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Class Information
Number: 219/390
Name: Electric heating > Heating devices > Combined with container, enclosure, or support for material to be heated > Muffle-type enclosure
Description: Subject matter wherein the container or enclosure structure comprises an inner compartment for holding the material to be heated, the compartment wall, or walls, preventing direct transmission of heat energy derived from the heating means to the material.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7616872 |
Temperature measurement and heat-treating methods and systems |
Nov. 10, 2009 |
| 7608802 |
Heating device for heating semiconductor wafers in thermal processing chambers |
Oct. 27, 2009 |
| 7605349 |
Slow cooker and method of operation |
Oct. 20, 2009 |
| 7598150 |
Compensation techniques for substrate heating processes |
Oct. 6, 2009 |
| 7598477 |
Vacuum muffle quench furnace |
Oct. 6, 2009 |
| 7575431 |
Vertical heat processing apparatus and method for using the same |
Aug. 18, 2009 |
| 7537448 |
Thermal processing method and thermal processing unit |
May. 26, 2009 |
| 7534977 |
Heat treatment apparatus and method of manufacturing a semiconductor device |
May. 19, 2009 |
| 7534978 |
Process chamber of an installation for the thermal treatment of printed circuit boards |
May. 19, 2009 |
| 7531769 |
Carbon fiber composite muffle |
May. 12, 2009 |
| 7528348 |
Apparatus and method for measuring the temperature of substrates |
May. 5, 2009 |
| 7528347 |
Cooling device and heat treating device using the same |
May. 5, 2009 |
| 7528349 |
Temperature stabilization for substrate processing |
May. 5, 2009 |
| 7525068 |
Heating system of batch type reaction chamber and method thereof |
Apr. 28, 2009 |
| 7521654 |
Heater panel of a radiant heater compromising a heating spiral |
Apr. 21, 2009 |
| 7514650 |
Continuous infrared furnace |
Apr. 7, 2009 |
| 7509035 |
Lamp array for thermal processing exhibiting improved radial uniformity |
Mar. 24, 2009 |
| 7503762 |
Substrate processing apparatus and substrate processing method |
Mar. 17, 2009 |
| 7501607 |
Apparatuses and methods for suppressing thermally-induced motion of a workpiece |
Mar. 10, 2009 |
| 7491913 |
Bake apparatus for use in spin-coating equipment |
Feb. 17, 2009 |
| 7488918 |
Method and apparatus for manufacturing printed light guide plate |
Feb. 10, 2009 |
| 7489858 |
Heater assembly |
Feb. 10, 2009 |
| 7482555 |
Substrate transportation device (air) |
Jan. 27, 2009 |
| 7479619 |
Thermal processing unit |
Jan. 20, 2009 |
| 7466907 |
Annealing process and device of semiconductor wafer |
Dec. 16, 2008 |
| 7453051 |
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
Nov. 18, 2008 |
| 7442900 |
Chamber for uniform heating of large area substrates |
Oct. 28, 2008 |
| 7431585 |
Apparatus and method for heating substrates |
Oct. 7, 2008 |
| 7432475 |
Vertical heat treatment device and method controlling the same |
Oct. 7, 2008 |
| 7429717 |
Multizone heater for furnace |
Sep. 30, 2008 |
| 7429718 |
Heating and cooling of substrate support |
Sep. 30, 2008 |
| 7416405 |
Vertical type of thermal processing apparatus and method of using the same |
Aug. 26, 2008 |
| 7415312 |
Process module tuning |
Aug. 19, 2008 |
| 7414224 |
Backside rapid thermal processing of patterned wafers |
Aug. 19, 2008 |
| 7387762 |
Apparatus for sintering silver clay |
Jun. 17, 2008 |
| 7381928 |
Thermal processing apparatus and thermal processing method |
Jun. 3, 2008 |
| 7378618 |
Rapid conductive cooling using a secondary process plane |
May. 27, 2008 |
| 7371998 |
Thermal wafer processor |
May. 13, 2008 |
| 7371997 |
Thermal processing apparatus and thermal processing method |
May. 13, 2008 |
| 7358200 |
Gas-assisted rapid thermal processing |
Apr. 15, 2008 |
| 7358462 |
Apparatus and method for reducing stray light in substrate processing chambers |
Apr. 15, 2008 |
| 7351936 |
Method and apparatus for preventing baking chamber exhaust line clog |
Apr. 1, 2008 |
| 7332691 |
Cooling plate, bake unit, and substrate treating apparatus |
Feb. 19, 2008 |
| RE40052 |
Heat treatment apparatus |
Feb. 12, 2008 |
| 7323661 |
Heat treatment apparatus using a lamp for rapidly and uniformly heating a wafer |
Jan. 29, 2008 |
| 7317172 |
Bake system |
Jan. 8, 2008 |
| 7317175 |
User interface for configuring and controlling an array of heater elements |
Jan. 8, 2008 |
| 7311520 |
Heat treatment apparatus |
Dec. 25, 2007 |
| 7312422 |
Semiconductor batch heating assembly |
Dec. 25, 2007 |
| 7274006 |
Heater |
Sep. 25, 2007 |
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