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Class Information
Number: 219/444.1
Name: Electric heating > Heating devices > Combined with container, enclosure, or support for material to be heated > Exposed horizontal planar support surface for material to be heated (e.g., hot plate, etc.) > Material is an electronic semiconductor device
Description: Subject matter wherein the exposed horizontal planar support surface is intended to support, for heating, apparatus formed of a substance whose electrical conductivity at normal temperature is between that of a conductor and an insulator to control electron flow.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7605350 |
System for two-step resist soft bake to prevent ILD outgassing during semiconductor processing |
Oct. 20, 2009 |
| 7601933 |
Heat processing apparatus and heat processing method |
Oct. 13, 2009 |
| 7601442 |
Jig for calcining electronic component |
Oct. 13, 2009 |
| 7601934 |
Integrated thermal unit having a shuttle with a temperature controlled surface |
Oct. 13, 2009 |
| 7576303 |
Wafer holder, and wafer prober provided therewith |
Aug. 18, 2009 |
| 7564008 |
Alumina member and manufacturing method thereof |
Jul. 21, 2009 |
| 7560668 |
Substrate processing device |
Jul. 14, 2009 |
| 7554059 |
Heater unit and semiconductor manufacturing apparatus including the same |
Jun. 30, 2009 |
| 7544916 |
Heating device |
Jun. 9, 2009 |
| 7534627 |
Methods and systems for controlling critical dimensions in track lithography tools |
May. 19, 2009 |
| 7528349 |
Temperature stabilization for substrate processing |
May. 5, 2009 |
| 7525071 |
Power-supplying member and heating apparatus using the same |
Apr. 28, 2009 |
| 7525069 |
Baking unit having device for sensing the attitude of parts of the unit and method of use of the baking unit |
Apr. 28, 2009 |
| 7522823 |
Thermal processing apparatus, thermal processing method, and substrate processing apparatus |
Apr. 21, 2009 |
| 7517217 |
Method and apparatus for heat processing of substrate |
Apr. 14, 2009 |
| 7500781 |
Method and apparatus for detecting substrate temperature in a track lithography tool |
Mar. 10, 2009 |
| 7491913 |
Bake apparatus for use in spin-coating equipment |
Feb. 17, 2009 |
| 7467901 |
Substrate heat treatment apparatus |
Dec. 23, 2008 |
| 7446284 |
Etch resistant wafer processing apparatus and method for producing the same |
Nov. 4, 2008 |
| 7446286 |
Heater strip for an electric heater, heater with such a heater strip and method for manufacturing the heater strip |
Nov. 4, 2008 |
| 7432476 |
Substrate heat treatment apparatus |
Oct. 7, 2008 |
| 7429718 |
Heating and cooling of substrate support |
Sep. 30, 2008 |
| 7429720 |
Electric heating pipe and electric heating apparatus using it |
Sep. 30, 2008 |
| 7427329 |
Temperature control for single substrate semiconductor processing reactor |
Sep. 23, 2008 |
| 7425689 |
Inline physical shape profiling for predictive temperature correction during baking of wafers in a semiconductor photolithography process |
Sep. 16, 2008 |
| 7420143 |
Durable graphite connector and method for manufacturing thereof |
Sep. 2, 2008 |
| 7416793 |
Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same |
Aug. 26, 2008 |
| 7417206 |
Heater, wafer heating apparatus and method for manufacturing heater |
Aug. 26, 2008 |
| 7415312 |
Process module tuning |
Aug. 19, 2008 |
| 7411161 |
Susceptor for deposition process equipment and method of fabricating a heater therein |
Aug. 12, 2008 |
| 7408131 |
Wafer holder and semiconductor manufacturing apparatus |
Aug. 5, 2008 |
| 7393417 |
Semiconductor-manufacturing apparatus |
Jul. 1, 2008 |
| 7394043 |
Ceramic susceptor |
Jul. 1, 2008 |
| 7390990 |
Heating device |
Jun. 24, 2008 |
| 7372001 |
Ceramics heater |
May. 13, 2008 |
| 7361230 |
Substrate processing apparatus |
Apr. 22, 2008 |
| 7361865 |
Heater for heating a wafer and method for fabricating the same |
Apr. 22, 2008 |
| 7357288 |
Component connecting apparatus |
Apr. 15, 2008 |
| 7348519 |
Multi-zone griddle and grill |
Mar. 25, 2008 |
| 7345259 |
Circuit arrangement and method for preventing overheating of a cooking appliance |
Mar. 18, 2008 |
| 7342204 |
Heater and heating device |
Mar. 11, 2008 |
| 7332694 |
Heating resistances and heaters |
Feb. 19, 2008 |
| 7329842 |
Ceramic heater and method for producing ceramic heater |
Feb. 12, 2008 |
| 7326886 |
Wafer support member and semiconductor manufacturing system using the same |
Feb. 5, 2008 |
| 7326877 |
Laser thermal processing chuck with a thermal compensating heater module |
Feb. 5, 2008 |
| 7306858 |
Aluminum nitride sintered body |
Dec. 11, 2007 |
| 7297906 |
Integrated thermal unit having a shuttle with two-axis movement |
Nov. 20, 2007 |
| 7288746 |
Integrated thermal unit having laterally adjacent bake and chill plates on different planes |
Oct. 30, 2007 |
| 7282675 |
Integrated thermal unit having a shuttle with a temperature controlled surface |
Oct. 16, 2007 |
| 7279661 |
Heating apparatus |
Oct. 9, 2007 |
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