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Class Information
Number: 250/306
Name: Radiant energy > Inspection of solids or liquids by charged particles
Description: Subject matter wherein the apparatus comprises a source of or means which impels charged particles toward a nongaseous object or material to be studied and both means to support, position or accommodate the object or material relative to the source or a detector, and means to detect such particles that pass near to or through the object or material, or are reflected from or diffracted by said object or material, or secondary radiation emitted from the object or material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619220 |
Method of measuring aberrations and correcting aberrations using Ronchigram and electron microscope |
Nov. 17, 2009 |
| 7619219 |
Scanning electron microscope |
Nov. 17, 2009 |
| 7619218 |
Charged particle optical apparatus with aberration corrector |
Nov. 17, 2009 |
| 7618465 |
Near-field antenna |
Nov. 17, 2009 |
| 7615764 |
Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus |
Nov. 10, 2009 |
| 7615739 |
Spin microscope based on optically detected magnetic resonance |
Nov. 10, 2009 |
| 7615738 |
Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
Nov. 10, 2009 |
| 7612337 |
Focused ion beam system and a method of sample preparation and observation |
Nov. 3, 2009 |
| 7612336 |
Scanning electron microscope having a monochromator |
Nov. 3, 2009 |
| 7612334 |
Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same |
Nov. 3, 2009 |
| 7609048 |
Probe microscope and measuring method using probe microscope |
Oct. 27, 2009 |
| 7608845 |
Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect |
Oct. 27, 2009 |
| 7608821 |
Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method |
Oct. 27, 2009 |
| 7608820 |
Spin microscope based on optically detected magnetic resonance |
Oct. 27, 2009 |
| 7605368 |
Vibration-type cantilever holder and scanning probe microscope |
Oct. 20, 2009 |
| 7605364 |
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope |
Oct. 20, 2009 |
| 7601957 |
Electron microscope and combined illumination lens |
Oct. 13, 2009 |
| 7601955 |
Scanning electron microscope |
Oct. 13, 2009 |
| 7598492 |
Charged particle microscopy using super resolution |
Oct. 6, 2009 |
| 7598490 |
SEM-type reviewing apparatus and a method for reviewing defects using the same |
Oct. 6, 2009 |
| 7595490 |
Charged particle beam emitting device and method for operating a charged particle beam emitting device |
Sep. 29, 2009 |
| 7595488 |
Method and apparatus for specifying working position on a sample and method of working the sample |
Sep. 29, 2009 |
| 7592606 |
Manufacturing equipment using ION beam or electron beam |
Sep. 22, 2009 |
| 7592604 |
Charged particle beam apparatus |
Sep. 22, 2009 |
| 7592591 |
X-ray analyzer using electron beam |
Sep. 22, 2009 |
| 7589322 |
Sample measuring device |
Sep. 15, 2009 |
| 7586093 |
Apparatus and method for inspecting a sample of a specimen by means of an electron beam |
Sep. 8, 2009 |
| 7582868 |
Method of nano thin film thickness measurement by auger electron spectroscopy |
Sep. 1, 2009 |
| 7579591 |
Method and apparatus for analyzing sample |
Aug. 25, 2009 |
| 7578853 |
Scanning probe microscope system |
Aug. 25, 2009 |
| 7576325 |
Electron microscopic method and electron microscope using same |
Aug. 18, 2009 |
| 7573053 |
Polarized pulsed front-end beam source for electron microscope |
Aug. 11, 2009 |
| 7573049 |
Wafer alignment method for dual beam system |
Aug. 11, 2009 |
| 7573047 |
Wafer holder and sample producing apparatus using it |
Aug. 11, 2009 |
| 7573030 |
Specimen observation method |
Aug. 11, 2009 |
| 7569838 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system |
Aug. 4, 2009 |
| 7569818 |
Method to reduce cross talk in a multi column e-beam test system |
Aug. 4, 2009 |
| 7569817 |
Scanning probe apparatus |
Aug. 4, 2009 |
| 7566892 |
Electron beam apparatus and method for production of its specimen chamber |
Jul. 28, 2009 |
| 7566873 |
High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus |
Jul. 28, 2009 |
| 7566871 |
Method and apparatus for pattern inspection |
Jul. 28, 2009 |
| 7560693 |
Electron-beam size measuring apparatus and size measuring method with electron beams |
Jul. 14, 2009 |
| 7560692 |
Method of TEM sample preparation for electron holography for semiconductor devices |
Jul. 14, 2009 |
| 7560691 |
High-resolution auger electron spectrometer |
Jul. 14, 2009 |
| 7560675 |
Microscope system having a controlling unit for switching between a plurality of observation states |
Jul. 14, 2009 |
| 7557347 |
Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same |
Jul. 7, 2009 |
| 7556968 |
Scanning probe microscope and molecular structure change observation method |
Jul. 7, 2009 |
| 7554099 |
Ultra-thin liquid control plate and combination of box-like member and the control plate |
Jun. 30, 2009 |
| 7554082 |
Pattern observation apparatus, pattern observation method, method of manufacturing semiconductor device, and program |
Jun. 30, 2009 |
| 7553335 |
Scanning probe microscope probe and manufacturing method therefor, scanning probe microscope and using method therefor, needle-like body and manufacturing method therefor, electronic device an |
Jun. 30, 2009 |
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