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Class Information
Number: 250/306
Name: Radiant energy > Inspection of solids or liquids by charged particles
Description: Subject matter wherein the apparatus comprises a source of or means which impels charged particles toward a nongaseous object or material to be studied and both means to support, position or accommodate the object or material relative to the source or a detector, and means to detect such particles that pass near to or through the object or material, or are reflected from or diffracted by said object or material, or secondary radiation emitted from the object or material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459683 |
Charged particle beam device with DF-STEM image valuation method |
Dec. 2, 2008 |
| 7459682 |
Spin-polarized electron source and spin-polarized scanning tunneling microscope |
Dec. 2, 2008 |
| 7459681 |
Scanning electron microscope |
Dec. 2, 2008 |
| 7459680 |
Method of analysis using energy loss spectrometer and transmission electron microscope equipped therewith |
Dec. 2, 2008 |
| 7459674 |
Optical tweezers |
Dec. 2, 2008 |
| 7456413 |
Apparatus for evacuating a sample |
Nov. 25, 2008 |
| 7456402 |
Detector optics for multiple electron beam test system |
Nov. 25, 2008 |
| 7456400 |
Scanning probe microscope and scanning method |
Nov. 25, 2008 |
| 7456399 |
Calibrating multiple photoelectron spectroscopy systems |
Nov. 25, 2008 |
| 7453074 |
Ion implanter with ionization chamber electrode design |
Nov. 18, 2008 |
| 7453063 |
Calibration substrate and method for calibrating a lithographic apparatus |
Nov. 18, 2008 |
| 7446324 |
Methods utilizing scanning probe microscope tips and products thereof or produced thereby |
Nov. 4, 2008 |
| 7446313 |
Scanning electron microscope |
Nov. 4, 2008 |
| 7446309 |
In-plane distribution measurement method |
Nov. 4, 2008 |
| 7444857 |
Software synchronization of multiple scanning probes |
Nov. 4, 2008 |
| 7442929 |
Scanning electron microscope |
Oct. 28, 2008 |
| 7442926 |
Nano tip and fabrication method of the same |
Oct. 28, 2008 |
| 7442925 |
Working method using scanning probe |
Oct. 28, 2008 |
| 7442924 |
Repetitive circumferential milling for sample preparation |
Oct. 28, 2008 |
| 7442922 |
Method for locally highly resolved, mass-spectroscopic characterization of surfaces using scanning probe technology |
Oct. 28, 2008 |
| 7439502 |
Electron beam apparatus and device production method using the electron beam apparatus |
Oct. 21, 2008 |
| 7439501 |
Direct write nanolithography using heated tip |
Oct. 21, 2008 |
| 7435973 |
Material processing system and method |
Oct. 14, 2008 |
| 7435960 |
Charged particle beam apparatus |
Oct. 14, 2008 |
| 7435959 |
Microstructured pattern inspection method |
Oct. 14, 2008 |
| 7435958 |
Electron beam apparatus and method for production of its specimen chamber |
Oct. 14, 2008 |
| 7435957 |
Charged particle beam equipment and charged particle microscopy |
Oct. 14, 2008 |
| 7435955 |
Scanning probe microscope control system |
Oct. 14, 2008 |
| 7435954 |
Electron microscope, methods to determine the contact point and the contact of the probe |
Oct. 14, 2008 |
| 7433751 |
Sorting a group of integrated circuit devices for those devices requiring special testing |
Oct. 7, 2008 |
| 7432511 |
Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation |
Oct. 7, 2008 |
| 7432503 |
Scanning electron microscope and method for detecting an image using the same |
Oct. 7, 2008 |
| 7432502 |
Information acquisition method and apparatus for information acquisition |
Oct. 7, 2008 |
| 7430484 |
Signal processing method and apparatus for use in real-time subnanometer scale position measurements with the aid of probing sensors and beams scanning periodically undulating surfaces such as |
Sep. 30, 2008 |
| 7429733 |
Method and sample for radiation microscopy including a particle beam channel formed in the sample source |
Sep. 30, 2008 |
| 7429732 |
Scanning probe microscopy method and apparatus utilizing sample pitch |
Sep. 30, 2008 |
| 7427757 |
Large collection angle x-ray monochromators for electron probe microanalysis |
Sep. 23, 2008 |
| 7427756 |
Method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope |
Sep. 23, 2008 |
| 7427755 |
Integrated electron beam tip and sample heating device for a scanning tunneling microscope |
Sep. 23, 2008 |
| 7427754 |
Telegraph signal microscopy device and method |
Sep. 23, 2008 |
| 7427753 |
Method of cross-section milling with focused ion beam (FIB) device |
Sep. 23, 2008 |
| 7425712 |
Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation |
Sep. 16, 2008 |
| 7425704 |
Inspection method and apparatus using an electron beam |
Sep. 16, 2008 |
| 7425701 |
Electron-beam device and detector system |
Sep. 16, 2008 |
| 7425698 |
Feedback influenced increased-quality-factor scanning probe microscope |
Sep. 16, 2008 |
| 7423746 |
Circuit-pattern inspecting apparatus and method |
Sep. 9, 2008 |
| 7423269 |
Automated feature analysis with off-axis tilting |
Sep. 9, 2008 |
| 7423266 |
Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus |
Sep. 9, 2008 |
| 7423265 |
Near-field aperture having a fractal iterate shape |
Sep. 9, 2008 |
| 7423264 |
Atomic force microscope |
Sep. 9, 2008 |
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