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Class Information
Number: 250/251
Name: Radiant energy > Electrically neutral molecular or atomic beam devices and methods
Description: Subject matter comprising means for producing or utilizing a unidirectional stream of molecules or atoms having no net electrical charge, usually through a vacuum with thermal velocity and methods using such means. Such devices and methods may include magnetic field means to deflect, divert or select a portion of the beam of a desired energy level and may also provide means for subjecting the selected portion of the beam to a microwave electromagnetic field to excite the molecules or atoms of the beam at a resonant frequency, causing a transition of the energy state of the molecules or atoms from one energy-level to another.


Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
6414320 Composition analysis by scanning femtosecond laser ultraprobing (CASFLU). Jul. 2, 2002
6396064 Differential pumping via core of annular supersonic jet May. 28, 2002
6362490 Ion implanter Mar. 26, 2002
6348687 Aerodynamic beam generator for large particles Feb. 19, 2002
6331701 RF-grounded sub-Debye neutralizer grid Dec. 18, 2001
6329105 Pattern formation method and apparatus using atomic beam holography technology Dec. 11, 2001
6329650 Space charge neutralization of an ion beam Dec. 11, 2001
6323484 Method and apparatus for sample current spectroscopy surface measurement Nov. 27, 2001
6320321 Ion beam processing apparatus for processing work piece with ion beam being neutralized uniformly Nov. 20, 2001
6303928 Continuous cold atom beam atomic system Oct. 16, 2001
6285025 Source of fast neutral molecules Sep. 4, 2001
6281492 Method and device for directing a fluid in motion Aug. 28, 2001
6271529 Ion implantation with charge neutralization Aug. 7, 2001
6259090 Supported thin foil stripper and simple non-obstructing power meter for a space based neutral particle beam system Jul. 10, 2001
6255647 Atomic frequency standard based on coherent state preparation Jul. 3, 2001
6242747 Method and system for optimizing linac operational parameters Jun. 5, 2001
6211518 Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments Apr. 3, 2001
6207951 Method of generating a pulsed metastable atom beam and pulsed ultraviolet radiation and an apparatus therefor Mar. 27, 2001
6191427 Ion implantation system and method suitable for low energy ion beam implantation Feb. 20, 2001
6191416 Apparatus for producing a beam of atoms or radicals Feb. 20, 2001
6183817 Method and apparatus for direct write fabrication of nanostructures Feb. 6, 2001
6184625 Ion beam processing apparatus for processing work piece with ion beam being neutralized uniformly Feb. 6, 2001
6180940 Light-driven molecular rotational motor Jan. 30, 2001
6159749 Highly sensitive bead-based multi-analyte assay system using optical tweezers Dec. 12, 2000
6151435 Evanescent atom guiding in metal-coated hollow-core optical fibers Nov. 21, 2000
6137246 Charge-exchange device Oct. 24, 2000
6120548 Method and system for estimating particle motion Sep. 19, 2000
6104025 Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer Aug. 15, 2000
6100536 Electron flood apparatus for neutralizing charge build-up on a substrate during ion implantation Aug. 8, 2000
6067859 Optical stretcher May. 30, 2000
6054708 Neutron beam control method and its apparatus Apr. 25, 2000
6040574 Atmospheric-particle analyzer Mar. 21, 2000
6037599 Ion implantation apparatus and fabrication method for semiconductor device Mar. 14, 2000
6033484 Method and apparatus for cleaning contaminated surfaces using energetic cluster beams Mar. 7, 2000
5990476 Control of surface potential of insulating specimens in surface analysis Nov. 23, 1999
5977542 Restoration of CD fidelity by dissipating electrostatic charge Nov. 2, 1999
5959305 Method and apparatus for monitoring charge neutralization operation Sep. 28, 1999
5953166 Laser trapping apparatus Sep. 14, 1999
5952651 Laser manipulation apparatus and cell plate used therefor Sep. 14, 1999
5939716 Three-dimensional light trap for reflective particles Aug. 17, 1999
5939026 Apparatus for processing gas by electron beam Aug. 17, 1999
5935507 Multi-point laser trapping device and the method thereof Aug. 10, 1999
5909031 Ion implanter electron shower having enhanced secondary electron emission Jun. 1, 1999
5903009 Biased and serrated extension tube for ion implanter electron shower May. 11, 1999
5883005 Semiconductor etching by hyperthermal neutral beams Mar. 16, 1999
5883470 Fast atomic beam source with an inductively coupled plasma generator Mar. 16, 1999
5880478 Compound refractive lenses for low energy neutrons Mar. 9, 1999
5869833 Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments Feb. 9, 1999
5866912 System and method for multiple particle therapy Feb. 2, 1999
5859428 Beam generator Jan. 12, 1999

1 2 3 4 5 6 7 8 9


 
 
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