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Class Information
Number: 250/251
Name: Radiant energy > Electrically neutral molecular or atomic beam devices and methods
Description: Subject matter comprising means for producing or utilizing a unidirectional stream of molecules or atoms having no net electrical charge, usually through a vacuum with thermal velocity and methods using such means. Such devices and methods may include magnetic field means to deflect, divert or select a portion of the beam of a desired energy level and may also provide means for subjecting the selected portion of the beam to a microwave electromagnetic field to excite the molecules or atoms of the beam at a resonant frequency, causing a transition of the energy state of the molecules or atoms from one energy-level to another.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5495105 |
Method and apparatus for particle manipulation, and measuring apparatus utilizing the same |
Feb. 27, 1996 |
| 5488228 |
Saddle field source |
Jan. 30, 1996 |
| 5468955 |
Neutral beam apparatus for in-situ production of reactants and kinetic energy transfer |
Nov. 21, 1995 |
| 5466929 |
Apparatus and method for suppressing electrification of sample in charged beam irradiation apparatus |
Nov. 14, 1995 |
| 5466929 |
Apparatus and method for suppressing electrification of sample in charged beam irradiation apparatus |
Nov. 14, 1995 |
| 5434423 |
System and method for optimizing placement of dopant upon semiconductor surface |
Jul. 18, 1995 |
| 5432345 |
Method and apparatus for control of surface potential |
Jul. 11, 1995 |
| 5432342 |
Method of and apparatus for generating low-energy neutral particle beam |
Jul. 11, 1995 |
| 5432341 |
Process and apparatus for producing agglomerate rays |
Jul. 11, 1995 |
| 5399871 |
Plasma flood system for the reduction of charging of wafers during ion implantation |
Mar. 21, 1995 |
| 5376179 |
Atom collimator |
Dec. 27, 1994 |
| 5367160 |
Method for forming and denaturing particles |
Nov. 22, 1994 |
| 5367161 |
Small UHV compatible hyperthermal oxygen atom generator |
Nov. 22, 1994 |
| 5363190 |
Method and apparatus for optical micro manipulation |
Nov. 8, 1994 |
| 5360764 |
Method of fabricating laser controlled nanolithography |
Nov. 1, 1994 |
| 5354986 |
Ion implantation apparatus |
Oct. 11, 1994 |
| 5350926 |
Compact high current broad beam ion implanter |
Sep. 27, 1994 |
| 5343047 |
Ion implantation system |
Aug. 30, 1994 |
| 5338930 |
Frequency standard using an atomic fountain of optically trapped atoms |
Aug. 16, 1994 |
| 5321260 |
Effusion method and an effusion cell for forming molecular beams |
Jun. 14, 1994 |
| 5315109 |
Position measurement of moving atoms using optical fields |
May. 24, 1994 |
| 5308976 |
Method for multi-beam manipulation of microparticles |
May. 3, 1994 |
| 5300891 |
Ion accelerator |
Apr. 5, 1994 |
| 5293508 |
Ion implanter and controlling method therefor |
Mar. 8, 1994 |
| 5286978 |
Method of removing electric charge accumulated on a semiconductor substrate in ion implantation |
Feb. 15, 1994 |
| 5282899 |
Apparatus for the production of a dissociated atomic particle flow |
Feb. 1, 1994 |
| 5280174 |
Method and apparatus for producing a thermal atomic oxygen beam |
Jan. 18, 1994 |
| 5274232 |
Method and apparatus for manipulating atoms, ions or molecules and for measuring physical quantities using stimulated raman transitions |
Dec. 28, 1993 |
| 5274231 |
Method and apparatus for manipulating atoms, ions or molecules and for measuring physical quantities using stimulated Raman transitions |
Dec. 28, 1993 |
| 5271800 |
Method for anisotropic etching in the manufacture of semiconductor devices |
Dec. 21, 1993 |
| 5270542 |
Apparatus and method for shaping and detecting a particle beam |
Dec. 14, 1993 |
| 5243189 |
Ion neutralizer |
Sep. 7, 1993 |
| 5221841 |
Fast atom beam source |
Jun. 22, 1993 |
| 5216241 |
Fast atom beam source |
Jun. 1, 1993 |
| 5212382 |
Laser trapping and method for applications thereof |
May. 18, 1993 |
| 5206504 |
Sample positioning in microgravity |
Apr. 27, 1993 |
| 5177358 |
Solid stripper for a space based neutral particle beam system |
Jan. 5, 1993 |
| 5170890 |
Particle trap |
Dec. 15, 1992 |
| 5166615 |
System for detecting nuclear magnetic resonance signals from small samples |
Nov. 24, 1992 |
| 5164596 |
Focused ion beam irradiating apparatus |
Nov. 17, 1992 |
| 5164599 |
Ion beam neutralization means generating diffuse secondary emission electron shower |
Nov. 17, 1992 |
| 5153430 |
Method and apparatus for measuring the momentum, energy, power, and power density profile of intense particle beams |
Oct. 6, 1992 |
| 5149964 |
Microwave interaction module, in particular for an atomic or molecular beam resonator |
Sep. 22, 1992 |
| 5148034 |
Ion implantation method |
Sep. 15, 1992 |
| 5138169 |
Method and apparatus for irradiating low-energy electrons |
Aug. 11, 1992 |
| 5138157 |
Neutral particle beam propagation direction determining apparatus and method |
Aug. 11, 1992 |
| 5136171 |
Charge neutralization apparatus for ion implantation system |
Aug. 4, 1992 |
| 5128538 |
Vapor effusion source for epitaxial deposition plants |
Jul. 7, 1992 |
| 5115130 |
Surface measuring method and apparatus |
May. 19, 1992 |
| 5113074 |
Ion beam potential detection probe |
May. 12, 1992 |
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