitter flashing Mar. 18, 2014
8669525 Sample inspection methods, systems and components Mar. 11, 2014
8669523 Contour-based defect detection using an inspection apparatus Mar. 11, 2014
8664599 Electron microscope Mar. 4, 2014
8664596 Method for characterizing identified defects during charged particle beam inspection and application thereof Mar. 4, 2014
8664595 Cluster analysis of unknowns in SEM-EDS dataset Mar. 4, 2014
8664594 Electron-optical system for high-speed and high-sensitivity inspections Mar. 4, 2014
8658987 Circuit-pattern inspection device Feb. 25, 2014
8658974 Environmental cell for a particle-optical apparatus Feb. 25, 2014
8653472 Electromagnetic field application system Feb. 18, 2014
8653458 Charged particle beam device Feb. 18, 2014
8653457 Spectroscopy technique using merged spectral data Feb. 18, 2014
8653456 Pattern inspection method, pattern inspection program, and electronic device inspection system Feb. 18, 2014
8653455 Charged particle beam device and evaluation method using the charged particle beam device Feb. 18, 2014
8653454 Electron-beam image reconstruction Feb. 18, 2014
8648301 Particle beam system having a hollow light guide Feb. 11, 2014
8648300 Charged particle beam apparatus Feb. 11, 2014
8648299 Isotope ion microscope methods and systems Feb. 11, 2014
8642981 Electron microscope assembly for viewing the wafer plane image of an electron beam lithography tool Feb. 4, 2014
8642980 Composite charged particle beam apparatus Feb. 4, 2014
8642959 Method and system of performing three-dimensional imaging using an electron microscope Feb. 4, 2014
8642957 Scanning electron microscope and a method for imaging a specimen using the same Feb. 4, 2014
8637836 High aspect ratio sample holder Jan. 28, 2014
8637821 Blocking member for use in the diffraction plane of a TEM Jan. 28, 2014
8637820 Scanning electron microscope and inspection method using same Jan. 28, 2014
8637819 Cross-section processing and observation apparatus Jan. 28, 2014
8633457 Background reduction system including louver Jan. 21, 2014
8633456 Method for centering an optical element in a TEM comprising a contrast enhancing element Jan. 21, 2014
8633439 System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope Jan. 21, 2014
8633438 Ultrafast electron diffraction device Jan. 21, 2014
8629395 Charged particle beam apparatus Jan. 14, 2014
8629394 Charged particle beam device and method for correcting position with respect to charged particle beam Jan. 14, 2014
8624184 Methods for spatially resolved alignment of independent spectroscopic data from scanning transmission electron microscopes Jan. 7, 2014
8624182 Electro-optical inspection apparatus and method with dust or particle collection function Jan. 7, 2014

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