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Class Information
Number: 250/305
Name: Radiant energy > Electron energy analysis
Description: Subject matter having means for or method of separating electrons according to their respective energies (including velocity and momentum) and detecting the separated electrons.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459680 |
Method of analysis using energy loss spectrometer and transmission electron microscope equipped therewith |
Dec. 2, 2008 |
| 7456399 |
Calibrating multiple photoelectron spectroscopy systems |
Nov. 25, 2008 |
| 7453062 |
Energy-filtering cathode lens microscopy instrument |
Nov. 18, 2008 |
| 7439500 |
Analyzing system and charged particle beam device |
Oct. 21, 2008 |
| 7439520 |
Ion optics systems |
Oct. 21, 2008 |
| 7432502 |
Information acquisition method and apparatus for information acquisition |
Oct. 7, 2008 |
| 7420163 |
Determining layer thickness using photoelectron spectroscopy |
Sep. 2, 2008 |
| 7411188 |
Method and system for non-destructive distribution profiling of an element in a film |
Aug. 12, 2008 |
| 7399963 |
Photoelectron spectroscopy apparatus and method of use |
Jul. 15, 2008 |
| 7388198 |
Electron microscope |
Jun. 17, 2008 |
| 7375327 |
Method and device for measuring quantity of wear |
May. 20, 2008 |
| 7372047 |
Charged particle system and a method for measuring image magnification |
May. 13, 2008 |
| 7365313 |
Fast time-of-flight mass spectrometer with improved data acquisition system |
Apr. 29, 2008 |
| 7365320 |
Methods and systems for process monitoring using x-ray emission |
Apr. 29, 2008 |
| 7361895 |
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus |
Apr. 22, 2008 |
| 7358492 |
Apparatus, method, and computer program product for deconvolution analysis |
Apr. 15, 2008 |
| 7355175 |
Method and apparatus for automatically correcting charged-particle beam and method of controlling aberration corrector for charged-particle beam |
Apr. 8, 2008 |
| 7351969 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system |
Apr. 1, 2008 |
| 7348566 |
Aberration-correcting cathode lens microscopy instrument |
Mar. 25, 2008 |
| 7315024 |
Monochromator and scanning electron microscope using the same |
Jan. 1, 2008 |
| 7312446 |
Methods and systems for process monitoring using x-ray emission |
Dec. 25, 2007 |
| 7301146 |
Probe driving method, and probe apparatus |
Nov. 27, 2007 |
| 7288772 |
Diagnostic system for profiling micro-beams |
Oct. 30, 2007 |
| 7285775 |
Endpoint detection for the patterning of layered materials |
Oct. 23, 2007 |
| 7285776 |
Scanning transmission electron microscope and electron energy loss spectroscopy |
Oct. 23, 2007 |
| 7276694 |
Defect detection using energy spectrometer |
Oct. 2, 2007 |
| 7265346 |
Multiple detection systems |
Sep. 4, 2007 |
| 7260178 |
Diffractometer and method for diffraction analysis |
Aug. 21, 2007 |
| 7256399 |
Non-destructive in-situ elemental profiling |
Aug. 14, 2007 |
| 7250599 |
Energy filter image generator for electrically charged particles and the use thereof |
Jul. 31, 2007 |
| 7250601 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method |
Jul. 31, 2007 |
| 7238938 |
Energy selecting slit and energy selective sample analysis systems utilizing the same |
Jul. 3, 2007 |
| 7223976 |
Charged particle beam apparatus |
May. 29, 2007 |
| 7220964 |
Film thickness and composition measurement via auger electron spectroscopy and electron probe microanalysis |
May. 22, 2007 |
| 7217924 |
Holey mirror arrangement for dual-energy e-beam inspector |
May. 15, 2007 |
| 7214938 |
Sample observation method and transmission electron microscope |
May. 8, 2007 |
| 7208731 |
Charged particle beam apparatus |
Apr. 24, 2007 |
| 7141800 |
Non-dispersive charged particle energy analyzer |
Nov. 28, 2006 |
| 7126117 |
Imaging energy filter for electrons and other electrically charged particles and method for energy filtration of the electrons and other electrically charged particles with the imaging energy |
Oct. 24, 2006 |
| 7116816 |
Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen |
Oct. 3, 2006 |
| 7105814 |
Electron microscopy system and electron microscopy method |
Sep. 12, 2006 |
| 7071466 |
Mass spectrometry system for continuous control of environment |
Jul. 4, 2006 |
| 7067805 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method |
Jun. 27, 2006 |
| 7067827 |
Apparatus and method for electron beam irradiation having improved dose uniformity ratio |
Jun. 27, 2006 |
| 7049605 |
Detector using microchannel plates and mass spectrometer |
May. 23, 2006 |
| 7049591 |
Scanning electron microscope |
May. 23, 2006 |
| 7041975 |
Sample analyzer |
May. 9, 2006 |
| 7034315 |
Particle source with selectable beam current and energy spread |
Apr. 25, 2006 |
| 7030375 |
Time of flight electron detector |
Apr. 18, 2006 |
| 7022984 |
Biased electrostatic deflector |
Apr. 4, 2006 |
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