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Class Information
Number: 219/638
Name: Electric heating > Inductive heating > Specific heating application > Rod > Semiconductor
Description: Subject matter wherein the rod material has conductivity ranges between that of a conductor and an insulator.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7427329 |
Temperature control for single substrate semiconductor processing reactor |
Sep. 23, 2008 |
| 7390367 |
Housing assembly for an induction heating device including liner or susceptor coating |
Jun. 24, 2008 |
| 6896738 |
Induction heating devices and methods for controllably heating an article |
May. 24, 2005 |
| 6887316 |
Ceramic heater |
May. 3, 2005 |
| 6577926 |
Method of detecting and controlling in-situ faults in rapid thermal processing systems |
Jun. 10, 2003 |
| 6395648 |
Wafer processing system |
May. 28, 2002 |
| 6316754 |
Frequency selected, variable output inductor heater system |
Nov. 13, 2001 |
| 6288378 |
Induction heating system with split resonance capacitance |
Sep. 11, 2001 |
| 6188052 |
Matrix-inductor soldering apparatus and device |
Feb. 13, 2001 |
| 5902508 |
Induction heating coil suitable for floating zone processing |
May. 11, 1999 |
| 5550354 |
High-frequency induction heating coil |
Aug. 27, 1996 |
| 5514439 |
Wafer support fixtures for rapid thermal processing |
May. 7, 1996 |
| 5448041 |
Process for the assembly of at least two parts made from a composite material incorporating a ceramic or vitroceramic matrix reinforced by ceramic fibres |
Sep. 5, 1995 |
| 4931945 |
Method of controlling floating zone |
Jun. 5, 1990 |
| 4900887 |
Floating zone drawing circuitry for semiconductor rods |
Feb. 13, 1990 |
| 4833287 |
Single-turn induction heating coil for floating-zone melting process |
May. 23, 1989 |
| 4797525 |
Induction heater for floating zone melting |
Jan. 10, 1989 |
| 4794217 |
Induction system for rapid heat treatment of semiconductor wafers |
Dec. 27, 1988 |
| 4749837 |
Induction heating coil for the floating zone pulling of crystal rods |
Jun. 7, 1988 |
| 4665913 |
Method for ophthalmological surgery |
May. 19, 1987 |
| 4579719 |
Apparatus for crucible-free floating-zone melting a semiconductor rod, particularly of silicon |
Apr. 1, 1986 |
| 4538279 |
Induction coil in the form of a pancake coil for crucible-free zone melting |
Aug. 27, 1985 |
| 4506132 |
Induction coil in the form of a flat coil for crucible-free floating zone melting |
Mar. 19, 1985 |
| 4398974 |
Temperature gradient zone melting process employing a buffer layer |
Aug. 16, 1983 |
| 4246249 |
Silicon purification process |
Jan. 20, 1981 |
| 4220839 |
Induction heating coil for float zone melting of semiconductor rods |
Sep. 2, 1980 |
| 4168998 |
Process for manufacturing a vapor phase epitaxial wafer of compound semiconductor without causing breaking of wafer by utilizing a pre-coating of carbonaceous powder |
Sep. 25, 1979 |
| 4147432 |
Apparatus for thermal diffusion by high frequency induction heating of semiconductor substrates |
Apr. 3, 1979 |
| 4110586 |
Manufacture of doped semiconductor rods |
Aug. 29, 1978 |
| 4109128 |
Method for the production of semiconductor rods of large diameter and device for making the same |
Aug. 22, 1978 |
| 4035600 |
Apparatus for crucible-free zone processing of a semiconductor rod |
Jul. 12, 1977 |
| 4008387 |
Automatically controlled crystal growth |
Feb. 15, 1977 |
| 3985947 |
Device and method for crucible-free zone melting of crystallizable rods in particular semiconductor rods |
Oct. 12, 1976 |
| 3935059 |
Method of producing single crystals of semiconductor material by floating-zone melting |
Jan. 27, 1976 |
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