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Class Information
Number: 219/444.1
Name: Electric heating > Heating devices > Combined with container, enclosure, or support for material to be heated > Exposed horizontal planar support surface for material to be heated (e.g., hot plate, etc.) > Material is an electronic semiconductor device
Description: Subject matter wherein the exposed horizontal planar support surface is intended to support, for heating, apparatus formed of a substance whose electrical conductivity at normal temperature is between that of a conductor and an insulator to control electron flow.

Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8680441 Heating plate with planar heater zones for semiconductor processing Mar. 25, 2014
8624168 Heating plate with diode planar heater zones for semiconductor processing Jan. 7, 2014
8608885 Substrate heat treatment apparatus Dec. 17, 2013
8610034 Heater, manufacturing apparatus for semiconductor device, and manufacturing method for semiconductor device Dec. 17, 2013
8581153 Method of detecting abnormal placement of substrate, substrate processing method, computer-readable storage medium, and substrate processing apparatus Nov. 12, 2013
8558146 Position control with compensation for thermal cycling of a workpiece support Oct. 15, 2013
8546732 Heating plate with planar heater zones for semiconductor processing Oct. 1, 2013
8536494 Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support Sep. 17, 2013
8522848 Methods and apparatuses for assembling components onto substrates Sep. 3, 2013
8519309 Wafer heating apparatus and semiconductor manufacturing apparatus Aug. 27, 2013
8492682 Micro heater Jul. 23, 2013
8461490 Substrate heating unit and substrate treating apparatus including the same Jun. 11, 2013
8450657 Temperature controlled substrate holder having erosion resistant insulating layer for a substrate processing system May. 28, 2013
8405005 Electrostatic chuck system and process for radially tuning the temperature profile across the surface of a substrate Mar. 26, 2013
8399811 Stage for substrate temperature control apparatus Mar. 19, 2013
8383990 Substrate transport apparatus and heat treatment apparatus Feb. 26, 2013
8378270 Ceramic hob Feb. 19, 2013
8378269 Wafer thermometer, temperature measuring device, heat treatment device and method for measuring temperature of heat treatment unit Feb. 19, 2013
8357880 Far infrared ray ceramic plate heating module Jan. 22, 2013
8334481 Mounting table structure, and processing apparatus Dec. 18, 2012
8314371 Rapid thermal processing chamber with micro-positioning system Nov. 20, 2012
8304701 Ceramic heater and method for making the same Nov. 6, 2012
8294069 Heating device for heating a wafer Oct. 23, 2012
8282737 Substrate processing apparatus and method for manufacturing a semiconductor device Oct. 9, 2012
8283606 Substrate processing apparatus and substrate stage used therein Oct. 9, 2012
8263908 Heater plate and a method for manufacturing the heater plate Sep. 11, 2012
8253077 Substrate processing method, computer-readable storage medium and substrate processing system Aug. 28, 2012
8222570 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy Jul. 17, 2012
8222574 Temperature measurement and control of wafer support in thermal processing chamber Jul. 17, 2012
8217317 Apparatus with strain release feature for high temperature processes Jul. 10, 2012
8207476 Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system Jun. 26, 2012
8203104 Mounting table structure and heat treatment apparatus Jun. 19, 2012
8198567 High temperature vacuum chuck assembly Jun. 12, 2012
8193472 Susceptor Jun. 5, 2012
8193473 Uniform temperature heater Jun. 5, 2012
8193629 Bonding structure for a terminal of a susceptor of a semiconductor device manufacturing apparatus Jun. 5, 2012
8183502 Mounting table structure and heat treatment apparatus May. 22, 2012
8178820 Method and heat treatment apparatus for uniformly heating a substrate during a bake process May. 15, 2012
8168926 Heating device May. 1, 2012
8164028 Resistance heater Apr. 24, 2012
8143557 Plane heater Mar. 27, 2012
8115142 Plate, apparatus for adjusting temperature of substrate having the plate and apparatus for processing substrate having the plate Feb. 14, 2012
8115141 Heating element Feb. 14, 2012
8106335 Processing apparatus and heater unit Jan. 31, 2012
8082977 Ceramic mounting for wafer apparatus with thermal expansion feature Dec. 27, 2011
8071920 Planar heater Dec. 6, 2011
8057599 Substrate processing apparatus and method for manufacturing a semiconductor device Nov. 15, 2011
8043431 Substrate processing apparatus and method for manufacturing a semiconductor device Oct. 25, 2011
8014895 Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon Sep. 6, 2011
8008602 Electrostatic chuck heater Aug. 30, 2011

1 2 3 4 5 6 7 8

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